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정적형 유량계를 이용한 소닉노즐 유출계수 교정 방법에 관한 연구
신진현,강상백,박경암,임종연,정완섭,Shin, J.H.,Kang, S.B.,Park, K.A.,Lim, J.Y.,Cheung, W.S. 한국진공학회 2010 Applied Science and Convergence Technology Vol.19 No.4
진공용 기체 유동측정 표준기로 사용하고자 소닉노즐을 ISO 9300에서 제시한 사양에 맞추어 목직경 0.03 mm와 0.2 mm의 소닉 노즐을 제작하였다. 한국표준과학연구원에서 진공용 유량측정 장치로 개발된 정적형 유량계를 이용하여 제작된 2종의 소닉노즐의 유출계수를 확장불확도 3% 이내로 교정하였다. 교정된 소닉노즐의 유량 측정범위는 약 0.6~1,800 cc/min 범위를 갖는 것으로 나타났으며, 사용유동 조건에 해당되는 레이놀드 수(Reynolds number) 범위는 26~12,100으로 확인되었다. 이러한 결과는 교정된 소닉노즐을 이용하여 진공공정에서 필요한 극 미세 유량의 정밀측정을 가능하게 한 새로운 연구결과로 판단된다. 교정된 소닉노즐을 이용하여 진공펌프의 배기속도 측정결과는 기 구축된 정적법을 이용한 배기속도 측정결과와 1% 이내의 오차범위내로 매우 잘 일치함을 보였다. 교정된 소닉노즐은 향후 반도체 및 디스플레이 공정에 사용되는 다양한 건식 진공펌프들의 배기속도를 현장에서 간단하게 평가할 수 있는 현장 성능평가 장치에 활용할 예정이며, 현재 공정현장에서 배기속도 측정에 널리 사용중인 MFC를 대체할 수 있을 것으로 예상된다. Sonic nozzles have been a standard device for measurement of steady state gas flow, as recommended in ISO 9300. This paper introduces two sonic nozzles of diameter ${\Phi}$ 0.03 mm and ${\Phi}$ 0.2 mm precisely machined according to ISO 9300. The constant volume flow meter(CVFM), readily set up in the Vacuum center of KRISS. was used to calibrate the discharge coefficients of both nozzles. The calibration results were shown to determine them within the 3% expanded measurement uncertainty. Calibrated sonic nozzles were found to be applicable for precision measurement of steady state gas flow in the vacuum process in the ranges of 0.6~1,800 cc/min. Those flow conditions are equivalent to the fine gas flow with Reynolds numbers of 26~12,100. Those encouraging results confirm that calibrated sonic nozzles enable precision measurement of extremely low gas flow encountered very often in th vacuum processes. Both calibrated sonic nozzles are proven to provide the precision measurement of the volume flow rate of the dry vacuum pump within one percent difference in reference to CVFM. Calibrated sonic nozzles are applied to a new 'in-situ and in-field' equipment designed to measure the volume flow rate of vacuum pumps in the semiconductor and flat display processes. Furthermore, they can provide other applications to flow control devices in vacuum, such as MFC, etc.
유성연,이상윤,박경암,Yu, Seong-Yeon,Lee, Sang-Yun,Park, Gyeong-Am 대한기계학회 1996 大韓機械學會論文集B Vol.20 No.12
Accuracy of gas flow measurements using sonic nozzle and factors which influence on the discharge coefficients of sonic nozzle are investigated with high pressure gas flow standard measurement system. The gas flow measurement system comprises two compressors, storage tank, temperature control loop, sonic nozzle test section, weighing tank, gyroscopic scale and data acquisition system. The experiments are performed at various nozzle throat diameter and inlet pressure. Overall uncertainty of discharge coefficients is estimated to less than .+-.0.2% and most of experimental data fall into this range. Dependence of discharge coefficients on the Reynolds number is good agreement with those suggested in ISO document. The influence of swirl on the discharge coefficients becomes greater as the nozzle throat diameter is enlarged. The discharge coefficient of conical nozzle shows about 4.5% lower discharge coefficients than those of toroidal nozzle, but variation trend with Reynolds number is very similar each other and reproducibility of data is very good.
천연가스 유량 측정에서 헬름홀츠 자유에너지를 이용한 임계유동함수 계산
하영철(Young-Cheol Ha),허재영(Jae-Young Her) 대한기계학회 2013 大韓機械學會論文集B Vol.37 No.12
본 연구에서는 천연가스 유량 측정에서 2차 표준으로 사용되는 소닉노즐 뱅크 12개 노즐 패키지로 구성 의 임계유동함수 계산 시간을 1초 이하로 단축하고자 하였다. 이를 위해 AGA 8-dc 상태방정식을 적용한 헬름홀츠 자유에너지를 유도하고 이로부터 적분 항이 없는 열역학 상태량 식을 도출하여 CFF 계산에 적용하였다. 그 결과 CFF 계산 시간이 기존 6.7초/12개에서 0.6초/12개로 크게 감소하는 것을 확인할 수 있었고 이 계산 시간은 가스 성분 수와 거의 무관함도 알 수 있었다. 또한 본 계산 결과의 정확도를 확인하기 위해 기존 CFF 국제비교연구의 결과와 비교한 결과 차이가 없음도 확인하였다. This study aimed to calculate the CFFs (critical flow functions) of a sonic nozzle bank with a 12-nozzle package within 1 s. Toward this end, the Helmholtz free energy of natural gas was formulated by using the AGA8-dc equation of state in a form without integral terms, and thereafter, thermodynamic properties such as the enthalpy, entropy, speed of sound, and heat capacity, which are used in CFF calculation, were derived in analytical form. As a result, the calculation time of CFFs was improved from 6.7 s in a previous study to 0.6 s per 12-nozzle package and kept almost constant regardless of the number of components in natural gas. Furthermore, it was confirmed that the calculated CFF values were in agreement with the results of a CFF international comparison test carried out under ISO management in 1998?1999.
최해만,박경암,최용문,Choe, Hae-Man,Park, Gyeong-Am,Choe, Yong-Mun 대한기계학회 2001 大韓機械學會論文集B Vol.25 No.12
Measurement uncertainty should be evaluated according to ISO/IEC 17025. In Flow measurement area, uncertainty evaluation scheme was applied to the reference flow meter, sonic nozzle. Uncertainty was calculated by evaluating various uncertainty factors affected in flow measurement. The expanded uncertainty(U) of the sonic nozzle was 2.1$\times$ 10$^{-3}$ (confidence level of 95 %). This evaluation example will be useful in flow measurement uncertainty determination of other flow meters.
차지선,박경암,최용문,최해만,윤복현,Cha, Tsi-Sun,Park, Kyung-Am,Choi, Yong-Moon,Choi, Hae-Man,Yoon, Bok-Hyun 한국유체기계학회 2000 한국유체기계학회 논문집 Vol.3 No.2
Small sonic nozzles (throat diameter $0.28{\~}4.48mm$) were tested in the gas flow standard system. This standard system is composed of two bell provers and 5 column piston provers, compressor, filters, and dehumidifier. The discharge coefficients of small some nozzles are obtained and correlated as a function of throat Reynolds numbers with $0.316\%$ uncertainty at a confidence level $95\%$. The tested high Reynolds number was the lower limit of ISO 9300 specifications. The data are useful as data base for revision of ISO 9300.
소닉노즐을 이용한 천연가스 유량측정에서 임계유동인자 계산 및 국제비교 결과
하영철,허재영,Ha, Youngcheol,Her, Jaeyoung 대한기계학회 1999 大韓機械學會論文集B Vol.23 No.7
The sonic nozzle is widely used as reference device for calibrating flowmeters In gas flow measurement and its use requires the Critical Flow Factor(CFF) based on the thermodynamic properties of the gas at the nozzle throat. ISO-9300 provides the calculating method of the factor. But since the CFF from this method show an error over ${\pm}0.5%$ In specific conditions and of ${\pm}0.1{\sim}{\pm}0.2%$ in common Natural Gas(NG) custody transfer condition. this method cannot be applied for gas flow measurement with sonic nozzle. Each research bodies or organizations of the world have joined in order to calculate the CFF more accurately. They have performed these works using their own method and compared the results with each other under the management of ISO. KOGAS have joined those works, because the high-pressure natural gas flow calibration facility of KOGAS will be constructed in late 1999, and then had necessities to calculate a CFF accurately. The calculation method of KOGAS was using the equation of state from AGA-8('94), high accuracy model of ideal gas properties and the solutions of thermodynamic equations. The evaluation results have had a very good consistency within ${\pm}0.05%$ in most NO custody transfer conditions compared to the speed of sound for methane and also shown that the CFF was within ${\pm}0.1%$ compared to the results of other works of the world.
임재명(J.M. Lim),박경암(K.A. Park),윤복현(B.H. Yoon),최해만(H.M. Choi) 한국유체기계학회 2007 유체기계 연구개발 발표회 논문집 Vol.- No.-
The aim of this paper is to develop the technology of minute gas flow-rate, which is very important in the fields of semiconductor process and NT(Nano Technology). To reach the aim mentioned above we developed the following measurement method. Firstly, we manufactured several some nozzles of the same throat diameters with the same configuration, and calibrated them by means of the standard measurement system. Then we selected a group of sonic nozzles with the similar characteristics. Lastly, we instituted some nozzles from one nozzle in the upstream and other some nozzles from two nozzles in the downstream. In this way we could all the flow-rates(discharge coefficient) for the some nozzles of the same nominal throat diameter.