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서상헌,유회영,김상남,하성철,Seo, Sang-Hyeon,Yu, Heoi-Young,Kim, Sang-Nam,Ha, Sung-Chul 한국조명전기설비학회 1996 조명.전기설비 Vol.10 No.6
본 논문은 저자들에 위해 결정된 전자충돌단면적을 사용하여 몬테칼로 시뮬레이션 볼쯔만 방정식법에 의해 E/N:150∼180[Td] 범위에서 계산된 {{{{ { SF}_{ 6} }}}}가스의 전자수송 특성과 TOF법에서 구한 전자군 파라미터 값들을 나타냈다. 전자이동 속도 전자전력 또는 부착계숙, 종·횡방향 확산계수 등의 전자군 파라미터 값들은 E/N범위에서 실험치와 이론치가 일치하였다. 전자사태의 특성은 전자에너지의 비평형영역에서 고려되었다. 전자에너지 분포함수 는 평균에너지의 평형영역에 대하여 E/N:150∼180[Td]에서 해석하였다. 그 결과의 타당성은 TOF법에 의해 입증되었다. This paper describes the electron transport characteristics in SF6 gas calculated for range of E/N values from 150~ 800[Td) by the Monte Carlo simulation and Boltzmann equation method using a set of electron collision cross sections detennined by the authors and the values of electron swarm parameters are obtained by TOF method. The results gRined that the values of the electron swarm parameters such as the electron drift velocity, the electron ionization or Rttachment coefficients, longitudinal and transverse diffusion coefficients agree with the experimental and theoretical for a range of E/N. The properties of electron avalanches is concerned electron energy non--equilibrium region. The electron energy distributions function were analysed in sulphur hexafluoride at E/N : 500~800[Td) for a case of non-equilibrium region in the mean electron energy. The validity of the results obtained has been confilll1ed by a TOF method.
MCS-BE에 의한 $SF_6$+He 혼합기체의 전자수송특성 해석
하설철,송병두,유회영,김상남,백승권 한국전기전자재료학회 2000 전기전자재료학회논문지 Vol.13 No.4
The paper describes the electron transport characteristics in SP$_{6}$+He gas calculated E/N values 0.1~700[Td] by the Monte Carlos simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters obtained by TOF method. This study gained the values of the electron swarm parameters such as the electron drift velocity the electron ionization or attachment coefficients longitudinal and transverse diffusion coefficients for SF$_{6}$+He gas at a range of E/N.E/N.
$SF_{6+}Ar$혼합기체의 전자수송특성 개선에 관한 연구
하성철,김상남,유회영,서상현,임상원,전병훈 한국전기전자재료학회 1998 전기전자재료학회논문지 Vol.11 No.1
In this paper, the electron swarm parameters in the 0.5% and 0.2% SF\ulcorner+Ar mixtures are measured by time of flight method over the E/N(Td) range from 30 to 300(Td). The measurements have been carried out by the double shutter drift tube with variable drift distance from the cathod. A two-term approximation of the boltzmann equation analysis and Monte Carlo simulation have been also used to study electron transport coefficients. We have calculated W, $ND_L,\;ND_T,\;\alpha,\;\eta,\;\alpha-\eta$, and the limiting breakdown electric field to gas mixtures ratio in pure $SF_6$+Ar mixtures. The electron energy distribution function has been analysed in $SF_6$+Ar mixtures at E/N : 200(Td) for a case of the equilibrium region in the mean electron energy. The measured results and the calculated results have been compared each other.
이형윤,하성철,유회영,김상남,임상원,문기석 동국대학교 산업기술연구원 1997 산업기술논문집 Vol.9 No.-
This paper describes the discharge parameters in SiH_4 gas calculated for the range of E/N values from 0.5~300(Td) by the Monte Calro simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of the discharge parameters are obtained for the TOF method. The theoretical results of the discharge parameter such as the electron drift velocity, characteristic energy agree with the experimental values for the range of E/N. The electron energy distributions function were analyzed in monosilane at the E/N : 30, 50(Td) for a case of equilibrium region in the mean electron energy. The validity of the results obtained has been confirmed by the TOF method.