MEMS 공정을 위한 여러 종류의 산화막의 잔류응력 제거 공정

李相佑,김성운,李尙禹,김종팔,박상준,이상철,조동일 경북대학교 센서기술연구소 1998 센서技術學術大會論文集 Vol.9 No.1

Various oxide films are commonly used as a sacrificial layer or etch mask in the fabrication of microelectromechanical systems (MEMS). Large residual strain of these oxide films cause the wafer to bow, which can have detrimental effects on photolithography and other ensuing processes. This paper investigates the residual strain of tetraethoxysilane (TEOS), low temperature oxide (LTO), 7wt% and lOwt% phosphosilicate glass (PSG). Euler beams and a bent-beam strain sensor are used to measure residual strain. A polysilicon layer is used as a sacrificial layer, which is selectively etched away by XeF_(2). First, the residual strain of as-deposited films is measured, which is quite large. These films are annealed at 500℃, 600℃, 700℃ and 800℃ for 1 hour and residual strain is measured. Then, the residual strain after annealing at the conditions for depositing a 2μm thick polysilicon at 585℃ and 625℃ are also measured. Our results show that the 7wt% PSG is best suited as the sacrificial layer for 2μm thick polysilicon processes.

삽목 조건이 ‘설향’ 딸기의 묘소질 및 과실 수량에 미치는 영향

이상우,이용혁,홍점규,최성환,박수정,이상우 (사) 한국생물환경조절학회 2023 생물환경조절학회지 Vol.32 No.4

딸기 ‘설향’ 품종에 대해 삽목 육묘의 조건을 확립하고자 삽수 채취용 모주 선택, 삽수의 적정 엽수 및 삽목 시기를 구명하였다. 삽수 채취는 육묘장 모주와 과실 수확 후 재배 식물체에서 채취하였고, 삽수의 엽수는 0, 1, 2장 그리고 삽목 시기는 6 월 4일부터 7월 9일까지 1주일 간격으로 하였다. 육묘장 삽수와 재배 식물체 삽수의 최종 생존율은 각각 99.5%, 98.7%로높았으며, 유의적인 차이는 없었다. 근수는 육묘장 삽수에서3.1개 많았고, 관부와 잎의 생육은 차이가 없었다. 과실 수량은 육묘장 삽수와 재배 식물체 삽수에서 각각 419.2g, 428.4g 이었지만 유의적인 차이는 없었다. 삽수의 엽수별 생존율은엽수 1, 2장에서 각각 98.1%, 98.3%로 높았고, 0장은 25.3% 로 현저히 낮았다. 근수는 엽수 1, 2장에서 각각 26.0개, 26.3 개로 엽수 0장의 23.5개에 비해 많았다. 관부와 엽의 생육에서는 엽수에 따른 유의적인 차이가 없었다. 과실 수량은 엽수 1, 2장에서 각각 424.4g, 421.5g으로, 0장 396.7g 보다 많았다. 삽목 시기에 따른 삽목 후 생존율은 97.2% 이상으로 높았으며, 처리 간의 유의적인 차이는 없었다. 묘의 지하부와 지상부그리고 관부의 생육은 6월 4일과 11일 삽목에서 가장 좋았다. 과실 수량은 6월 4일, 6월 11일 삽목에서 각각 433.3g, 426.4g 으로 가장 많았으며, 삽목 시기가 가장 늦었던 7월 9일 삽목에서는 384.5g으로 적었다. 딸기 삽목용 삽수 재료는 육묘장 삽수와 과실 수확을 마친 재배 식물체 삽수 모두 가능하였고, 삽수의 적정 엽수는 최소 1장 이상 그리고 경남 지역의 삽목 시기는 6월 4일-11일이 적합하였다. This study was conducted to investigate optimal conditions for cutting propagation of the strawberry cultivar “Sulhyang” through the collection methods of cuttings (runners tips), leaf number of cuttings, and cutting time. Cuttings were collected from the mother plant in the nursery bed (MP) and plants after fruit harvest (HP); the leaf number of cuttings was 0, 1, and 2, and the cutting time was at one-week intervals from June 4 to July 9. The survival rates for MP and HP cuttings were notably high, reaching 99.5% and 98.7%, respectively, but no significant difference was found. The number of roots were higher in MP cuttings, and there was no significant difference in crown and leaf growth. The fruit yields were 419.2 and 428.4 g, for MP and HP cuttings, respectively. The survival rates according to leaf number of cuttings were 98.1% and 98.3% for 1 and 2 remaining leaves, respectively, and remarkably lower at 25.3% for no remaining leaves. The root numbers were 26.0 and 26.3 for 1 and 2 remaining leaves, respectively, compared with 23.5 for no remaining leaves, with no significant differences in crown and leaf growth. The fruit yields were 424.4 and 421.5 g for 1 and 2 remaining leaves, respectively, and 396.7 g for no remaining leaves. The survival rates according to cutting time was over 97.2% in all cutting time without any difference in each treatment. The root, shoot, and crown of the nursery plant before planting showed the best growth in the cuttings on June 4 and 11, resulting in the highest fruit yields of 433.3 and 426.4 g, respectively, with the lowest yields at 384.5 g for cutting time on July 9. Both MP and HP materials proved suitable for strawberry cuttings. The optimal leaf number for cuttings was at least 1, and the optimal cutting time in Gyeongnam area was evaluated as around June 4-11.

水平 bow-fin이 船體抵抗 및 運動性能에 미치는 影響 : 수평 bow-fin이 선체저항 및 운동성능에 미치는 영향

이상우 釜山大學校 工科大學 1985 工科大學 硏究 報告 Vol.29 No.-

21세기의 동아시아와 한국 그리고 제주도 : "북한관광실태연구" "동북아 해양질서와 국제법" "지방분권화 와 국제화 흐름 속에서 제주도 개발을 다시 생각한다"

김부찬,이상우,허향진 제주대학교 동아시아연구소 1990 東아시아硏究論叢 Vol.1 No.-

건전성 지표 기반의 베어링 이상 사전 예측 모형에 관한 연구

이상우,송지은,배석주 대한산업공학회 2019 대한산업공학회 춘계학술대회논문집 Vol.2019 No.4

벼의 자연통풍건조에 있어서 통풍량이 건조에 미치는 영향에 관한 연구

이상우,정창주 한국농공학회 1974 한국농공학회논문집 Vol.16 No.1

An experimental work was conducted by using a laboratory-made model dryer to investigate the effect of the rate of natural forced-air on the drying rate of rough rice which was deposited in the deep-bed. The dryer consisted of 8 cylinderical containers with grain holding screen at their bottoms, each of which having 30cm in diameter and 15cm in height. The containers were sacked vertically with keeping them air-tight by using paper tape during dryer operation. Two separate layers of containers were operated in the same time to have two replications. The moisture contents of grains within each bins after predetermined period of dryer operation were determined indirectly by measuring the weight of the individual containers. The air-rates were maintained at 6 levels, or 5, 8, 10, 15, 18 and 20 millimenters of static head of water. The roomair conditions during dryer operation were maintained in the range of 10-l5$^{\circ}C$ in temperature and 40-60% in relative humidity. The results of the study are summarized as follows: 1. Drying characteristics of the grains in the bottom layers were approximately the same regardless of airdelivery rates, giving the average drying rate as about 0.35 percent per hour after 40-hour drying period, during which moisture content (w. b.) reduced from 24 percent to about 10 percent. 2. After about 40-hour drying period, the mean drying rates increased from 0.163 percent per hour to 0.263 percent per hour as air-flow rates increased from 5mm to 87.16mm of static head of water. In the same time, the moisture differences of grains between lower and upper layers varied from 12.7 percent at the air rate of 5mm of water head to 7.5 percent at the air-flow rate of 20mn of water head. Thus, the greater the air-flow rate was, the more overall improvement in drying performance was. Additionally, from the result of ineffectiveness of drying grain positioned at 70cm depth or above by the air rate of 5mm of static head of water it may be suggested in practical application that the height of grain deposit would be maintained adequately within the limits of air-rates that may be actually delivered. 3. Drying after layer-turning operation was continued for about 30 hours to test the effectiveness of reducing moisture differences in the thick layers. As a result of this layer-turning operation, moisture distribution through layers approached to narrow ranges, giving the moisture range as about 7 percent at air-flow rate of 5mm head of water, about 3 percent at 10mm head about 2 percent at 15mm head, and less than 1 percent at 20mm head. In addition, from the desirable results that drying rate was rapid in the lower layers and dully in the upper layers, layer-turning operation may be very effective in natural air drying with deep-layer grain deposit, especially when the forced air was kept in low rate. 4. Even though the high rate of air delivery is very desirable for deep-layer natural-air drying of rough rice, it can be happened that the required air delivery rate could not be attained because of limitation of power source available on farms. To give a guide line for the practical application, the power required to perform the drying with the specified air rate was analyzed for different sizes of drying bin and is given in Table (5). If a farmer selects a motor of which size is 1 or {{{{1 { 1} over {2 } }}}} H.P. and air-delivery rate which ranges from 8~10mm of head, the diameter of grain bin may be suggested to choose about 2.4m, also power tiller or other moderate size of prime motor may be recommended when the diameter of grain bin is about 5.0m or more for about 120cm grain deposit.

국내 폐광산지역 인체위해성평가에 적합한 노출인자 및 모델에 관한 연구

이상우,임태용,박미정,이상환,차종문,김순오 한국자원공학회 2015 한국자원공학회지 Vol.52 No.5

Currently, approximately 2,000 abandoned mines was existed in Korea and some of them left without management in Korea. Those exert adverse effect to inhabitant around mine area due to contamination of heavy metals in soils, ground water and crops. However, the research related with human risk assessment on abandoned mine area is insufficient in Korea. In this study, the exposure factors, which play a significant role to quantify the human risk caused by contamination of heavy metal around mine area, were specialized. Also, the specialized model for mine area contaminated with heavy metals was applied to estimate human risk . The results were compared with those obtained from the Korean guidelines for soil risk assessment. 현재 국내에는 약 2,000여개의 폐광산이 존재하고 있으며, 이중 일부의 폐광산은 주변에 방치된 폐석, 광미에 함유된 중금속의 유출로 인하여 주변 토양, 지하수 및 농작물 오염과 이로 인한 주민 건강의 문제가다수 보고되고 있다. 그러나 폐광산지역 중금속 오염에 의한 인체위해성을 정량적으로 평가하기 위한 기법에대한 연구는 부족한 상황이다. 따라서 본 연구에서는 폐광산지역에 특성화된 노출인자를 도출하고, 이를 이용하여 국내 농경지 토양의 우려기준과 대책기준을 기준으로 국내 폐광산 주변의 중금속 오염에 의한 주민들의인체위해성 평가를 수행하여 보았으며, 이 결과를 국내 오염토양 위해성평가지침에 의한 방법과 비교하여 보았다.

건전성 지표 기반의 베어링 이상 사전 예측 모형에 관한 연구

이상우,송지은,배석주 한국경영과학회 2019 한국경영과학회 학술대회논문집 Vol.2019 No.4

1910년대 동경유학생학우회와 근대극 - 이광수와 최승만의 경우를 중심으로 -

이상우 한민족어문학회 2019 韓民族語文學 Vol.0 No.86

The drama <Kyu-han(규한)>(1917), which was written by Yi Kwang-soo, has be known that it is the first creative drama in Korea, the beginning of it’s creation is not late from the point of view in the history of Korean modern literature, or the history of Korean modern theatre. If we assume that Korean modern dramas(Shin-geki, 新劇) were established in colonial Korea in 1920’s, Yi Kwang-soo’s writing of drama <Kyu-han(규한)> was never too late at that time. However, it is difficult to understand that Yi Kwang-soo wrote a modern drama at its highlight period of Shinpa-geki(신파극) in colonial Korea. Not only that, after writing <Kyu-han(규한)>, Cho Cheon-seok’s drama <Jochun-yi-biae(조춘의 비애)>(1918), Choi Seung-man’s drama <Hwang-hon(황혼)>(1919), and Yoo Ji-young’s drama <Yisang-jeok-Gyolhon(이상적 결혼)>(1919~20) were continually published in the late 1910’s. How can we see this happening that modern dramas were continuously published in Shinpa-geki period of colonial Korea. This thesis is focussed that Korean students studying abroad in Tokyo mainly wrote these Korean modern dramas at that time, most of them were belonged to Korean students association of studying abroad in Tokyo, and their students association performed theatre by themselves on their year-end party. Especially, <Hwang-hon(황혼)>(1919) was performed on the year-end party of Korean students association. Therefore, we can suppose that Korean modern dramas which were created by Korean students studying abroad in Tokyo in 1910’s were born in accordance with the culture movement of Korean students association of studying abroad in Tokyo. Their choice of writing drama was the because that the genre of drama is the most effective for propagating nationalism and enlightenment than the other genre of literature, the other arts. 한국 최초의 근대희곡으로 알려진 이광수의 <규한>(1917)은 한국근대문학사, 또는 한국근대연극사의 관점에서 볼 때 한국희곡문학의 출발이 결코 늦은 것이 아님을 시사해주는 작품이다. 한국 근대극, 신극의 성립과 전개가 대개 1920년대에 이루어진 것이라고 본다면 이광수의 희곡 <규한>의 창작은 다소 이른 감이 있다. <규한>의 창작 시기는 한국근대연극사에서 예성좌(藝星座)의 공연(1916년, <코르시카의 형제>, <카츄샤> 공연)에 의해 과도기적 근대연극의 시도가 잠시 있기는 했지만 여전히 신파극시대가 견고하게 지탱하고 있던 때였기 때문이다. 신파극시대의 절정기에 근대희곡 <규한>은 어떻게 탄생할 수 있었을까, 그리고 뒤를 이어 오천석의 <조춘의 비애>(1918), 최승만의 <황혼>(1919), 유지영의 <이상적 결혼>(1919~20) 등 일본유학생들에 의해 창작희곡들이 계속 씌어지게 되는 이유는 무엇일까 하는 점은 한국근대문학사 및 한국근대연극사의 온당한 서술을 위해 반드시 해결해야 할 문제가 아닐 수 없다. 이 논문에서 필자는 이광수의 <규한>을 비롯해 오천석의 <조춘의 비애>, 최승만의 <황혼>, 유지영의 <이상적 결혼> 등이 동경에서 유학하는 조선유학생들에 의해 창작된 희곡이라는 점, 그리고 그 희곡들이 동경유학생이 발행한 잡지에 발표되었다는 점에 주목하고, 당시 동경유학생들이 만든 유학생단체와 잡지, 강연회, 연설회, 웅변대회, 연극 공연 등 그들이 추구한 청년문화운동의 양상, 그리고 그들의 연극에 대한 인식과 연극문화의 실상, 더 나아가 그러한 연극문화 형성에 영향을 끼친 당대 일본의 문학과 연극 또는 문화적 배경은 어떠한 것이었는지에 대해 고찰한다. 특히 본고는 이광수의 <규한>과 최승만의 <황혼>을 중심으로 한국 근대 초창기 희곡이 동경유학생단체의 망년회 여흥 공간이라는 문화적 배경과 어떠한 연관을 갖고 탄생하는지, 그리고 그러한 근대희곡 탄생의 사회, 문화사적 의미는 무엇인지에 대해 규명한다. 더 나아가동경유학생학우회의 연극 활동과 같은 문화운동이 궁극적으로는 2.8독립운동과 관련된다는 점에서 동경유학생들의 문화운동이 민족운동의 맥락에서 이루어진 것임을 밝힌다.

졸업학점인(卒業學点引)에 수반(隨伴)되는 문제분석(問題分析) 통(通)한 대학(大學)의 질적향상(質的向上) 방안(方案) 연구(硏究) : 제2장(제2章) 대학교과과정(大學敎科課程)의 개편(改編)

이상우 경희대학교 교육발전연구원(구.교육문제연구소) 1974 慶熙大學校 敎育問題硏究所 論文集 Vol.2 No.-