4차 산업혁명 시대 제조기술의 변화와 교육 : [공학교육의 현장 Part3] 4차 산업혁명 시대 제조기술의 변화와 교육

이희관 한국공학교육학회 2019 Ingenium(人材니움) Vol.26 No.4

Selective Etching of Thick Si3N4, SiO2 and Si by Using CF4/O2 and C2F6 Gases with or without O2 or Ar Addition

이희관,정관수,유재수 한국물리학회 2009 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.54 No.5

The etching characteristics of thick Si3N4, SiO2 and Si in CF4/O2 (95 %/5 %) and C2F6 plasmas with or without O2 or Ar gas as diluents by using reactive ion etching were studied, together with photoresist mask erosion rate during the etching. Etching parameters, such as the CF4/O2 (or C2F6) flow rate, the O2 flow rate, the Ar flow rate, the rf power and the process pressure, were changed. The selective etching of Si3N4 over SiO2 and Si was also investigated under various etching conditions. We found that CF4/O2 gas was more efficient than C2F6 gas owing to the enhanced Si3N4 etching caused by NO for the selective etching of Si3N4 over both SiO2 and Si. In a CF4/O2 plasma, the etching selectivity was considerably improved with decreasing flow rates of CF4/O2 and O2 (or Ar) and with increasing process pressure. Si3N4 etch selectivities over SiO2 and Si of 13.2 and 8.9 were obtained, respectively, with 20 sccm CF4/O2 at 150 mTorr and 75 W, while maintaining a high Si3N4 etch rate of 306 nm/min. The etching rates were measured by using a surface profiler and a scanning electron microscope (SEM). The etched profiles and the surface morphology were observed by using a SEM. A possible mechanism for these etching phenomena is discussed. The etching characteristics of thick Si3N4, SiO2 and Si in CF4/O2 (95 %/5 %) and C2F6 plasmas with or without O2 or Ar gas as diluents by using reactive ion etching were studied, together with photoresist mask erosion rate during the etching. Etching parameters, such as the CF4/O2 (or C2F6) flow rate, the O2 flow rate, the Ar flow rate, the rf power and the process pressure, were changed. The selective etching of Si3N4 over SiO2 and Si was also investigated under various etching conditions. We found that CF4/O2 gas was more efficient than C2F6 gas owing to the enhanced Si3N4 etching caused by NO for the selective etching of Si3N4 over both SiO2 and Si. In a CF4/O2 plasma, the etching selectivity was considerably improved with decreasing flow rates of CF4/O2 and O2 (or Ar) and with increasing process pressure. Si3N4 etch selectivities over SiO2 and Si of 13.2 and 8.9 were obtained, respectively, with 20 sccm CF4/O2 at 150 mTorr and 75 W, while maintaining a high Si3N4 etch rate of 306 nm/min. The etching rates were measured by using a surface profiler and a scanning electron microscope (SEM). The etched profiles and the surface morphology were observed by using a SEM. A possible mechanism for these etching phenomena is discussed.

고려 예종과 북송 휘종-12세기 초기의 고려청자와 여요 및 북송관요

이희관 국립해양문화재연구소 2015 해양문화재 Vol.8 No.-

실내에서의 환기효율 예측 및 평가

이희관,이정주,김신도 대한환경공학회 1993 대한환경공학회 학술발표논문집 Vol.1993 No.12

환경부하 평가방법 개선에 관한 연구

이희관,김신도,조균형,최두성 대한환경공학회 2004 대한환경공학회 학술발표논문집 Vol.2004 No.12

고려시기의 越窯風 雙蝶紋ㆍ雙鳳紋靑瓷와 관련된 몇 가지 문제 - 越窯의 관점에서 본 고려 초기청자의 새로운 면모 -

李喜寬 한국문화유산협회 2017 야외고고학 Vol.0 No.28

근래 고려청자에서 보이지 않던 월요풍의 쌍접문 또는 쌍봉문이 음각된 청자편들이 발견되었다. 이 연구에서는 그러한 월요풍의 쌍접문․쌍봉문고려청자의 생산 요장, 소비처, 제작시기 및 이러한 문양이 새겨진 청자의 출현이 고려청자의 전개에서 갖는 의미 등을 검토하였다. 현재까지 알려진 월요풍 쌍접문․쌍봉문청자의 표본은 모두 19점이다. 이것들은 모두 강진 사당리요장에서 제작되었으며, 그 주요 소비처는 개성의 고려 궁정이었다. 그리고 월요풍 쌍접문과 쌍봉문의 모방 대상이 된 것은 각각 북송초기 월요의 쌍접문과 쌍봉문이었다. 사당리요장에서는 대략 11세기 전반의 어느 때부터 늦어도 12세기 초기까지 이러한 문양을 가진 고려청자를 제작하였다. 말하자면, 월요풍 쌍접문․쌍봉문청자는 고려 초기청자시기의 산물이었다. 고려 초기청자시기에는 문양이 거의 유행하지 않은 것으로 알려져 있다. 하지만 월요풍의 쌍접문․쌍봉문청자가 초기청자시기에 제작된 것이라면, 적어도 강진 사당리요장의 경우는, 이제까지의 이해와 달리, 이미 초기청자시기에 어느 정도 문양이 유행하였다고 할 수 있을 것이다. 강진에는 초기청자를 생산했던 요장이 적지 않다. 그런데 이들 가운데 사당리요지를 제외한 나머지 요지들의 경우, 하나같이 그곳에서 출토된 초기청자 가운데 문양이 있는 것은 매우 드물다. 이러한 사실이 우연의 결과가 아니라면, 그것은 강진요의 범위 안에 있던 사당리요장과 그 밖의 요장—非沙堂里窯場—의 경우 문양을 포함한 청자제작의 양상자체가 달랐을 가능성을 시사한다. The unprecedented pieces of the Goryeo celadon incised with the Yue ware-type design of two butterflies or two phoenixes have recently been discovered. This research reviewed the production kiln, consumption place, production period of them and the meaning of the appearance of them in development of Goryeo celadon. The number of the samples of the Goryeo celadon with the Yue ware-type design of two butterflies or two phoenixes is 19 in total. They were all produced in the Sadang-ri kiln, Gangjin, and mainly consumed by the royal court of Goryeo in Gaeseong. In addition, the the Yue ware-type design of two butterflies or two phoenixes was modeled after the design of two butterflies or two phoenixes of Yue ware in the early northern Song Dynasty. Sadang-ri kiln made Goryeo celadon with such designs from anytime in the first harf of the 11thcenturytoatthelatestearly12thcentury.Inotherwords,theGeryeoceladonswiththeYueware-typedesignoftwobutterfliesortwophoenixesweretheproductsoftheeraoftheearlyGoryeoceladon. It is known that decorating with some designs over wares was almost not in trend in the era of the early Goryeo celadon. However, if the Goryeo celadons with the Yue ware-type design of two butterflies or two phoenixes were produced in the era of the early Geryeo celadon, it is regarded that the designs were already popular to some extent in the era of the early Goryeo celadon at least in in Sadang-ri kiln, Gangjin, unlike what has been understood. In the meantime, it remains a huge question that the Goryeo celadons with the Yue ware-type design of two butterflies or two phoenixes were discovered only in the kiln sites in Sadang-ri among numerous Goryeo celadon kiln sites in Gangjin and have never been discovered in any other kiln sites, including the kiln site of No.9 and No.10 in Yongun-ri. This could be caused by the possibility that the kiln sites in Sadang-ri that produced the Goryeo celadons with the Yue ware-type design of two butterflies or two phoenixes and the other kiln sites in Gangjin had different aspects of celadon production.

실측자료를 이용한 해륙풍의 영향권 산정에 관한 연구

이희관,이임학,김종호 대한환경공학회 2004 대한환경공학회 학술발표논문집 Vol.2004 No.12

百濟 熊津遷都 初期의 政治的 變動에 대한 再檢討

李喜寬 한국고대사학회 2000 韓國古代史硏究 Vol.18 No.-

新羅 三國統一後의 農民的 土地分給 問題

李喜寬 한국고대사학회 2001 韓國古代史硏究 Vol.23 No.-

I reviewed the matters related on distribution of land of peasantry after the unification of the Three States by Shilla. Th summary is as follows; In the Unified Shilla era, any national land -distributed system such as the Kyunjon system(均田制) in China or the Banjon system(班田制) in Japan wasn't enforced. Naturally, the distribution an redemption of land for the people also weren't conducted. The mos major cause that any land system based on agrarianism couldn' become effective in the Unified Shilla was the opposition of the true-bone aristocracy(眞骨貴族), big landowners. In the meantime, 'Jongjon(丁田)' provided for the people in th King Songduk(聖德王)'s 21th year(722) indicates' Yunsuyujondap(烟有田ㆍ畓)' shown in the Shilla Village Register(新羅村落帳籍) an actually, in the case of the land, the ownership was permitted by surveying quantitatively people's land over the country rather the distributed by the country. In return, the people were responsible for paying the land tax(田租) on the basis of the Yunsuyujondap' size. This was the actual substance of so-called the Yunsuyujonda system(烟受有田畓制), which was the land distribution system fo peasantry in the Unified Shilla era. Since the Yunsuyujondap system was established in the Kin Songdok's 21th year(722), the people obtained permission of the ownership whose land had been cultivated by them for generations while they should pay the land tax. Consequently, the land domination by the country on the basis of the right to collect land tax - that is, Sujokwon(收租權) - as well as the ownership-based domination by owners of the land was reflected. This double land-dominated relations in the private land include key matters on the land-dominated relations of private land in Korean premodern times. In addition, the Yunsuyujondap system including the matters is the beginning of the Minjon system(民田制) in the Koryo ㆍChoseon Dynasty. We can regard these aspects as the important historical meaning that establishment of the Yunsuyujondap system involves.

乾隆帝와 郭葆昌 그리고 Percival David ―汝窯瓷器의 실체에 대한 인식의 궤적과 이른바 傳世汝窯瓷器

이희관 한국미술사교육학회 2015 美術史學 Vol.- No.30

It is known that about 70 pieces of Ru wares have been passed down today. They are so-called surviving Ru wares. How did they become recognized as Ru wares? Furthermore, are they true Ru wares? In the early 20thcentury when the researches on Ru ware began to be systemically carried out, Qingbai (or Yingqing) ware was recognized as Ru type ware or so-called Northen Celadon known was recognized as Ru ware. Such a misunderstanding was a byproduct of the period when researchers were almost blocked from practical resources of Ru ware, in other words, the dark ages of the research on Ru ware. It is thought to be Guobaochang who built the foundation to recognize the known Tianqing ware as Ru ware today. He discovered what kind of potteries were identified as Ru ware by Emperor Qianlong after finding and comparing the poems written on the specific pottery in The Collection of Emperor Qianlong’s Poems(御製詩集). Based on the ground, he recognized the type of potteries known as surviving Ru ware as Ru ware. Such recognition was organized by Percival David. Most researchers believe that it is an indisputable truth that the materials known as surviving Ru ware refer to Ru ware after the Qingliangsi Ru kiln 오늘날 70여 점의 여요자기가 전해오는 것으로 알려져 있다. 이른바 전세여요자기가 그것이다. 이들은 어떻게 여요자기로 인식되게 된 것일까? 더 나아가 이들은 진정 여요자기인 것일까? 여요자기에 대한 연구가 체계적으로 이루어지기 시작한 20세기 초에는 청백자(影靑瓷)가 汝窯系라거나, 오늘날 耀州窯産으로 알려진 이른바 북방청자로 여요자기로 인식하였다. 이러한 착오는 연구자들이 여요자기의 실물자료로부터 거의 차단되어 있던 시기, 즉 여요연구의 암흑기의 산물이었다. 오늘날 우리가 알고 있는 천청유자기를 여요자기로 인식하는 토대를 구축한 사람은 郭葆昌이라고 생각한다. 그는 건륭제가 특정 자기에 남긴 詠瓷詩를 『御製詩集』에서 찾아 대조하여 건륭제가 어떠한 부류의 자기를 여요자기로 감식하였는지를 확인하였다. 이러한 바탕 위에서 그는 오늘날 전세여요자기로 알려져 있는 부류의 자기를 여요자기로 파악하였다. 이와 같은 인식은 Percival David에 의해 체계적으로 정리되었다. 대다수의 연구자들은 전세여요자기로 알려져 온 실물자료들이 여요자기라는 점은 청량사여요지의 발굴로 이제 의심할 바 없는 사실이 되었다고 믿는다. 하지만 이러한 사실이 이제까지 전세여요자기로 알려진 실물자료들이 모두 진정 여요자기라는 점까지 보증하는 것은 아니다. 건륭제의 詠瓷詩와 그 밖의 문헌들에 대한 분석을 통하여 볼 때, 거기에는 여요자기뿐만 아니라 북송관요자기와 후대의 방여요자기까지 포함되어 있다고 생각한다.