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2P-210 Fabrication of Chiral Nanostructure by Directed Self-Assembly
최홍균,장재범,( Caroline Ross ) 한국공업화학회 2017 한국공업화학회 연구논문 초록집 Vol.2017 No.1
In this study, we demonstrate that confinement of a cylindricalmorphology BCP in a shallow circular pit can produce either concentric rings or a spiral. A spiral is promoted by the presence of a notch-shaped feature within the template which controls the spiral chirality. The length of the spiral increases with the diameter of the template. Design of the notch geometry enabled double spirals to be formed. A notch of width □ L0 promotes spirals even for commensurate pit sizes indicating the critical importance of the inner shape of the template. For smaller notches, spirals formed for incommensurate template diameters and rings for commensurate template diameters. Analogous to using a notch to initiate a spiral in a circular pit, our approach could be extended to guide the chirality of 3D helical spirals formed in cylindrical confinements with a helical ramp template.
블록 공중합체 3차원 패턴의 제조 방법 및 그 구조 특성
최홍균,Choi, Hong Kyoon 한국재료학회 2019 한국재료학회지 Vol.29 No.12
As the importance of three-dimensiona (3D) nano patterns and structures has recently emerged, interest in the study of 3D structures of block copolymers has increased. However, most existing studies on block copolymer 3D patterns on substrates are limited to simple 3D structures such as a multi-layered forms. In this study, we propose an experimental method for realizing free-standing 3D block copolymer patterns on substrates using an e-beam lithographic template and film transfer method. The block copolymer 3D structure formed in wide hole templates are similar to simple multi-layered structures; however, as the width of the hole template become narrower, more complex block copolymer 3D structures are formed in which the upper and lower layer structures are interconnected. Furthermore, we introduce a method to fabricate novel block copolymer structures in which the 2D planar structures are connected to 3D complex structures. Proposed 3D block copolymer fabrication method provides a framework for generation of unconventional 3D structures of block copolymer, which can be useful for next generation 3D devices.
선택적 팽윤을 이용한 블록공중합체 나노패턴의 집적도 향상
최홍균(Hong Kyoon Choi) 한국고분자학회 2020 폴리머 Vol.44 No.2
블록공중합체의 자기조립 공정을 통한 나노패턴의 제조 기술은 기존 광리소그라피 방법의 집적도 한계를 극복할 차세대 리소그라피 기술로 각광받고 있다. 하지만, 구성 고분자간 상분리 힘의 제한으로 인해 블록공중합체를 이용한 나노패턴 역시 도달할 수 있는 집적도의 물리적 한계가 존재한다. 본 연구에서는 선택적 팽윤과 식각공정을 통해 기존 블록공중합체 패턴의 집적도를 두 배로 향상시킬 수 있는 방법을 제시하였다. 제시된 방법을 사용하여 자연 주기가 38 nm인 블록공중합체를 주기 19 nm, 선폭 7 nm의 집적도가 향상된 선형패턴을 제조할 수 있음을 실험적으로 보였다. 본 연구를 통해 차세대 리소그라피 방법으로의 블록공중합체의 활용 가능성을 더욱 확고히 할 수 있을 것으로 기대된다. The nanolithography through the self-assembly process of the block copolymer has been spotlighted as the next generation lithography technology that can overcome the resolution limit of the conventional photolithography method. However, due to the limitation of the phase separation force between two blocks, there is a physical limitation of pattern resolution that can reach using the block copolymer. In this study, a simple process using selective swelling and etching is proposed to double the density of block copolymer patterns. It is demonstrated that the block copolymer with natural periodicity 38 nm, is able to produce line patterns with a period of 19 nm and a line width of 7 nm through the proposed method. We believe that this study can expand the possibility of block copolymer nanolithography for use in next generation lithography technology.