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Self assembled-monolayer(SAM)법을 이용한 TaN 확산방지막의 무전해 Cu 도금용 Pd seed layer 제조 및 특성
한원규,조진기,최재웅,김정태,염승진,곽노정,김진웅,강성군,Han, Won-Kyu,Cho, Jin-Ki,Choi, Jae-Woong,Kim, Jeong-Tae,Yeom, Seung-Jin,Kwak, Noh-Jung,Kim, Jin-Woong,Kang, Sung-Goon 한국재료학회 2007 한국재료학회지 Vol.17 No.9
Electroless deposition(ELD) was applied to fabricate Cu interconnections on a TaN diffusion barrier with Pd seed layer. The Pd seed layer was obtained by self-assembled monolayer method(SAM) with PDDA and PSS as surfactants. We were able to obtain about 10nm Pd nano particles as seeds for electroless Cu deposition and the density of Pd seeds was much higher than that of Pd seeds fabricated by conventional Pd sensitization-activation method. Also we were able to obtain finer Cu interconnections by ELD. Therefore we concluded that the Pd seed layer by SAM was able to be applied to form Cu interconnection by ELD for under 30nm feature.
시뮬레이션 모델기반 국방체계 설계를 위한 역방향 시뮬레이션
최선한,김탁곤,진기병,박경태,신동조,Choi, Seon Han,Kim, Tag Gon,Jin, Ki Byung,Park, Kyung Tae,Shin, Dong Cho 한국시뮬레이션학회 2020 한국시뮬레이션학회 논문지 Vol.29 No.3
시뮬레이션 모델을 통해 가상 전장에서 국방체계의 효과도를 분석하는 것을 순방향 시뮬레이션이라고 할 때, 높은 효과도를 가지는 국방체계를 설계하기 위해서는 역방향 시뮬레이션이 요구된다. 즉 효과도 분석 모델을 바탕으로 높은 효과도를 달성하기 위한 군사 장비들의 제원 및 성능, 그리고 운용 전술을 역으로 도출해야 한다. 하지만 역모델을 도출할 수 없는 시뮬레이션 모델의 특성상 역방향 시뮬레이션은 많은 순방향 시뮬레이션 반복을 요구하므로 효율성의 문제를 초래한다. 본 논문에서는 반복 횟수를 줄임으로 역방향 시뮬레이션을 효율적으로 수행하기 위한 다양한 알고리즘을 제시하고, 실무자가 이들을 손쉽게 활용하기 위한 역방향 시뮬레이션 도구를 소개한다. 실무자는 본 도구를 바탕으로 다양한 역방향 시뮬레이션 알고리즘을 활용하여 국방체계 설계를 위한 역방향 시뮬레이션을 손쉽게, 또 효율적으로 수행할 수 있다. 전함의 방어 시스템 설계와 군사 네트워크 시스템 설계에 대한 사례 연구는 이를 입증한다. When analyzing the effectiveness of a defense system in a virtual battlefield with a simulation model is referred to as forward simulation, reverse simulation is required to design a good defense system with high effectiveness. That is, using the simulation model, it is necessary to find the engineering factors, measures of performance, and operational tactics that are demanded to achieve high effectiveness of the system. However, the efficiency of reverse simulation is still a concern since many replications of forward simulation are required for conducting reverse simulation. In this paper, we introduce various efficient algorithms to reduce the number of replications and a reverse simulation tool for utilizing these algorithms easily. The tool allows practitioners to easily and efficiently conduct reverse simulation for design a good defense system based on simulation models. This is demonstrated with the case studies on the design of warship's defense system and the design of military network system.
무전해 도금법으로 제조된 Co(Re,P) capping layer제조 및 특성 평가
한원규,김소진,주정운,조진기,김재홍,염승진,곽노정,김진웅,강성군,Han, Won-Kyu,Kim, So-Jin,Ju, Jeong-Woon,Cho, Jin-Ki,Kim, Jae-Hong,Yeom, Seung-Jin,Kwak, Noh-Jung,Kim, Jin-Woong,Kang, Sung-Goon 한국재료학회 2009 한국재료학회지 Vol.19 No.2
Electrolessly deposited Co (Re,P) was investigated as a possible capping layer for Cu wires. 50 nm Co (Re,P) films were deposited on Cu/Ti-coated silicon wafers which acted as a catalytic seed and an adhesion layer, respectively. To obtain the optimized bath composition, electroless deposition was studied through an electrochemical approach via a linear sweep voltammetry analysis. The results of using this method showed that the best deposition conditions were a $CoSO_4$ concentration of 0.082 mol/l, a solution pH of 9, a $KReO_4$ concentration of 0.0003 mol/l and sodium hypophosphite concentration of 0.1 mol/L at $80^{\circ}C$. The thermal stability of the Co (Re,P) layer as a barrier preventing Cu was evaluated using Auger electron spectroscopy and a Scanning calorimeter. The measurement results showed that Re impurities stabilized the h.c.p. phase up to $550^{\circ}C$ and that the Co (Re,P) film efficiently blocked Cu diffusion under an annealing temperature of $400^{\circ}C$ for 1hr. The good barrier properties that were observed can be explained by the nano-sized grains along with the blocking effect of the impurities at the fast diffusion path of the grain boundaries. The transformation temperature from the amorphous to crystal structure is increased by doping the Re.
Cu 배선 확산 방지용 전해 Ni-Re-P 합금 피막의 열적 안정성
강성군 ( Sung Goon Kang ),조진기 ( Jin Ki Cho ),김문태 ( Moon Tae Kim ) 대한금속재료학회 ( 구 대한금속학회 ) 2007 대한금속·재료학회지 Vol.45 No.5
Using electrodeposition, the influence of Re on thermal stability of Ni-P films was studied. Ni-P and Ni-Re-P films were electrodeposited on Cu plates in a sulfamate bath respectively. Electrodeposition was carried out at 1A/dm2 and the film`s thickness was 170nm. The concentration of P and Re in the films was analyzed by WDXRF(Wave Dispersive X-ray Fluorescence Spectrometers) and the concentration was 6wt.% and 10wt.% respectively. DSC(Differential Scanning Calorimetry) and XRD(X-ray diffraction) showed that the crystallization temperature of Ni-Re-P films was 76℃ higher than that of Ni-P films. The results indicated that the thermal stability of Ni-Re-P films was superior to that of Ni-P films.
김경수(Gyeong-Soo Kim),조진기(Jin-Gi Cho),이상호(Sang-Ho Lee) 한국정보과학회 1989 한국정보과학회 학술발표논문집 Vol.16 No.2
본 논문에서는, 공개 키(Public Key) 크립토시스템(Cryptosystem)에서의 암호화(encryption)와 암호 해독(decryption)을 위한 새로운 확률적 구현 기법을 제안한다. 이 새로운 확률적 공개 키 크립토시스템은 다항식적으로 안전하다. 또한, 이 기법은 암호화및 암호 해독 과정에 있어 효율적이고 메시지 확장(message expansion)은 l + (k - 1) / l이다. 여기서 l은 평문(Plaintext)의 길이이고 k는 보안성 매개 변수(Security Parameter)이다. 그리고, 이 기법이 서명 (signature) 방법에도 사용될 수 있다는 것을 보인다.
재래돼지 미토콘드리아 게놈내 D-loop 영역의 염기서열 분석
김태헌,윤두학,이효신,정일정,조진기 ( T . H . Kim,D . H . Yoon,H . S . Lee,I . C . Cheong,J . K . Jo ) 한국축산학회 1997 한국축산학회지 Vol.39 No.3
The purpose of this study was to investigate differences in restriction fragment length polymorphisms between mitochondrial DNAs(mtDNA) of Korean native pig and Landrace and to construct restriction map of the mtDNA of Korean native pig. When the mtDNA were digested with 16 different restriction enzymes of Apa I, Ava I, Barnes I, Bgl I, Bgl II, Cla I, EcoR I, EcoRV, Hind III, Hpa I, Pst I, Pvu II, Sac I, Sca I, Stu I and Xba I, to recognize 6 specific base pairs, restriction patterns of all the enzymes except for Bgl B and Sca I were identical between the two breeds. When digested with Bgl B and Sca I, seven out of ten Korean native pigs showed different band patterns from those of Landrace, but the other three showed the same patterns as those of Landrace. While five BamH I restriction fragments were reported in literature, the seven fragments were detected in this study. The restriction map of Korean native pig mitochondrial genome with 28 cleavage sites of 8 different restriction enzymes was constructed.