Wireless pressure sensor integrated with a 3D printed polymer stent for smart health monitoring

Park, Jongsung,Kim, Ji-Kwan,Kim, Dong-Su,Shanmugasundaram, Arunkumar,Park, Su A,Kang, Sohi,Kim, Sung-Ho,Jeong, Myung Ho,Lee, Dong-Weon Elsevier 2019 Sensors and actuators. B Chemical Vol.280 No.-

<P><B>Abstract</B></P> <P>The primary objective of this study was to deploy a promising wireless pressure sensor system capable of monitoring real-time biological signals in an experimental object. MEMS-based micromachining technology was used to fabricate the proposed SU-8 wireless pressure sensor. The sensor utilizes a capacitor-inductor resonant circuit that can operate the sensor without any external power supply. The variable capacitor in the pressure sensor is designed to change the resonance frequency (130, 183 MHz) in response to applied pressure. The fabricated wireless pressure sensor was integrated into a polymer-based smart stent to minimize the discomfort of medication administration and hospital visits. A 3D bio-printing-based manufacturing technique was employed for the production of a smart polymer stent with complicated shapes. The proposed method is considerably more comfortable than the conventional metal stents fabrication process. The polymer smart stent made of the biocompatible polycaprolactone (PCL) material which can be fully absorbed by the body after a medication period. After integrating the fabricated wireless pressure sensor with the polymer smart stent, various basic experiments such as the working distance of the sensor were performed using a simple experimental setup. The biocompatibility of the proposed polymer stent and the wireless pressure sensor was also successfully confirmed using an experimental animal. The preliminary investigation results indicate that the proposed wireless sensor can be used to obtain necessary information in various parts of the human body as well as the stent.</P> <P><B>Highlights</B></P> <P> <UL> <LI> Fabrication of SU-8 based wireless pressure sensor for battery-less operation. </LI> <LI> Manufacturing of biodegradable polymer stent using 3D printing technique. </LI> <LI> Integration of wireless pressure sensor into polymer stent for real-time blood pressure monitoring. </LI> <LI> Verification of the biocompatibility of smart stent and its operation with experimental animals. </LI> <LI> Continuous measurement of blood pressure change in animals for more than 3 months. </LI> </UL> </P>

차압식 유량계를 실장을 위한 Single Capacitive Type Differential 압력 센서 개발

신규식,송상우,이경일,이대성,정재필,Shin, Kyu-Sik,Song, Sangwoo,Lee, Kyungil,Lee, Daesung,Jung, Jae Pil 한국마이크로전자및패키징학회 2017 마이크로전자 및 패키징학회지 Vol.24 No.1

In this paper, we have developed a differential pressure flow sensor designed as a single capacitive type. And the sensor was fabricated using a MEMS process. Differential pressure flow sensors are the most commonly used sensors for industrial applications. The sensing diaphragm and bonding joint of the MEMS pressure sensor are easily broken at high pressure. In this paper, we proposed a structure in which the diaphragm of the sensor was not broken at a pressure exceeding the proof pressure, and the differential pressure sensor was designed and manufactured accordingly. The operating characteristics of the sensor were evaluated at a pressure three times higher than the sensor operating pressure (0-3 bar). The developed sensor was $3.0{\times}3.0mm$ and measured with a LCR meter (HP 4284a) at a pressure between 0 and 3 bar. It showed 3.67 pF at 0 bar and 5.13 pF at 3 bar. The sensor operating pressure (0-3 bar) developed a pressure sensor with hysteresis of 0.37%. 최근 계측기의 소형화, 전자화에 따라 차압식 유량계의 경우 기존에 기계가공을 통해 개발하던 센서부를 전자식 MEMS 차압센서로 대체하려는 많은 노력이 있으나, MEMS 차압센서의 경우 고압이 인가시 실리콘 다이아프램의 파괴 및 센서의 접합부의 파괴가 발생하는 문제점이 있다. 따라서 본 논문에서는 proof pressure 이상의 압력에서 센서의 다이아프램이 파괴되지 않는 구조를 제안하였으며, 그에 따른 차압식 압력센서를 설계 및 제작하였다. 센서 동작압력(0-3 bar)의 3배 이상의 압력에서 센서의 동작특성을 평가하였다. 개발된 센서는 $3.0{\times}3.0mm$이며, 0~3 bar 사이의 압력에서 LCR meter (HP 4284a)로 측정한 결과 3.67 pF at 0bar, 5.13 pF at 3 bar를 나타내었으며, 센서의 동작압력(0-3 bar)에서 0.37%의 hysteresis를 나타내는 압력센서를 개발하였다.

KMgF₃:Eu²⁺ as a new fluorescence-based pressure sensor for diamond anvil cell experiments

Barzowska, Justyna,Lesniewski, Tadeusz,Mahlik, Sebastian,Seo, Hyo Jin,Grinberg, Marek Elsevier 2018 Optical materials Vol.84 No.-

<P><B>Abstract</B></P> <P>We present an optical pressure sensor KMgF<SUB>3</SUB>:Eu<SUP>2+</SUP> suitable for experiments in diamond anvil cell (DAC), which we have calibrated against the ruby reference sensor at pressures ranging from atmospheric up to 30 GPa (300 kbar), at room temperature. The emission spectra of KMgF<SUB>3</SUB>:Eu<SUP>2+</SUP> consist of one prominent emission line related to the <SUP>6</SUP>P<SUB>7/2</SUB> → <SUP>8</SUP>S<SUB>7/2</SUB> electronic transition (zero phonon line) accompanied by weak phonon sidebands. The energy of emission at atmospheric pressure was determined to be 27846 ± 7 cm<SUP>−1</SUP>. The edge of the excitation spectrum lies at wavelength around 325 nm (30800 cm<SUP>−1</SUP>) making it suitable to excite with He-Cd laser (325 nm). The sensor exhibits linear pressure shift of rate equal to −0.815 ± 0.007 cm<SUP>−1</SUP>/kbar at pressures up to 300 kbar. The pressure shift of the emission is totally reversible and the pressure sensor is suitable for multi cycle pressure experiments. The sensor's exceptional feature is that excitation and emission spectra lie in near UV, which makes it very convenient to use in high pressure optical measurements in visible and IR region with no interference from the sensor's luminescence.</P> <P><B>Highlights</B></P> <P> <UL> <LI> New optical pressure sensor for high pressure experiments – KMgF<SUB>3</SUB>:Eu<SUP>2+</SUP>. </LI> <LI> Sensor has been callibrated for pressures up to 300 kbar (30 GPa). </LI> <LI> Pressure sensor is applicable at cryogenic temperatures as well as above room temperature. </LI> <LI> Luminescence in UV range prevents interference of the sensor during high pressure optical measurements in VIS-IR range. </LI> </UL> </P>

Performance Improvement of a Pressure Sensor Using Fast Median Algorithm

Gyedo Park,Jangmyung Lee 한국정밀공학회 2022 International Journal of Precision Engineering and Vol.23 No.4

A novel method of improving the precision of the pressure sensor has been proposed by applying the design and correction technology of the pressure sensor that measures the explosion pressure in the cylinder combustion chamber of the low-speed 2-stroke diesel engine for ships. To enable dynamic pressure measurement in high-temperature and high-pressure environments, a diaphragm-type piezoelectric pressure sensor has been designed using the quartz. The fast median filter algorithm has been adopted and modified for sensor calibration which is proposed for sensor signal processing and calculation to improve the measurement reliability of pressure sensors. The pressure sensor has been manufactured after verifying the performance through simulations after the basic design and circuit design. To verify the performance of the manufactured pressure sensor, a pressure generating simulator has been designed and utilized for the performance verification. To demonstrate the performance in real situation, the pressure sensor has been installed on the ship engine. It has been confirmed that the proposed new sensor has excellent performance and high reliability comparing to the conventional sensors.

Implementation of an Integrated Pressure-sensor System Adapted to the Optimum Sensitivity

Hong, Sung-Hee,Cho, Chun-Hyung The Institute of Electronics and Information Engin 2017 Journal of semiconductor technology and science Vol.17 No.2

An integrated pressure-sensor system was developed using the sensor-conditioning processes, which resulted in the optimum sensitivity of the pressure-sensor through the signal amplification, noise reduction, and level shift. Due to the specified characteristics among the components, such as operation range, the sensor output was generally limited compared to the full scale of the reading when coupled with other parts. Devices fabricated exhibited comparable characteristics with higher pressure sensitivity to that of the pressure sensor without sensor-conditioning process. In this work, the sensor resolution was at least enhanced at least by 25% using the sensor-conditioning processes.

약물 투여에 따른 기니피그 대장 운동 측정을 위한 압력센서 개발

박재순,박정호,김응보,조성환,장수정,정연호,Park, Jae-Soon,Park, Jung-Ho,Kim, Eung-Bo,Cho, Sung-Hwan,Jang, Su-Jeong,Joung, Yeun-Ho 한국전기전자재료학회 2016 전기전자재료학회논문지 Vol.29 No.1

In this paper, in order to quantify the peristalsis occurrence in a guinea pig's large intestine, a miniaturized air-gap capacitive pressure sensor was fabricated through micro-electro-mechanical system (MEMS). The proposed pressure sensor is a two-layered biocompatible polyimide substrate consisting of an air-gap capacitive plates between the substrates. The proposed pressure sensor was designed with a careful consideration of the structure and motility mechanism of the guinea pig's large intestine. Artificial pellets were mounted on a prototype pressure sensor to provide some redundancies in the form of size and shape of the guinea pig feces. Capacitance of a prototype sensor was recorded to be 2.5 ~ 3 pF. This capacitance value was later converted to count value using a lab fabricated data conversion system. Sensitivity of the pressure sensor was recorded to be below 1 mmHg per atmospheric pressure. During in vivo testing, artificial peristalsis caused by drug injection was measured by inserting the prototype pressure sensor into the guinea pig's large intestine and pressure data obtained due to artificial peristalsis was graphed using a labview program. The proposed pressure sensor could measure the pressure changes in the proximal, medial, and distal parts of the large intestine. The results of the experiment confirmed that pressure changes of guinea pig's large intestine was proportional to the degree of drug injection.

Implementation of an Integrated Pressure-sensor System Adapted to the Optimum Sensitivity

Sung-Hee Hong,Chun-Hyung Cho 대한전자공학회 2017 Journal of semiconductor technology and science Vol.17 No.2

An integrated pressure-sensor system was developed using the sensor-conditioning processes, which resulted in the optimum sensitivity of the pressure-sensor through the signal amplification, noise reduction, and level shift. Due to the specified characteristics among the components, such as operation range, the sensor output was generally limited compared to the full scale of the reading when coupled with other parts. Devices fabricated exhibited comparable characteristics with higher pressure sensitivity to that of the pressure sensor without sensor-conditioning process. In this work, the sensor resolution was at least enhanced at least by 25% using the sensor-conditioning processes.

Implementation of an Integrated Pressure-sensor System Adapted to the Optimum Sensitivity

홍성희,조준형 대한전자공학회 2017 Journal of semiconductor technology and science Vol.17 No.2

An integrated pressure-sensor system was developed using the sensor-conditioning processes, which resulted in the optimum sensitivity of the pressure-sensor through the signal amplification, noise reduction, and level shift. Due to the specified characteristics among the components, such as operation range, the sensor output was generally limited compared to the full scale of the reading when coupled with other parts. Devices fabricated exhibited comparable characteristics with higher pressure sensitivity to that of the pressure sensor without sensor-conditioning process. In this work, the sensor resolution was at least enhanced at least by 25% using the sensor-conditioning processes.

실리콘 압력센서를 이용한 압력 모니터링 시스템 개발

이영태,권익현 한국반도체디스플레이기술학회 2018 반도체디스플레이기술학회지 Vol.17 No.4

In this paper, we developed a pressure monitoring system using silicon pressure sensor. The pressure monitoring system was developed on the basis of a microcontroller, and a self-developed silicon pressure sensor was applied. The pressure monitoring system outputs the current pressure value via UART communication. In addition, it includes a function of displaying by LED when the preset three-step pressure (low, medium, high pressure) is reached. The silicon pressure sensor used in the pressure monitoring system was set to 0 kPa, 10 kPa, 26 kPa, and the pressure monitoring system was evaluated because the measured maximum pressure was in the range of 100 kPa.

An Integrated Sensor for Pressure, Temperature, and Relative Humidity Based on MEMS Technology

Won Jong-Hwa,Choa Sung-Hoon,Yulong Zhao The Korean Society of Mechanical Engineers 2006 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.20 No.4

This paper presents an integrated multifunctional sensor based on MEMS technology, which can be used or embedded in mobile devices for environmental monitoring. An absolute pressure sensor, a temperature sensor and a humidity sensor are integrated in one silicon chip of which the size is $5mm\times5mm$. The pressure sensor uses a bulk-micromachined diaphragm structure with the piezoresistors. For temperature sensing, a silicon temperature sensor based on the spreading-resistance principle is designed and fabricated. The humidity sensor is a capacitive humidity sensor which has the polyimide film and interdigitated capacitance electrodes. The different piezoresistive orientation is used for the pressure and temperature sensor to avoid the interference between sensors. Each sensor shows good sensor characteristics except for the humidity sensor. However, the linearity and hysteresis of the humidity sensor can be improved by selecting the proper polymer materials and structures.