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SF_(6) 와 BCl_(3) 가스를 사용한 TiW막의 MERIE 식각에서 Sulfur의 역할
김창일 안양대학교 자연과학연구소 1996 自然科學硏究 Vol.3 No.-
TiW막은 실리콘 기판과 여러가지 금속들 사이에 확산을 막아주는 유효한 물질이다. 특히, 알루미늄 금속화의 결과에 따라 나타난 hillock 형성과 junction spiking을 막아준다. 그러나 TiW막의 식각을 위한 플라즈마 내에서 chemistry의 복잡성은 식각 거동의 설명을 어렵게 한다. TiW의반응성 이온 식각이 여러가지 혼합비에 따라 SF_6와 BCl_3가스를 사용하여 식각의 거동과 sulfur의 역할을 설명하기 위하여 수행되었다. 식각된 TiW막의 표면 상태가 XPS를 이용하여 분석되었고, metal-S 결합이 SF_6를 포함하는 가스 플라즈마로 식각한 후 관찰되었다. 이들 결합이 공기중에 노출하는 동안 식각된 TiW 표면 특히, Ti의 산화를 막아주는 것으로 판단된다. BCl_3 가스의 혼합비가 증가됨에 따라 식각속도는 감소되었고, BCl_3 가스 만으로 식각한 경우는 거의 영으로 감소하였다. 따라서 sulfur가 표면 세척 및 자연 산화막의 제거에 의해 식각 속도를 촉진할 수 있다. TiW is an effective diffusion barrier between Si substrate and various metal. Especially, it prevents the hillock formation and junction spiking resulted from Al-metallization. However, the complexity of the chemistry in plasma for TiW etching makes it difficuli to explain the etching behavior. Reaction ion etching of TiW was performed to explain the role of sulfur and etching behavior usinf SF_6 and BCl_3 gases with various mixing ratio. Surface state of etched Tiw was analyzed using X-ray photoelectron spectroscopy and the formationn of metal-S bonds were found after etching with the plasma gased containing SF_6. These bonds are revealed to prevent the oxidation of the etched TiW surface, sepecially Ti, during the exposure in air. Etch rate decreased as the mixing ration of BCl_3 gas increased and reached at almost zero with BCl_3 only. Sulfur could promote the etch rate by surface cleaning and removal of native oxide.
김창일,이춘분,Kim, Chang-Il,Lee, Choon-Boon 한국수학사학회 2008 Journal for history of mathematics Vol.21 No.3
본 연구에서는 중학교 2학년 도형의 성질 단원의 증명학습을 세 단계로 나누어 설문을 통하여 학생들이 증명학습에서 겪는 어려움을 조사하였다. 설문 분석 결과 학생들은 증명학습에서 증명의 의미를 이해하지 못해 명제의 참을 판단하는 정도의 간단한 추론도 하지 못할 뿐만 아니라 제시된 증명을 읽고 그것이 증명하려는 명제의 가정과 결론을 파악하지 못한다. 이는 학생들이 명제의 가정과 결론의 의미와 역할을 명확히 이해하지 못하는데서 비롯된다. 따라서 학생들에게 명제의 가정과 결론의 의미와 역할에 대한 지도에 좀 더 역점을 두는것이 필요하다. In this study, we divided the teaching and learning of proof into three steps in the demonstrative geometry of the middle school mathematics. And then we surveyed the student's difficulties in the teaching and learning of proof by using of questionnaire. Results of this survey suggest that students cannot only understand the meaning of proof in the teaching and learning of proof but also they cannot deduce simple mathematical reasoning as judgement for the truth of propositions. Moreover, they cannot follow the hypothesis to a conclusion of the proposition It results from the fact that students cannot understand clearly the meaning and the role of hypotheses and conclusions of propositions. So we need to focus more on teaching students about the meaning and role of hypotheses and conclusions of propositions.
NORMAL FUZZY PROBABILITY FOR TRAPEZOIDAL FUZZY SETS
김창일,윤용식 영남수학회 2013 East Asian mathematical journal Vol.29 No.3
A fuzzy set A de ned on a probability space (\omega, F, P) is called a fuzzy event. Zadeh de nes the probability of the fuzzy event A using the probability P. We de ne the normal fuzzy probability on R using the normal distribution. We calculate the normal fuzzy probability for generalized trapezoidal fuzzy sets and give some examples.
Fe<sub>2</sub>O<sub>3</sub> 첨가에 따른 AC PDP 보호막용 MgO 박막의 광학적.전기적 특성
김창일,정영훈,이영진,백종후,최은하,정석,김정석,Kim, Chang-II,Jeong, Young-Hun,Lee, Young-Jin,Paik, Jong-Hoo,choi, Eun-Ha,Jung, Seok,Kim, Jeong-Seok 한국전기전자재료학회 2009 전기전자재료학회논문지 Vol.22 No.9
The effects of $Fe_2O_3$ addition on optical and electrical properties of MgO films as a protective layer for AC plasma display panels were investigated. Doped MgO films prepared by the e-beam evaporation have a higher ${\gamma}$ (secondary electron emission coefficient) than pure MgO protective layer. Roughness increased with amount of $Fe_2O_3$ up to 100 ppm and then decreased further addition. These results showed that discharge properties and optical properties of MgO protective layers seemed to be closely related with microstructure factors such as roughness. Good optical and electrical properties of ${\gamma}$ of 0.120, surface roughness of 14.1 nm and optical transmittance of 94.55% were obtained for the MgO + 100 ppm $Fe_2O_3$ protective layer sintered at $1700^{\circ}C$ for 5 hrs.
MINIMAL BASICALLY DISCONNECTED COVER OF WEAKLY P-SPACES AND THEIR PRODUCTS
김창일 한국수학교육학회 2010 純粹 및 應用數學 Vol.17 No.2
In this paper, we introduce the concept of a weakly P-space which is a generalization of a P-space and prove that for any covering map f : X ¡! Y , X is a weakly P-space if and only if Y is a weakly P-space. Using these, we investigate the minimal basically disconnected cover of weakly P-spaces and their products.
The canonical form of involutary fuzzy matrices
김창일,박세원 충청수학회 2014 충청수학회지 Vol.27 No.4
We study special types of matrices. The involutary fuzzy matrices are important in various applications and have many interesting properties. Using the graphical method, we have the zero patterns of involutary fuzzy matrix, that is, involutary Boolean matrices. And we give the construction of all involutary fuzzy matrices for some dimensions and suggest the canonical form of involutary fuzzy matrix.
NORMAL FUZZY PROBABILITY FOR GENERALIZED QUADRATIC FUZZY SETS
김창일,윤용식 충청수학회 2012 충청수학회지 Vol.25 No.2
A generalized quadratic fuzzy set is a generalization of a quadratic fuzzy number. Zadeh dees the probability of the fuzzy event using the probability. We dee the normal fuzzy prob-ability on R using the normal distribution. And we calculate the normal fuzzy probability for generalized quadratic fuzzy sets.