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3 차원 변위 측정을 위한 저가의 원판형 정전 용량 센서
심치형(Chi-Hyoung Shim),안형준(Hyeong-Joon Ahn),한동철(Dong-Chul Han) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5
A cost-effective disk-type capacitive sensor is developed for three dimensional displacement measurement. The capacitance between a sensor disk and a grounded rotor depends on both their air gap and their mutual area overlap, which contains three dimensional position information of the target. The developed sensor has wide measurement range since it detects capacitance variation due to area change, and the sensor is made with a printed circuit board. First, effects of mechanical errors: irregular air gap, target roundness and sensor installation errors on the measuring process of the proposed sensor are analyzed, and a design criterion of the sensor is determined based on the error analysis. In addition, a compensation method for the sensor installation error is proposed. Finally, a test rig is built and the effectiveness of the proposed sensor is proven through experiments.
심치형(Chi-Hyoung Shim),안형준(Hyeong-Joon Ahn),김종혁(Jong-Hyuk Kim),한동철(Dong-Chul Han),맹희영(Hee-Young Maeng),김성동(Sung-Dong Kim) 한국생산제조학회 2005 한국공작기계학회 추계학술대회논문집 Vol.2005 No.-
A disk-type capacitive sensor is developed for acceptance test of a nano-stage. The capacitance between the sensor disk and rotor depends on both the air gap and the mutual area overlap, which contain three dimensional position information of the target rotor. The developed sensor has a wide measurement range since the sensor detects the capacitance variation due to the area change the target moreover, the manufacturing cost is very cheap because and the sensor can be made with a printed circuit board. First, effects of mechanical errors: the irregular air gap, the target roundness and the sensor installation errors on the measuring process of the proposed sensor were analyzed, and the sensor design criterion is discussed. A test rig was built and the effectiveness of the proposed sensor was verified through experiments.
심치형(Chi-Hyoung Shim),안형준(Hyeong-Joon Ahn),김종혁(Jong-Hyuk Kim),한동철(Dong-Chul Han),맹희영(Hee-Young Maeng),김성동(Sung-Dong Kim) 한국생산제조학회 2005 한국생산제조시스템학회 학술발표대회 논문집 Vol.2005 No.10
A disk-type capacitive sensor is developed for acceptance test of a nano-stage. The capacitance between the sensor disk and rotor depends on both the air gap and the mutual area overlap, which contain three dimensional position information of the target rotor. The developed sensor has a wide measurement range since the sensor detects the capacitance variation due to the area change the target moreover, the manufacturing cost is very cheap because and the sensor can be made with a printed circuit board. First, effects of mechanical errors: the irregular air gap, the target roundness and the sensor installation errors on the measuring process of the proposed sensor were analyzed, and the sensor design criterion is discussed. A test rig was built and the effectiveness of the proposed sensor was verified through experiments.
오현주,장동영,양희남,김동환,박만진,심치형,김충수 한국공작기계학회 2005 한국공작기계학회 춘계학술대회논문집 Vol.2005 No.-
We have designed and fabricated a thermal scanning electron microscopy. It includes an electron source, two condenser lenses, one objective lens, a scanning coil and a stigmator coil for focusing in column and also have a secondary electron detector for constructing the image in chamber with a high vacuum condition and control part for operating the SEM. Especially, in order for us to find out the optical characteristics, our attention and studies have been concentrated on the effects of two condenser lenses and one objective lens for high resolution with SEM. Finally, we developed a high resolution thermal scanning electron microscopy.
오현주(H. J. on),장동영(D. Y. Chang),양희남(H. N. Yang),김동환(D. H. Kim),박만진(M. J. Park),심치형(C. H. Shim),김충수(C. S. Kim) 한국생산제조학회 2005 한국생산제조시스템학회 학술발표대회 논문집 Vol.2005 No.5
We have designed and fabricated a thermal scanning electron microscopy. It includes an electron source, two condenser lenses, one objective lens, a scanning coil and a stigmator coil for focusing in column and also have a secondary electron detector for constructing the image in chamber with a high vacuum condition and control part for operating the SEM. Especially, in order for us to find out the optical characteristics, our attention and studies have been concentrated on the effects of two condenser lenses and one objective lens for high resolution with SEM. Finally, we developed a high resolution thermal scanning electron microscopy.