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Measurements of dynamic characteristics of intermediate layer in thin semiconductors.
Park, Buhm,Jeon, Eun Beom,Kim, Hak-Sung,Kang, Namcheol,Park, Junhong American Scientific Publishers 2013 Journal of Nanoscience and Nanotechnology Vol.13 No.12
<P>A vibration test method for investigating the dynamic characteristics of thin multi-layered semiconductor wafers was proposed. Flash memory chips whose thickness was varied by grinding the wafers were used as specimens. The specimens composed of silicon, device, and device-protecting layers were excited at the clamped end by using a shaker attached to the clamping device. The vibration of the beam was measured using a laser vibrometer. The wave approach was used to analyze the vibration, from which the complex bending stiffness was determined. A theoretical model to obtain the dynamic characteristics (Young's modulus and the loss factor) of the intermediate device layer by using the measured bending stiffness was investigated. The results were examined and compared with those of a nanoindentation test to verify the accuracy of the model. The proposed method enabled determination of the dynamic properties of the intermediate layer without separation which are essential for understanding the impact response of the wafers during manufacturing process.</P>
( Junhong Park ),( Jongtae Lee ),( Sunmoon Kim ),( Jeongsoo Kim ),( Gunwoo Kang ) 한국폐기물자원순환학회 2023 I-CIPEC Vol.2012 No.0
Mobile air conditioning (MAC) systems of light-duty vehicles consume the most energy among auxiliary parts. Vehicle CO<sub>2</sub> reduction policies in Korea, US EPA and European Commission include the strategies for vehicle manufacturers to introduce high-efficient MAC technologies by giving CO<sub>2</sub> incentive. One of important parts in the strategies is to set up how to evaluate added CO<sub>2</sub> by MAC operation and how to differentiate advanced high-efficient MAC technologies. In this study, to evaluate CO<sub>2</sub> emission added by MAC operation, four Korean vehicles were tested on chassis dynamometer with various test modes and different load conditions to MAC system. The driving cycles are CVS-75 used in emission certification and fuel consumption tests in Korea, SC03 used in pollutant emission regulation in driving condition of MAC operation in US, NIER modes used in developing vehicle emission factors in Korea and Euro-MAC under development for evaluating CO<sub>2</sub> by MAC in European Union. The test results have shown that the higher efficient MAC technologies add the lower CO<sub>2</sub> emission in all test methods. Considerable reduction of vehicle CO<sub>2</sub> emission in MAC operation would be expected by introducing high-efficient MAC technologies.