Characteristics of a plasma information variable in phenomenology-based, statistically-tuned virtual metrology to predict silicon dioxide etching depth

Jang, Yunchang,Roh, Hyun-Joon,Park, Seolhye,Jeong, Sangmin,Ryu, Sanywon,Kwon, Ji-Won,Kim, Nam-Kyun,Kim, Gon-Ho Elsevier 2019 Current Applied Physics Vol.19 No.10

<P><B>Abstract</B></P> <P>A phenomenology-based virtual metrology (VM) for monitoring SiO<SUB>2</SUB> etching depth was proposed by Park (2015). It achieved high prediction accuracy by introducing newly developed plasma information (PI) variables as designated inputs, called PI-VM. The PI variables represent the state of the plasma, the sheath, and the target during the process. We investigate how a PI variable can help to improve prediction accuracy of VM and how it plays a special role in the statistical selection. We choose only PI<SUB>EEDF</SUB> among the three PI variables to focus on the investigation. The PI<SUB>EEDF</SUB> is determined from the ratio of line-intensities of optical emission spectroscopy. We apply Pearson's correlation filter (PCF), principal component analysis (PCA), and stepwise variable selection (SVS) as statistical selection methods on the variables set including PI<SUB>EEDF</SUB> or not. Multilinear regression is used to model the VM. This study reveals that PI<SUB>EEDF</SUB> variable is a good variable in terms of independence from other input variables and explanatory power for an output variable. Especially, VM using SVS method applied to variable sets including PI<SUB>EEDF</SUB> achieves the highest accuracy, comparable to Park's PI-VM. This study shows that PI<SUB>EEDF</SUB> variable is particularly useful for monitoring of the fine variations in semiconductor manufacturing process and it also extends the utilization of OES sensor data.</P>

NSIP와 BOOP의 고해상전산화단층촬영 소견과 비교

백상현,박재성,차장규,홍현숙,김대호,박성진,조준희,이혜경,최진수 순천향의학연구소 2003 Journal of Soonchunhyang Medical Science Vol.9 No.2

Purpose: BOOP and NSIP also share similar clinical features such as subacute flu-like illness, the finding of bronchoalveolar lavage, the result of pulmonary function test and more favourable outcome than usual interstitial pneumonia(UIP). The author try to compare the HRCT findings of NSIP with BOOP by pattern and distribution of diseases. Materials and Methods: HRCT findings of histopathologically proven NSIP(Group Ⅰ; 6, Group Ⅱ; 7, Group Ⅲ; 2) in 15 patients(5 male, 10 female, age range, 39-69 years; mean age, 53 years), BOOP in 15 patients(6 male, 9 female, age range, 26-76 years; mean age, 52 years) were reviewed retrospectively. Results: The common pattern of the two diseases was admixed consolidation, ground glass attenuation & reticular densities with/without architectural distortion(NSIP; 53.3%, BOOP; 46.7%). The main component of the pattern wan predominantly consolidation(NSIP; 46.7%, BOOP; 73.3%) and ground glass attenuation(NSIP; 40.0%, BOOP;20.0%). Architectural distotion was more provinent finding with NSIP(mild ; 3, moderate ; 4, severe; 2) compared with BOOP(mild; 7, moderate; 2, severe; 0). The predominant overall distribution was lower lung, peribronchovascular & peripheral lung field in both of the two entities(NSIP;73.3%, BOOP; 73.3%). Peribronchovascular involvement was more common with NSIP(100%) than BOOP(80%), whereas peripheral involvement was more common with BOOP(93.3%) than NSIP(80%). Conclusion: The HRCT findings of NSIP and BOOP were similar in pattern and distribution. But NIP manifested more frequently ground-glass attenuation, whereas BOOP showed more frequently consolidation. Architectural distortion was more severe with NSIP than BOOP. NSIP invoved more frequently peribronchovascular space and BOOP were more common in peripheral lung field.

지능형 자동차 주변 감시 시스템 설계 방안

장시웅(Si-woong Jang),박영식(Young-sik Park),성현용(Hyun-yong Sung),곽길봉(Gil-bong Kwak),김선남(Seon-nam Kim),김경진(Kyeoung-jin Kim) 한국정보기술학회 2009 Proceedings of KIIT Conference Vol.2009 No.-

본 연구는 차량 주변을 지능적으로 감시하는 자동차 주변 감시시스템에 관한 것으로, 자동차의 주행 및 주차 시 속도의 변화나 운전자의 요청에 의해 자동차 주변 지역에 관한 시야를 상황에 따라 달리하여 모니터링 함으로써 운전자가 안전한 주행 및 주차를 수행할 수 있게 하기 위한 것이다. 그러한 목적을 달성하기 위하여 본 연구에서는 차량의 주변부를 감시하기 위하여 차량의 외곽에 설치된 카메라의 각도가 지면으로부터 차량의 상부를 향하는 방향으로 변경될 수 있도록 제어하는 제어부, 카메라의 영상을 입력받아 차량주변의 영상을 생성하는 영상처리모듈, 영상처리모듈에서 생성된 영상을 출력하는 디스플레이를 포함하는 것을 특징으로 하는 지능형 자동차 주변 감시시스템을 제안한다. This study is on a vehicle surroundings monitoring system, which enables a driver to travel and park safely by monitoring vehicle surroundings, depending on the speed of vehicle and driver's control when traveling and parking. To achieve the aforementioned purpose, we propose an intelligent vehicle surroundings monitoring system, which consists of a control part, an image processing module and display module. Hence, the control module controls angle of camera to turn upward from the bottom to monitor vehicle surroundings. The image processing module merges the received images from cameras with the original vehicle image to display the vehicle’s surroundings in real time as if looking down from the sky.

40세 이하 관상동맥 질환자에서 장기적 임상 관찰

이승욱,정명호,박종철,박형욱,조상희,김원,김계훈,이상현,강경태,조장현,김남호,김건형,안영근,조정관,박종춘,강정채 全南大醫大 2001 전남의대학술지 Vol.37 No.2

개에서 이중 결찰법을 통한 동맥관 개존증의 완치 예

윤헌영,정순욱,박희명,박철,정만복,김준영,한현정,황민,노병국,박상혁,장하영,박정윤 한국임상수의학회 2004 한국임상수의학회지 Vol.21 No.1

A ten months old, female Yorkshire terrier weighing 2.88 kg referred to veterinary teaching hospital of college of veterinary medicine, Konkuk University because of syncope, cough and dyspnea. First hematological and serum chemical test revealed thrombocytopenia, mild anemia, and increase of concentration of ALP (195 U/L). On 57 days later, second hematological and serum chemical test revealed polycythemia, increase of concentration of ALP (211 U/L), and Tchol (387 mg/dl). Right atrium enlargement, main pulmonary artery bulge and cardiomegaly (VHS = 11.5) were observed in radiographic findings. Ultrasonographic images showed both right and left ventricular dilation and turbulent flow between the descending aorta and the main pulmonary artery in color Doppler imaging. ECG showed left ventricular enlargement, SA block, and electrical alternant. Thoracotomy was performed through left fourth intercostal incision under isoflurane anesthesia. Patent ductus arteriosus was double ligated with 1-0 silk. Cough and dyspnea disappeared on 5 days after operation. Turbulent flow was not found in color doppler imaging of ultrasonography on 10 days after operation. Ten months later after the operation, syncope could not exist any more.

한의진단명과 진단요건의 표준화 연구 II (표준화 실례) : 2차년도 연구결과 중간 보고

양기상,최선미,최승훈,안규석,박경모,박종현,김성우,신승호,정우열,전병훈,고현,김정범,신상우,김성훈,김동희,권영규,엄현섭,장혜옥 한국한의학연구원 1996 한국한의학연구원논문집 Vol.2 No.1

The diagnostic requirements were suggested and explained regarding the systems of differentiation of symptoms and signs in the second year study of standardization and unification of the terms and conditions used for diagnosis in oriental medicine. The systems were as follows; - differential diagnosis according to condition of body fluid, differentiation of syndromes according to the state of qi and blood, differential diagnosis according to relative excessiveness or deficiency of yin and yang(氣血陰陽津液辨證) - differentiation of diseases according to pathological changes of the viscera and their interrelation - analyzing and differentiating of febrile diseases in accordance with the theory of the six channels(傷寒辨證) The individual diagnosis pattern was arranged by the diagnostic requirements in the following order : another name(異名), notion of diagnosis pattern, index of differentiation of symptoms and signs(辨證指標), the main point of diagnosis, analysis of diagnosis pattern(證候分析), discrimination of diagnosis pattern(證候鑑別), a way of curing a diseases(治法), prescription(處方), herb in common use(常用藥物), diseases appearing the diagnosis pattern(常見疾病), documents(文獻調査). This study was carried out on the basis of the Chinese documents and references.

구강에서 채취한 혐기성 세균에 대한 서양산 고추냉이(Horseradish, Armoracia rusticana) 뿌리 추출물의 항균효과

장용걸,박호원,신일식,이주현,서현우 大韓小兒齒科學會 2010 大韓小兒齒科學會誌 Vol.37 No.2

서양산 고추냉이 (Horseradish, Armoracia rusticana)의 주성분인 allylisothiocyanate(AIT)는 각종 세균에 대한 살균 효과로 주목받고 있다. 이전 연구들을 통해 구강내 다양한 세균 및 진균류에 대한 항균성이 입증되었으나 근단내 병소를 유발하는 혐기성 세균에 대한 연구는 미진한 실정이다. 본 연구에서는 사람의 근단 병소에서 직접 분리한 E. faecalis와 F. nucleatum에 대한 서양산 고추냉이 뿌리 추출물의 항균활성을 표준균주와 비교해보고 이를 대표적인 항균제인 클로르헥시딘과 비교하여 다음과 같은 결론을 얻었다. 1. 서양산 고추냉이 뿌리 추출물은 E. faecalis 임상 분리균주에 대하여 표준균주와 같거나 약간 높은 농도에서 항균효과를 나타냈고, 625.0~1,250.0 μg/ml의 농도에서 클로르헥시딘 (7.8~15.6 μg/ml)과 대등한 항균효과를 가지는 것으로 나타났다. 2. 서양산 고추냉이 뿌리 추출물은 F. nucleatum 임상 분리균주에 대하여 표준균주와 같거나 약간 높은 농도에서 항균효과를 나타냈고, 78.1~312.5 μg/ml의 농도에서 클로르헥사딘 (7.8~15.6 μg/ml)과 대등한 항균효과를 가지는 것으로 나타났다. 이번 연구로 표준균주 뿐만 아니라 구강에서 직접 분리한 혐기성 세균에 대한 서양산 고추냉이 뿌리 추출물의 항균성을 확인할 수 있었고, 추후 근관 세척제나 소독제로 서양산 고추냉이 뿌리 추출물을 이용할 수 있는 가능성을 보여주었다. Objective : The aim of this study was to determine the antimicrobical effect of horseradish root extracts against Enterococcus faecalis and Fusobacterium nucleatum isolated from oral cavity compared with reference strain, and compared with that of chlorhexidine. Method : Horseradish root extracts and chlorhexidine were sequentially diluted and tested against anaerobes(E. faecalis, F. nucleatum) isolated from children's oral cavity. The microbes were anaerobically incubated and the minimum inhibitory concentration(MIC) and minimum bactericidal concentration(MBC) were detected. Results: 1. Horseradish root extracts showed antimicrobial effect against E. faecalis isolated strain at same or slightly higher concentration compared with MIC of reference strain. 2. 625.0~1.250.0 ㎍/ml horseradish root extracts showed similar antimicrobial effect with chlorhexidine(7.8~15.6 ㎍/ml). 3. Horseradish root extracts showed antimicrobial effect against F. nucleatum isolated strain at same or slightly higher concentration compared with MIC of reference strain. 4. 78.1~312.5 ㎍/ml horseradish root extracts showed similar antimicrobial effect with chlorhexidine(7.8~15.6 ㎍/ml). Conclusions : The results of this study confirm that horseradish root extracts has antimicrobial effect against anaerobes isolated from oral cavity as well as reference strain. And we found the potential of horseradish root extracts as a canal irrigant or disinfectant.

Biocoral^�과립 및 탈회상아질의 단독 및 복합매식이 백서악골결손부 회복에 미치는 영향

박성배,장현중,이상한 慶北大學校 齒科大學 1992 慶北齒大論文集 Vol.9 No.1

본 실험은 이소성 골형성능을 지니는 것으로 알려진 0.6N Hcl에 탈회한 상아질편과 다공성 Hydroxyapatite인 Biocoral을 단독 또는 복합 이식하여 골결손부의 골성회복 정도를 비교관찰함으로 골대체물로서의 효용성을 평가하고자 하였다. Sparque-Dawley계 백서 36마리를 탈회상아질 이식군, Biocoral 이식군, 탈회상아질 및 Biocoral 복합 이식군으로 구분하여, 각 실험군백서의 하악골에 직경 0.4㎝ 크기의 반원상 골결손부를 형성하고, 각 이식편을 각 군별로 이식하였다. 술 후 1, 2, 3, 4주에 희생, 실험부를 채취하여, 중성 포르말린에 1일 고정한 후, 5% 질산용액에 1주간 탈회하여, 통법에 따라 H & E 염색 조직 슬라이드를 제작, 광학현미경으로 관찰한 바 다음과 같은 소견을 얻었다. 1. 탈회 상아질편 및 Biocoral 입자들은 실험전기간에 걸쳐 특기할 염증 및 이물 반응을 보이지 않았다. 2. 탈회상아질편 및 Biocoral 입자주위로의 신생골의 직접적인 유합은 술후 2주부터 관찰되었고, 골전도성은 Biocoral 입자가 탈회상아질편에 비해 우수하였다. 3. 신생골에 유합된 탈회상아질편의 골성대치는 Biocoral 입자보다 명확하였으며, 탈회상아질편은 Biocoral 입자와 달리 섬유아세포에 의해 분해흡수되는 양상이었다. 4. 각 군 공히 양호한 골성회복을 이루었으며, 신생골 형성 및 성숙도는 Biocoral 이식군이 타군에 비해 다소 양호하였고, 다음이 탈회상아질 및 Biocoral 복합 이식군 그리고 탈회상아질 이식군 순이었다. 이상의 소견상 탈회상아질 및 Biocoral 입자의 골대체물로서의 우수성이 인정되었으나, 탈회상아질과 Biocoral의 복합 사용이 골결손부회복에 대한 유용한 수단이 될 수 있는지에 대해서는 다각적인 검토가 필요할 것으로 사료되었다. This study was performed to evaluate the efficiency of a single or composite implantation of demineralized dentin and corallin biomaterial (Biocoral) as a bone substitute on bone defect. Implants of demineralized dentin, Biocoral, and demineralized dentin combined with Biocoral were placed in artificial bone defect on mandibles of 36 rats. Animals of each groups were killed at 1, 2, 3 and 4 weeks postimplantion and prepared for light microscopic examination by routine method. the histologic findings were studied with particular attention to new bone formation. The results were summarized as follows: 1. The implanted demineralized dentin chips and Biocoral granules were not showed specific inflammatory and/or foreign reaction through experimental period. 2. The direct new bone deposition around implanted materials was noted from 2 weeks positimplantation in each group. 3. The osteoconduction was more favorable in Biocoral implanted group than in demineralized dentin implanted group, but both implanted materials revealed no osteoinductive evidence. 4. The replacement of demineralized dentin chips by new bone was more evident than Biocoral granules and the implanted demineralized dentin chips were resorbed by action of fibroblast. 5. In general bony healing in each group was good without remarkable difference. But degree of bone formation and its maturity was most favorable in Biocoral implant group and followed by demineralized dentin combined with Biocoral implant group and demineralied dentin implant group in descending order. Above findings reveal that a single or comined implantation of deminralized dentin and Biocoral is favorable on bone defect as a bone substitute. But the efficiency of combined implant of each material is questionable, so it is suggested that more profound studies should be done.

대상 포진양 배열을 보인 다발성 에크린 나선종 1예

박현제,김문범,장봉석,오창근,장호선,권경술 대한피부과학회 2006 大韓皮膚科學會誌 Vol.44 No.4

인간 타액선세포 및 선암종세포주의 분화 유도시 Transglutaminase발현과 고정의존성 성장과의 관계

박대열,이선경,이화정,장현주,민승기,김은철 大韓顎顔面成形再建外科學會 2003 Maxillofacial Plastic Reconstructive Surgery Vol.25 No.2

Transglutaminase(TGase) catalyzes the Ca^2+ dependent acyl transfer reaction to from γ-glutamyl lysine cross-links between substrate proteins. we have examined the expression of TGase 1 and TGase 2 enzyme activity and protein expression in differentiation induced salivary gland cells(HSG), and human salivary adenocarcinoma cell lines(SGT)in reation to anchorage independent growth. The TGase1 and TGase 2 activity in SGT was higher than in HSG, and there is no significant difference between TGase 2 and TGase1 cells. HSG cells showed no increase in TGase 1 and TGase 2 upon reaching post confluence and in 1.8mM Ca^2+. Expression of the TGase 1 and TGase 2 was induced by high cell density or by high calcium in SGT. No induction of TGase 1 & 2 protein was observed in postconfiuent HSG cells, but there was notable increases in TGase 1 & 2 protein in post confiuent SGT cells. This pattern of TGase 1 & 2 protein expression correlates with the pattern of particulate activity. SGT cells showed more colony size and colony forming activity in soft agar rather than HSG cells. The ability of SGT cells, containing high levels of TGase 2 and TGase1,to form colonies in soft agar suggests a role for this enzyme in anchorage independence.