MEMS 공정을 위한 여러 종류의 산화막의 잔류응력 제거 공정

李相佑,김성운,李尙禹,김종팔,박상준,이상철,조동일 경북대학교 센서기술연구소 1998 센서技術學術大會論文集 Vol.9 No.1

Various oxide films are commonly used as a sacrificial layer or etch mask in the fabrication of microelectromechanical systems (MEMS). Large residual strain of these oxide films cause the wafer to bow, which can have detrimental effects on photolithography and other ensuing processes. This paper investigates the residual strain of tetraethoxysilane (TEOS), low temperature oxide (LTO), 7wt% and lOwt% phosphosilicate glass (PSG). Euler beams and a bent-beam strain sensor are used to measure residual strain. A polysilicon layer is used as a sacrificial layer, which is selectively etched away by XeF_(2). First, the residual strain of as-deposited films is measured, which is quite large. These films are annealed at 500℃, 600℃, 700℃ and 800℃ for 1 hour and residual strain is measured. Then, the residual strain after annealing at the conditions for depositing a 2μm thick polysilicon at 585℃ and 625℃ are also measured. Our results show that the 7wt% PSG is best suited as the sacrificial layer for 2μm thick polysilicon processes.

水平 bow-fin이 船體抵抗 및 運動性能에 미치는 影響 : 수평 bow-fin이 선체저항 및 운동성능에 미치는 영향

이상우 釜山大學校 工科大學 1985 工科大學 硏究 報告 Vol.29 No.-

삽목 조건이 ‘설향’ 딸기의 묘소질 및 과실 수량에 미치는 영향

이상우,이용혁,홍점규,최성환,박수정,이상우 (사) 한국생물환경조절학회 2023 생물환경조절학회지 Vol.32 No.4

딸기 ‘설향’ 품종에 대해 삽목 육묘의 조건을 확립하고자 삽수 채취용 모주 선택, 삽수의 적정 엽수 및 삽목 시기를 구명하였다. 삽수 채취는 육묘장 모주와 과실 수확 후 재배 식물체에서 채취하였고, 삽수의 엽수는 0, 1, 2장 그리고 삽목 시기는 6 월 4일부터 7월 9일까지 1주일 간격으로 하였다. 육묘장 삽수와 재배 식물체 삽수의 최종 생존율은 각각 99.5%, 98.7%로높았으며, 유의적인 차이는 없었다. 근수는 육묘장 삽수에서3.1개 많았고, 관부와 잎의 생육은 차이가 없었다. 과실 수량은 육묘장 삽수와 재배 식물체 삽수에서 각각 419.2g, 428.4g 이었지만 유의적인 차이는 없었다. 삽수의 엽수별 생존율은엽수 1, 2장에서 각각 98.1%, 98.3%로 높았고, 0장은 25.3% 로 현저히 낮았다. 근수는 엽수 1, 2장에서 각각 26.0개, 26.3 개로 엽수 0장의 23.5개에 비해 많았다. 관부와 엽의 생육에서는 엽수에 따른 유의적인 차이가 없었다. 과실 수량은 엽수 1, 2장에서 각각 424.4g, 421.5g으로, 0장 396.7g 보다 많았다. 삽목 시기에 따른 삽목 후 생존율은 97.2% 이상으로 높았으며, 처리 간의 유의적인 차이는 없었다. 묘의 지하부와 지상부그리고 관부의 생육은 6월 4일과 11일 삽목에서 가장 좋았다. 과실 수량은 6월 4일, 6월 11일 삽목에서 각각 433.3g, 426.4g 으로 가장 많았으며, 삽목 시기가 가장 늦었던 7월 9일 삽목에서는 384.5g으로 적었다. 딸기 삽목용 삽수 재료는 육묘장 삽수와 과실 수확을 마친 재배 식물체 삽수 모두 가능하였고, 삽수의 적정 엽수는 최소 1장 이상 그리고 경남 지역의 삽목 시기는 6월 4일-11일이 적합하였다. This study was conducted to investigate optimal conditions for cutting propagation of the strawberry cultivar “Sulhyang” through the collection methods of cuttings (runners tips), leaf number of cuttings, and cutting time. Cuttings were collected from the mother plant in the nursery bed (MP) and plants after fruit harvest (HP); the leaf number of cuttings was 0, 1, and 2, and the cutting time was at one-week intervals from June 4 to July 9. The survival rates for MP and HP cuttings were notably high, reaching 99.5% and 98.7%, respectively, but no significant difference was found. The number of roots were higher in MP cuttings, and there was no significant difference in crown and leaf growth. The fruit yields were 419.2 and 428.4 g, for MP and HP cuttings, respectively. The survival rates according to leaf number of cuttings were 98.1% and 98.3% for 1 and 2 remaining leaves, respectively, and remarkably lower at 25.3% for no remaining leaves. The root numbers were 26.0 and 26.3 for 1 and 2 remaining leaves, respectively, compared with 23.5 for no remaining leaves, with no significant differences in crown and leaf growth. The fruit yields were 424.4 and 421.5 g for 1 and 2 remaining leaves, respectively, and 396.7 g for no remaining leaves. The survival rates according to cutting time was over 97.2% in all cutting time without any difference in each treatment. The root, shoot, and crown of the nursery plant before planting showed the best growth in the cuttings on June 4 and 11, resulting in the highest fruit yields of 433.3 and 426.4 g, respectively, with the lowest yields at 384.5 g for cutting time on July 9. Both MP and HP materials proved suitable for strawberry cuttings. The optimal leaf number for cuttings was at least 1, and the optimal cutting time in Gyeongnam area was evaluated as around June 4-11.

21세기의 동아시아와 한국 그리고 제주도 : "북한관광실태연구" "동북아 해양질서와 국제법" "지방분권화 와 국제화 흐름 속에서 제주도 개발을 다시 생각한다"

김부찬,이상우,허향진 제주대학교 동아시아연구소 1990 東아시아硏究論叢 Vol.1 No.-

건전성 지표 기반의 베어링 이상 사전 예측 모형에 관한 연구

이상우,송지은,배석주 대한산업공학회 2019 대한산업공학회 춘계학술대회논문집 Vol.2019 No.4

벼의 자연통풍건조에 있어서 통풍량이 건조에 미치는 영향에 관한 연구

이상우,정창주 한국농공학회 1974 한국농공학회논문집 Vol.16 No.1

An experimental work was conducted by using a laboratory-made model dryer to investigate the effect of the rate of natural forced-air on the drying rate of rough rice which was deposited in the deep-bed. The dryer consisted of 8 cylinderical containers with grain holding screen at their bottoms, each of which having 30cm in diameter and 15cm in height. The containers were sacked vertically with keeping them air-tight by using paper tape during dryer operation. Two separate layers of containers were operated in the same time to have two replications. The moisture contents of grains within each bins after predetermined period of dryer operation were determined indirectly by measuring the weight of the individual containers. The air-rates were maintained at 6 levels, or 5, 8, 10, 15, 18 and 20 millimenters of static head of water. The roomair conditions during dryer operation were maintained in the range of 10-l5$^{\circ}C$ in temperature and 40-60% in relative humidity. The results of the study are summarized as follows: 1. Drying characteristics of the grains in the bottom layers were approximately the same regardless of airdelivery rates, giving the average drying rate as about 0.35 percent per hour after 40-hour drying period, during which moisture content (w. b.) reduced from 24 percent to about 10 percent. 2. After about 40-hour drying period, the mean drying rates increased from 0.163 percent per hour to 0.263 percent per hour as air-flow rates increased from 5mm to 87.16mm of static head of water. In the same time, the moisture differences of grains between lower and upper layers varied from 12.7 percent at the air rate of 5mm of water head to 7.5 percent at the air-flow rate of 20mn of water head. Thus, the greater the air-flow rate was, the more overall improvement in drying performance was. Additionally, from the result of ineffectiveness of drying grain positioned at 70cm depth or above by the air rate of 5mm of static head of water it may be suggested in practical application that the height of grain deposit would be maintained adequately within the limits of air-rates that may be actually delivered. 3. Drying after layer-turning operation was continued for about 30 hours to test the effectiveness of reducing moisture differences in the thick layers. As a result of this layer-turning operation, moisture distribution through layers approached to narrow ranges, giving the moisture range as about 7 percent at air-flow rate of 5mm head of water, about 3 percent at 10mm head about 2 percent at 15mm head, and less than 1 percent at 20mm head. In addition, from the desirable results that drying rate was rapid in the lower layers and dully in the upper layers, layer-turning operation may be very effective in natural air drying with deep-layer grain deposit, especially when the forced air was kept in low rate. 4. Even though the high rate of air delivery is very desirable for deep-layer natural-air drying of rough rice, it can be happened that the required air delivery rate could not be attained because of limitation of power source available on farms. To give a guide line for the practical application, the power required to perform the drying with the specified air rate was analyzed for different sizes of drying bin and is given in Table (5). If a farmer selects a motor of which size is 1 or {{{{1 { 1} over {2 } }}}} H.P. and air-delivery rate which ranges from 8~10mm of head, the diameter of grain bin may be suggested to choose about 2.4m, also power tiller or other moderate size of prime motor may be recommended when the diameter of grain bin is about 5.0m or more for about 120cm grain deposit.

건전성 지표 기반의 베어링 이상 사전 예측 모형에 관한 연구

이상우,송지은,배석주 한국경영과학회 2019 한국경영과학회 학술대회논문집 Vol.2019 No.4

리커트 척도의 변화와 강의평가결과

이상우 한국상품학회 2016 商品學硏究 Vol.34 No.5

Korean universities get feedback from students by the way of compulsory course evaluation of teaching. Most universities use 5-point scale but there is no agreement on the number of points to be used. This study investigates which method is better between 5- and 7-point scale using the course evalution data from Jeouju University. The results support that 7-point scale is slightly better. This supports the result of Finstad (2010). But there are so many insincere and consistent responses even though 7-point scale is used. To get meaningful results, universities should respond properly to students' evaluation. 대학은 교육의 질을 향상시키기 위해 강의평가를 통해 학생들의 교육만족도를 조사하고 있다. 우리나라 대부분의 대학들은 강의평가 시에 5점 리커트 척도를 사용하고 있는데 최근 몇몇 연구들은 척도의 수를 늘리는 것이 보다 유의한 결과를 가져올 수 있다고 주장한다. 본 연구에서는 7점 척도와 5점 척도를 사용한 경험이 있는 전주대학교의 강의평가자료를 이용하여 척도의 변화가 강의평가결과에 어떠한 영향을 미치는가를 살펴보았다. 그 결과 기존의 연구처럼 7점 척도를 사용하는 것이 5점 척도를 사용하는 경우보다 근소하지만 우수한 결과를 나타내는 것으로 보인다. 하지만 7점 척도를 사용하더라도 설문 항목간의 높은 상관관계로 인해 형성적 목적으로 강의평가결과를 사용하기에는 부적합 것으로 평가된다. 강의평가를 통해 유의한 결과를 얻기 위해서는 강의평가결과를 정책에 반영하는 등의 적극적 피드백이 필요할 것이다.

漕艇競技의 內容에 관한 硏究

李相于 東亞大學校 附設 스포오츠科學硏究所 1984 스포츠科學硏究論文集 Vol.2 No.-

In this paper, the author has compared the psysiques, pitches and records of the rowing crew of 6 Japanese teams who participated in the 61st Japanese Rowing Championship and of 8 teams who participated in the 23rd Oxford Rowing Championship, for the race improvement of rowing. As a result, the followings have been obtained: (1) The teams in the Japanese Rowing Championship are superior to those of Oxford Rowing Championship in terms of heights and weights. The Average weight of a Korean team(Dankook University) is higher than those of other teams by 3kg, whilst these shows little difference in height. Therefore, it is suggested that the steady state of weights should be maintained. (2) The record of Juodaikaku team who won the Japanese Rowing Championship is 6’15”30 and that of Dankook University team who won the Oxford Championship 6’29”42, thus showing the difference by 4”12. The former maintained the steady lap time in each quarter, whilst the latter maintained the stagnant record in the last 500 quarter. (3) It is desirable that the pitches should be adjusted in consideration of the race management of the rival team and the race ability.

居住地域의 航空機騷音影響評價에관한 硏究

이상우 경기대학교연구교류처 1988 論文集 Vol.22 No.-