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무진동 크레인의 구현을 위한 여러가지 제어방식의 비교 연구
윤지섭 대한기계학회 1995 대한기계학회논문집 Vol.19 No.9
Crane operation for transporting heavy loads inherently causes swinging motion at the loads due to crane's acceleration or deceleration. This motion not only lowers the handling safety but also slows down the handling process. To complement such a problem, Korea Atomic Energy Research Institute(KAERI) has designed several anti-swing controllers using open loop and closed loop approaches. They are namely a pre-programmed feedback controller and a fuzzy controller. These controllers are implemented on a 1-ton crane system at KAERI and their control performances are compared. Test operations show that the new controllers are superior to that of conventional cranes in terms of robustness to the disturbances and adaptation capability to the change of rope length.
윤지섭 대한기계학회 1993 대한기계학회논문집 Vol.17 No.9
This paper addresses the design procedure and testing result of a servo driven pan/tilt device which is capable of tracking arbitrary movement of a specified target object. In order to achieve real-time acquisition of feedback signal, a 2 degree-of freedom non-contact type displacement follower has been employed in stead of vision camera. The performance of the designed system is tested for different target velocities and control gains. The test result shows the satisfactory performance to be adopted as an effective tool for visual transfer in the context of teleoperation.
MgO-Al<sub>2</sub>O<sub>3</sub>-SiO<sub>2</sub>계 유리의 열물성과 내플라즈마성 연구
윤지섭,최재호,정윤성,민경원,임원빈,김형준,Yoon, Ji Sob,Choi, Jae Ho,Jung, YoonSung,Min, Kyung Won,Im, Won Bin,Kim, Hyeong-Jun 한국반도체디스플레이기술학회 2021 반도체디스플레이기술학회지 Vol.20 No.2
In this study, we studied the alternative of plasma resistant ceramic parts that constitute plasma chambers in the semiconductor dry etching process. MgO-Al<sub>2</sub>O<sub>3</sub>-SiO<sub>2</sub>(MAS) glass was made of 13 types of glass using the Design Of Experiments(DOE) and the effect on thermal properties such as glass transition temperature and crystallization temperature depending on the content of each composition and etching resistance to CF<sub>4</sub>/O<sub>2</sub>/Ar plasma gas. MAS glass showed excellent plasma resistance and surface roughness up to 20 times higher than quartz glass. As the content of Al<sub>2</sub>O<sub>3</sub> and MgO increases, the plasma resistance is improved, and it has been confirmed that it has an inverse relationship with SiO<sub>2</sub>.