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오진경,오혜근 한양대학교 이학기술연구소 1999 이학기술연구지 Vol.1 No.-
반도체 집적 소자를 제작하기 위하여 감광제에 빛을 쪼여주게 되는데 이 때 감광제의 굴절률이 변하게 된다. 기존 시뮬레이션 방법에서는 굴절률중 허수에 해당하는 흡수 계수의 변화만 고려되었으나 우리는 실수 굴절률 변화도 고려된 시뮬레이션 방법을 개발하였다. 개발된 방법에 의해 실수 굴절률 변화가 노광 공정에 어떠한 영향을 끼치는지 swing curve와 측면각 등에 대해 탈 초점 및 에너지에 따른 선폭 변화에 대해 조사하였다. I-line과 193 ㎚용 감광제에 적용시켰으며 그 결과 실수 굴절률이 증가하면 선폭을 더 작게 조절할 수 있고 공정여유도도 크게 하지만 측면각은 작아지고 실수 굴절률이 감소하면 선폭은 커지고 공정여유도는 작아지지만 측면각이 증가하는 경향을 보인다. The refractive index of photoresist is changed during exposure of the lithography process. Conventional simulation considers the change of the imaginary refractive index only. We developed a new simulation tool that includes the change of the real refractive index. We investigated the effect of this change to the lithography process. The line width, defocus, energy, swing curve, and side wall angle are studied. We applied the tool to the I-line resist and 193 ㎚ resist. As the real refractive index increases the line width decreases and the process latitude increases, but the side wall angle decreases. As the real refractive index decreases the line width increases and the process latitude decreases, but the side wall angle increases.
Role of strain echocardiography in patients with hypertension
오진경,박재형 대한고혈압학회 2022 Clinical Hypertension Vol.28 No.-
Hypertension is a well-recognized risk factor for the development of cardiovascular disease, and the early detection of cardiac changes from hypertension can allow reversing these. Hypertensive heart diseases (HHD) refer to the complex and diverse change of the cardiac structure and function secondary to hypertension. Although conventional echocardiography is the most common imaging modality in detecting HHD, it cannot detect subtle changes of cardiac structure in subclinical states. Because strain echocardiography is another echocardiographic modality can detect subclinical myocardial dysfunction by measuring intrinsic myocardial deformation, it became more and more popular in clinical and research fields. In this review article, we described the basic concept of strain echocardiography and summarized several clinical studies showing its clinical utilities in the detection of HHD.
오진경,정보윤,윤이화,임민경 대한암학회 2018 Cancer Research and Treatment Vol.50 No.2
Purpose Human papillomavirus (HPV) vaccination has been included in the National Immunization Program in Korea since 2016. We aimed to evaluate changes in the awareness of and attitudes toward HPV vaccination, among adults in Korea since the first introduction of the vaccines in 2007. Materials and Methods A nationwide population-based survey was conducted in 2016 for 1,200 nationally representative Korean men and women; the data obtained were compared with the data from the nationwide survey conducted in 2007. Results A significant increase in the awareness of HPV infection (35.8%) and vaccination (36.9%) was observed in 2016 from 13.3% and 8.6% in 2007, respectively. Willingness to be vaccinated against HPV decreased from 55.0% in 2007 to 25.8% in 2016, and the proportion of respondents expressing uncertainty increased from 28.3% in 2007 to 43.3% in 2016. Only 12.1% of men and 22.0% of women knew about the free national HPV vaccination program for girls, launched in June 2016. Younger women, with higher income level, awareness of the HPV vaccine, and perception of the seriousness of infections had a higher willingness to be vaccinated. A high education level, awareness of HPV infection and vaccination, and perception of the seriousness of infection were positively associated with the willingness of respondents to vaccinate their daughters. Conclusion Raising the awareness of HPV infection and vaccination with appropriate knowledge is necessary for the successful implementation of the national HPV vaccination program.