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전자선 직접묘사에서 Through-put이 향상된 단위 矩形묘사방법
박선우,김철주,Park, Sun-Woo,Kim, Chul-Ju 대한전자공학회 1989 전자공학회논문지 Vol. No.
This paper describes to the unit rectangle EB direct writing lithography method using SEM. This method has the constant exposure time to any rectangle pattern. In order to change the EB current according to various rectangle size for the constant exposure time, the supply current of condenser lens in controlled by BITMAP-IV CAD system. By this method, the resizing procedure of density pattern area is not needed to pattern data conversion, and the through-put ofr exposure is increased about 172 times compared with the unit scan exposure method. 본 논문은 패턴의 모양에 따라서 패턴 데이타 포멥변환시 분할되는 각종 矩形패턴을 크기에 구애됨이 없이 전자선 직접묘사 시간이 일정한 矩形단위로 전자선 직접묘사하는 방법을 제안하였다. 본 실험에서는 SEM을 사용하였으며 矩形의 크기에 따라 일정시간에 요구되는 전자선 전류를 변화시키기 위하여 집속렌즈의 공급전류를 BITMAP-IV CAD 시스템으로 제어하였다. 본방법에서는 패턴 데이타 포맵변환시 밀집된 패턴에 대한 resizing과정이 불필요하며 묘사시간에 근거한 through-put은 unit scan방식에 비하여 172배가 향상되었다.
박선우,배종섭,김기산,박선희,이병훈,최제용,박재영,하성우,김용림,권태환,김인산,박낭운 생화학분자생물학회 2004 Experimental and molecular medicine Vol.36 No.3
Betaig-h3 (βig-h3) is a secretory protein com-posed of fasciclin I-like repeats containing se-glycosaminoglycans in vivo. Expresion of βig- h3 is responsive to TGF-β and the protein is found to be asociated with extracelular matrix (ECM) molecules, implicating βig-h3 as an ECM adhesive protein of developmental processes. We previously observed predominant expres-sion of βig-h3 expresion in the basement mem-brane of proximal tubules of kidney. In this study, the physiological relevance of such lo-calized expression of βig-h3 was examined in the RPTEC constitutively expressed βig-h3 and the expression was dramatically induced by exo-genous TGF-β1 treatment. βig-h3 and its second and fourth FAS1 domain were able to mediate RPTEC adhesion, spreading and migration. Two known α3β1 integrin-interaction motifs including aspartatic acid and isoleucine residues, NKDIL and EPDIM in βig-h3 were responsible to medi-ate RPTEC adhesion, spreading, and migration. By using specific antibodies against integrins, we confirmed that α3β1 integrin mediates the adhesion and migration of RPTECs on βig-h3. In addition, it also enhanced proliferation of RPTECs through NKDIL and EPDIM. These re-sults indicate that βig-h3 mediates adhesion, spreading, migration and proliferation of RPTECs through the interaction with α3β1 integrin and is intimately involved in the maintenance and the regeneration of renal proximal tubular epi-thelium.
대전입자형 디스플레이의 패널전류 분석에 의한 광특성 평가
박선우,권기영,장성근,김영조,Park, Sun-Woo,Kwon, Ki-Young,Chang, Sung-Keun,Kim, Young-Cho 한국전기전자재료학회 2009 전기전자재료학회논문지 Vol.22 No.10
The moving behavior of particle with voltage biasing is studied by analyzing the displacement current generated in electrodes and the drift current by moving particles in cell gap. These currents are ascertained by optical reflectivity on the panel. We obtained the saturated current after a peak in threshold voltage which is coincide with reflectivity of 80%. These saturated optical reflectivity and its drift current offer optimum q/m of particles and driving voltage and can be analytically studied on grey scale methods. Especially regional analysis is useful to aging and driving voltage and the understanding of operating mechanism of charged particle type display.