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반응표면분석을 통한 SU-8 포토레지스트의 특성 및 최적화
李晟準,文世泳,朴宰賢,洪尙眞 明知大學校 産業技術硏究所 2006 産業技術硏究所論文集 Vol.25 No.-
SU-8 is a epoxy based photoresist designed for MEMS applications, where a thick, chemically and thermally stable image is desired. But SU-8 has proven to be very sensitive to variation in processing variables and hence difficult to use in the fabrication of useful structures. In this paper, negative SU-8 photoresist processed has been characterized in terms of delamination. Based on a full factorial designed experiment. Employing the design of experiment (DOE), a process parameter is established, and analyzing of full factorial design is generated to investigate degree of delamination associated with three process parameters: PEB (Post Exposure Bake) temperature, PEB time, and exposure energy. These results identify acceptable ranges of the three process variables to avoid delamination of SU-8 film, which in turn might lead to potential defects in MEMS device fabrication.
Characterization of Negative Photoresist Processing by Statistical Design of Experiment (DOE)
Mun Sei-Young,Kim Gwang-Beom,Soh Dea-Wha,Hong Sang Jeen The Korea Institute of Information and Commucation 2005 Journal of information and communication convergen Vol.3 No.4
SU-8 is a epoxy based photoresist designed for MEMS applications, where a thick, chemically and thermally stable image are desired. However SU-8 has proven to be very sensitive to variation in processing variables and hence difficult to use in the fabrication of useful structures. In this paper, negative SU-8 photoresist processed has been characterized in terms of delamination, based on a full factorial designed experiment. Employing the design of experiment (DOE), a process parameter is established, and analyzing of full factorial design is generated to investigate degree of delamination associated with three process parameters: post exposure bake (PEB) temperature, PEB time, and exposure energy. These results identify acceptable ranges of the three process variables to avoid delamination of SU-8 film, which in turn might lead to potential defects in MEMS device fabrication.
Process Optimization of Composite-based Capacitor for LC Resonant Circuits
Mun, Sei-Young,Cha, Cheol-Ung,Choi, Jong-Chan,Lim, Seung-Ok,Hong, Sang-Jeen The Speleological Society 2007 동굴 Vol.80 No.-
The need for high-frequency decoupling capacitors to supply the transient current requirements to high-speed devices is ubiquitous in current microelectronics applications. Even though materials and their processes have already been developed in terms of their performances, low manufacturing cost cannot be overemphasized in current microelectronics industry. For this reason, we revisited low cost ceramic filled polymer integrated capacitor. Experiments were performed according to the design of experiment (DOE). The best recipe that has the optimized ratio of material composite was obtained using by response optimizer in Minitab. And also, high-frequency measurements were performed to get frequency dependent data using network analyzer.
Process Optimization of Composite-based Capacitor for LC Resonant Circuits
( Sei Young Mun ),( Cheol Ung Cha ),( Jong Chan Choi ),( Seung Ok Lim ),( Sang Jeen Hong ) 한국동굴학회 2007 동굴 Vol.80 No.-
The need for high-frequency decoupling capacitors to supply the transient current requirements to high-speed devices is ubiquitous in current microelectronics applications. Even though materials and their processes have already been developed in terms of their performances, low manufacturing cost cannot be overemphasized in current microelectronics industry. For this reason, we revisited low cost ceramic filled polymer integrated capacitor. Experiments were performed according to the design of experiment (DOE). The best recipe that has the optimized ratio of material composite was obtained using by response optimizer in Minitab. And also, high-frequency measurements were performed to get frequency dependent data using network analyzer.
Geographical Patterns of Morphological Variation in Soybean Germplasm
Mun Sup Yoon,Jong Woong Ahn,Sei Joon Park,Hyung Jin Baek,Nam Kyu Park,Young Deok Rho 韓國作物學會 2000 Korean journal of crop science Vol.45 No.4
A total of 1,830 soybean collections were grown in the field and characterized for 10 morphological traits to determine the diversity and relationship within and among geographical regions. Phenotypic variation was found within all regions for most characters. The Shannon-Weaver diversity index ranged from 0.49 to 0.62 across regions, and 0.09 to 1.00 across characters. Canonical discriminant analysis and clustering of the canonical means delineated 3 regional clusters: (ⅰ) Kyunggi, Chungchong, Kangwon, Chulla, and Kyungsang; (ⅱ) Heilongjiang; and (ⅲ) Jilin, Manchuria, central China, south China, Others (China), Hokkaido, Honshu, and Others (Japan).
간장 ( 肝臟 ) , 담도 ( 膽道 ) 및 췌장 ( 膵臟 ) : 급성 담낭염의 치료에 있어서 경피적 담낭루 설치술의 이용
민영일(Young Il Min),이성구(Sung Koo Lee),안세현(Sei Hyun Ahn),김명환(Myung Hwan Kim),이승규(Sung Gyu Lee),전용철(Yong Cheol Jeon),성규보(Kyu Bo Seong),조경식(Kyung Sik Cho),이문규(Mun Gyu Lee) 대한소화기학회 1991 대한소화기학회지 Vol.23 No.3
N/A Percutaneous cholecystostomy is a techniue to obviate cholestectomy or surgical cholecystostomy in high risk patients. We evaluated 12 relatively high risk patients who underwent percutaneous cholecystostomy in recent 1 year. Overall success rate of percutaneous cholecystostomy was 92%(12/ 13). Relief of pain and defervescence could be observed promptly in almost all patients. In 4 cases of acalculous cholecytstitis, the catheters were removed successfully after resolution of acute inflammation. 3 cases of calculous cholecystitis were treated with elective cholecystectomy after resolution of septic condition. Percutaneous stone removal was performed via the enlarged tract with stone basket or other mechanical devices in 3 cases of calculous cholecystitis. Two cases of tube dislodge and 1 case of mild bile leakage were the complications of this procedure without significant mortality or morbidity. Percutaneous cholecystostomy is a fast, low risk and effective treatment of acute cholecystitis in poor surgical risk patients.
Geographical Patterns of Morphological Variation in Soybean Germplasm
Yoon, Mun-Sup,Ahn, Jong-Woong,Park, Sei-Joon,Baek, Hyung-Jin,Park, Nam-Kyu,Rho, Young-Deok The Korean Society of Crop Science 2000 Korean journal of crop science Vol.45 No.4
A total of 1,830 soybean collections were grown in the field and characterized for 10 morphological traits to determine the diversity and relationship within and among geographical regions. Phenotypic variation was found within all regions for most characters. The Shannon-Weaver diversity index ranged from 0.49 to 0.62 across regions, and 0.09 to 1.00 across characters. Canonical discriminant analysis and clustering of the canonical means delineated 3 regional clusters: (ⅰ) Kyunggi, Chungchong, Kangwon, Chulla, and Kyungsang; (ⅱ) Heilongjiang; and (ⅲ) Jilin, Manchuria, central China, south China, Others (China), Hokkaido, Honshu, and Others (Japan).