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Improvement of Column Spacer Uniformity in a TFT LCD Panel
Jung-Hyuk Cho,오혜근,Jong-Sun Kim,Jung-Min Sohn,Sung-Hyuck Kim,Young-Hoon Kim 한국물리학회 2006 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.48 No.II
The photoresist of a column spacer is very sensitive to UV light, and its uniformity depends on the exposure process. In a proximity-type aligner, the exposure gap can control the light diffraction and intensity, which affect the column spacer thickness and the critical dimension. The limitation of non-flat mask and work stage causes a non-uniform exposure gap. Applying an attenuated phase shift mask can compensate for this handicap. By using commercial software, we analyzed the difference between a conventional mask and a phase-shift mask as a function of the exposure gap and examined changes in the column spacer’s thickness loss and the critical dimension. In order to reduce the diffraction effect and to get a uniform intensity, we varied the transmission in an opaque mask area and found that the thickness uniformity could be improved by about 30 %. Consequently, we expect the attenuated phase shift mask to have a larger possibility of improving the column spacer’s thickness uniformity without any mechanical alteration.
Jung, Jee-Hyun,Kim, Moonkoo,Yim, Un Hyuk,Ha, Sung Yong,Shim, Won Joon,Chae, Young Sun,Kim, Hana,Incardona, John P.,Linbo, Tiffany L.,Kwon, Jung-Hwan American Chemical Society 2015 Environmental science & technology Vol.49 No.22
<P>Interspecific difference in the developmental toxicity of crude oil to embryonic fish allows the prediction of injury extent to a number of resident fish species in oil spill sites. This study clarifies the comparative developmental effects of Iranian heavy crude oil (IHCO) on the differences of biouptake and toxic sensitivity between embryonic spotted sea bass (<I>Lateolabrax maculates</I>) and olive flounder (<I>Paralichthys olivaceus</I>). From 24 h after exposure to IHCO, several morphological defects were observed in both species of embryonic fish, including pericardial edema, dorsal curvature of the trunk, developmental delay, and reduced finfolds. The severity of defects was greater in flounder compared to that in sea bass. While flounder embryos accumulated higher embryo PAH concentrations than sea bass, the former showed significantly lower levels of CYP1A expression. Although bioconcentration ratios were similar between the two species for some PAHs, phenanthrenes and dibenzothiophenes showed selectively higher bioconcentration ratios in flounder, suggesting that this species has a reduced metabolic capacity for these compounds. While consistent with a conserved cardiotoxic mechanism for petrogenic PAHs across diverse marine and freshwater species, these findings indicate that species-specific differences in toxicokinetics can be an important factor underlying species’ sensitivity to crude oil.</P><P><B>Graphic Abstract</B> <IMG SRC='http://pubs.acs.org/appl/literatum/publisher/achs/journals/content/esthag/2015/esthag.2015.49.issue-22/acs.est.5b03729/production/images/medium/es-2015-03729u_0004.gif'></P><P><A href='http://pubs.acs.org/doi/suppl/10.1021/es5b03729'>ACS Electronic Supporting Info</A></P>
( Hyuk Yoon ),( Nayoung Kim ),( Cheol Min Shin ),( Hye Seung Lee ),( Bo Kyoung Kim ),( Gyeong Hoon Kang ),( Jung Mogg Kim ),( Joo Sung Kim ),( Dong Ho Lee ),( Hyun Chae Jung ) 대한소화기학회 2016 Gut and Liver Vol.10 No.2
Background/Aims: To identify the risk factors for metachronous gastric neoplasms in patients who underwent an endoscopic resection of a gastric neoplasm. Methods: We prospectively collected clinicopathologic data and measured the methylation levels of HAND1, THBD, APC, and MOS in the gastric mucosa by methylation-specific real-time polymerase chain reaction in patients who underwent endoscopic resection of gastric neoplasms. Results: A total of 257 patients with gastric neoplasms (113 low-grade dysplasias, 25 highgrade dysplasias, and 119 early gastric cancers) were enrolled. Metachronous gastric neoplasm developed in 7.4% of patients during a mean follow-up of 52 months. The 5-year cumulative incidence of metachronous gastric neoplasm was 4.8%. Multivariate analysis showed that moderate/severe corpus intestinal metaplasia and family history of gastric cancer were independent risk factors for metachronous gastric neoplasm development; the hazard ratios were 4.12 (95% confidence interval [CI], 1.23 to 13.87; p=0.022) and 3.52 (95% CI, 1.09 to 11.40; p=0.036), respectively. The methylation level of MOS was significantly elevated in patients with metachronous gastric neoplasms compared age- and sexmatched patients without metachronous gastric neoplasms (p=0.020). Conclusions: In patients who underwent endoscopic resection of gastric neoplasms, moderate/severe corpus intestinal metaplasia and a family history of gastric cancer were independent risk factors for metachronous gastric neoplasm, and MOS was significantly hypermethylated in patients with metachronous gastric neoplasms. (Gut Liver 2016;10:228-236)
( Hyuk Yoon ),( Sang Gyun Kim ),( Bo Kyoung Kim ),( Eun Shin ),( Nayoung Kim ),( Hyuk-joon Lee ),( Gyeong Hoon Kang ),( Hyun Chae Jung ) 대한간학회 2017 Gut and Liver Vol.11 No.1
Background/Aims: To evaluate the expression of cellular inhibitor of apoptosis protein 2 (cIAP2) during gastric carcinogenesis after Helicobacter pylori (HP) infection and after HP eradication. Methods: We divided non-cancer patients into four groups according to the status of HP infection and atrophic gastritis (AG)/intestinal metaplasia (IM). We compared cIAP2 mRNA expression among these four groups and patients with HP-positive early gastric cancer (EGC) by using real-time polymerase chain reaction (PCR). We evaluated the expression of cIAP2 messenger RNA (mRNA)/protein by using real-time PCR/immunohistochemistry and the degree of apoptosis with a terminal deoxynucleotidyl transferasemediated nick end labeling assay before and 12 months after endoscopic submucosal dissection (ESD) in HP-positive EGC patients, regardless of whether they had undergone eradication therapy. Results: The expression of cIAP2 mRNA was significantly higher in the groups with HP(+), AG/IM(+), and HP-positive EGC than in the control, HP(+), and AG/ IM(-) groups (p<0.005). In the HP eradication group, the expression of cIAP2 mRNA/protein significantly decreased (p=0.006) and apoptosis increased at the 12-month followup after ESD. In the HP noneradication group, the aforementioned changes were not found during the same follow-up period. Conclusions: The expression of cIAP2 increased during gastric carcinogenesis after HP infection; HP eradication in the patients who had undergone ESD for EGC reversed overexpression of cIAP2 and suppressed cell apoptosis. (Gut Liver 2017;11:79-86)
Trends in recent waterborne and foodborne disease outbreaks in South Korea, 2015–2019
Sang Hyuk Lee,Jae-Won Yun,Ji Hee Lee,Yeon Haw Jung,Dong Han Lee 질병관리본부 2021 Osong Public Health and Research Persptectives Vol.12 No.2
Objectives: This study analyzed trends in foodborne and waterborne diseases in South Korea between 2015 and 2019. Methods: The data consisted of information on outbreaks of waterborne and foodborne infectious diseases reported through the Korea Centers for Disease Control and Prevention (KCDC) system. We analyzed the trends and epidemiological aspects of outbreaks by month, place of occurrence, and causative pathogens in this observational study. Results: The number of outbreaks has steadily increased over the last 5 years, but the number of cases per outbreak has followed a decreasing trend. Incidence at daycare centers and preschools has been steadily increasing over consecutive years. Conclusion: The steady number of patients and decreasing number of cases per outbreak, even as the number of outbreaks has been increasing, suggest that the KCDC’s professional management system is operating effectively. It is necessary to continue improving the objectivity and efficiency of the management system and to carefully examine the increasing number of outbreaks in smaller-scale group catering facilities, such as daycare centers and preschools. Outbreaks can be prevented by closely examining those caused by unidentified pathogens and group outbreaks caused by other diseases, identifying problems, and supplementing the management system.
Fundamental Study of CNTs Fabrication for Charge Storable Electrode using RF-PECVD System
Jung, Ki-Young,Kwon, Hyuk-Moon,Ahn, Jin-Woo,Lee, Dong-Hoon,Park, Won-Zoo,Sung, Youl-Moon The Korean Institute of IIIuminating and Electrica 2009 조명·전기설비학회논문지 Vol.23 No.7
Plasma enhanced chemical vapor deposition (PECVD) is commonly used for Carbon nanotubes (CNTs) fabrication, and the process can easily be applied to industrial production lines. In this works, we developed novel magnetized radio frequency PECVD system for one line process of CNTs fabrication for charge storable electrode application. The system incorporates aspects of physical and chemical vapor deposition using capacitive coupled RF plasma and magnetic confinement coils. Using this magnetized RF-PECVD system, we firstly deposited Fe layer (about 200[nm]) on Si substrate by sputter method at the temperature of 300[$^{\circ}$] and hence prepared CNTs on the Fe catalyst layer and investigated fundamental properties by scanning electron microscopy (SEM) and Raman spectroscopy (RS). High-density, aligned CNTs can be grown on Fe/Si substrates at the temperature of 600[$^{\circ}$] or less.
The Influence of Transmission Reduction by Mask Haze Formation in ArF Lithography
Sung-Jin Kim,오혜근,안일신,Jai-Sun Kyoung,Jin-Back Park,Jung-Hyuk Cho,Seung-Wook Park,Sung-Hyuck Kim 한국물리학회 2006 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.49 No.2I
The line width has been gradually reduced to enhance the integration of semiconductor devices. As minimum line widths have shrunk, the exposure wavelength has also progressively shrunk. The exposure wavelengths have been reduced progressively from 436 nm to 365 nm to 248 nm and to 193 nm. This shrinkage of the exposure wavelength has caused some serious problems. One of the problems is the growth of defects in the reticle during the process. Such defects in the reticle are called haze. Haze is formed around the pellicle on the quartz side of the mask and on the chrome side of the mask. In this investigation, mask haze is intentionally formed on the backside of a mask by using 193 nm laser irradiation. The mask thickness is measured by using atomic force microscopy and spectroscopic ellipsometry. We investigated the simulated critical dimension value and the throughput by using Solid-E of Sigma-C for each mask. This paper will use simulations to describe the relationship between the transmittance and haze formation, the effect of haze on the process latitude, and throughput reduction due to haze formation. This study will lead to an understanding of the impact of possible limitations of haze transmission on the imaging performance of each mask.