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PLVA 방법을 활용한 PR Stripper의 성능 향상과 HDI-PR 표면의 내력 변화 연구
김수인,이창우,Kim, Soo-In,Lee, Chang-Woo 한국진공학회 2008 Applied Science and Convergence Technology Vol.17 No.6
반도체 공정에서 가장 많은 시간과 비용을 차지하는 공정 중 하나는 Photoresist strip 공정이다. 따라서 보다 빠르게 PR의 strip 공정을 단축하기 위한 연구가 계속 진행중에 있다. 하지만 기존 사용중인 strip용액을 대체하기 위한 물질을 찾는 것은 많은 비용을 수반한다. 본 연구에서는 PR의 strip 시간을 최대한 단축시키고 PR strip 잔여물의 빠른 제거를 위하여 기존 공정에서 사용 중인 strip 약액을 플라즈마에 의하여 활성화하는 방법(Plasma Liquid-Vapor Activation: PLVA)으로 PR strip 시간을 최대한 줄이는 방법에 대한 연구를 진행하였으며, 활성화된 strip용액이 더욱 빠른 strip율 성능을 나타내는 것을 확인하였다. 또한 PR strip에서 이온에 의한 영향을 받은 HDI-PR (high dose implanted photoresist)은 기존 strip용액으로 제거가 불가능하였다. 하지만 본 연구에서 제시한 PLVA 방법으로 활성화된 용액에서는 그 가능성을 확인하였고, 이러한 PLVA방법에 대한 물리적 연구를 위하여 HDI-PR 표면 내력의 변화를 측정하였다. 그 결과 PLVA 처리 전 후 HDI-PR의 표면 내력에 큰 변화를 확인하였다. At the semiconductor industry, Photoresist(PR) strip progress has high cost and time consuming process. Accordingly, many research group have been focused on the shortening of the PR strip progress. But the replacements of newly developed materials rather than normally used strip have accompanied by cost consumption. Therefore, we suggested the Plasma Liquid-Vapor Activation (PLVA) method of general PR strip solution for saving the PR strip time and the high strip rate of PR residue. The PLVA method was very effective for PR strip progress. Also, the ion damaged PR(high dose implanted photoresist: HDI-PR) was almost impossible to strip. However, it was very difficult to characterize the change of chemical composition of HDI-PR between with and without PLVA method. Thus, physical properties of HDI-PR surface with and without PLVA method were measured by using the nano-indenter system.
김수인,염창술 한국목재공학회 1988 목재공학 Vol.16 No.1
Lespedeza species have been widely used not only as plant resources for bark, leaves and honey, but also as erosion control materials. This study was carried out to investigate the structural and wood fiber characteristics in order to obtain basic information for the utilization of the wood. The wood structure was investigated for 10 selected species and the wood fiber, for the 5 selected species among Lespedeza species distributed all over the country. The following results were obtained. In the cross section, campylotropis showed ray diffuse porous wood, L. bicolor, L. cyrtobotrya, L. thunbergii var. intermedia, diffuse porous wood, and L. tomentella, L. angustifolioides, L. maritima, L. robusta, L. patentibicolor, ring porous wood. The maximum diameter of a single vessel ranged 66-123 μ in all species. Campylotropis showed the most number of vessels, L. angustifolioides, the least. The number of ray per mm ranged 7-22, Campylotropis showed the most number of rays, L. angustifolioides, the least. In the radial section the average length of vessel ranged 121-250 μ in all species. L. thunbergii oar. intermedia showed the longest vessel, L. tomentella, the shortest. In tangential section the average width of the uniseriate ray ranged 9.2-14.7 μ, that of the multiseriate ray, 19.2-42.1 μ. The average height of the uniseriate ray ranged 143.0-1162.0 μ. The width of fiber ranged 10.12-13.61 μ, L. maximowiczii showed the narrowest fiber, L. thunbergii oar. intermedia, the widest, the thickness of fiber wall ranged 2.93-3.71μ in the five species. L. maximowiczii showed the moss: thin fiber wall, L. thunbergii var. intermedia, the thickest. L. cyrtobotrya showed the difference in the size of fiber between the shade and the sunny sites but L. maximowiczii showed no difference. There was significant difference in fiber length, fiber width and wall thickness between L. cyrtobotrya and L. maximowiczii.