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UV-Enhanced Acetone Gas Sensing of Co3O4-Decorated ZnS Nanorod Gas Sensors
이종무,박성훈,선건주,김수현,이상민 대한금속·재료학회 2015 ELECTRONIC MATERIALS LETTERS Vol.11 No.4
Co3O4-decorated ZnS nanorods were synthesized by the thermal evaporation of ZnS powders followed by a sol-gel process for Co3O4-decoration. The acetone gas sensing properties of multiple-networked pristine and Co3O4- decorated ZnS nanorod sensors were examined. The diameters of the Co3O4 nanoparticles ranged from 4 to 20 nm. The multiple networked pristine ZnS nanorods and Co3O4- decorated ZnS nanorod sensors showed responses of 156 - 364% and 198 - 1,650% to 10 - 500 ppm of acetone at room temperature under UV illumination at 2.2 mW/cm2, respectively. The response and recovery times of the ZnS nanorod sensor at 500 ppm of acetone was reduced from 52 s to 26 s and from 192 s to 110 s, respectively, by Co3O4-decoration. The responses of the sensors exhibited strong dependence on the UV illumination intensity. The responses of the pristine ZnS nanorod and Co3O4-decorated ZnS nanorod sensors to 500 ppm of acetone at room temperature increased from 112 to 364% and from 132 to 1650%, respectively. This paper discusses the underlying mechanisms of the enhanced response of the ZnS nanorod sensor to acetone gas by Co3O4- decoration and UV irradiation.
이종무,임종민,박웅,Lee, Chong-Mu,Lim, Jong-Min,Park, Woong 한국재료학회 2001 한국재료학회지 Vol.11 No.5
TiN barrier 막 위에 metal organic chemical vapor deposition (MOCVD)법으로 Cu막을 증착함에 있어 TiN막 표면을 먼저 세정처리하지 않고 바로 Cu막을 증착하려하면 Cu의 핵생성이 어렵고, 그 결과 연속된 Cu막이 형성되지 못한다. 본 연구에서는 SEM, AES, AFM 등의 분석방법을 사용하여 TiN 막 표면에 대한 플라즈마 전처리 세정이 Cu막의 핵생성에 미치는 효과에 관하여 조사하였다. Gu의 전처리 세정방법으로는 direct플라즈마 방식이 원거리 플라즈마 방식보다 훨씬 더 효과적이다. 또한 수소플라즈마 전처리 시 rf-power와 플라즈마 조사시간이 증가함에 따라 세정효과는 더 증대된다. 플라즈마 전처리가 Cu의 핵생성을 고양시키는 원리는 다음과 같다. 플라즈마 내의 수소이온이 TiN과 반응하여 $NH_3$가 됨으로서 질소 성분이 제거되어 TiN이 Ti로 환원된다. Cu는 TiN기판보다는 Ti기판상에서 핵생성이 더 잘 되므로 플라즈마 전처리는 Cu의 핵생성을 돕는 효과를 가져온다. It is difficult to obtain high Cu nucleation density and continuous Cu films in Cu-MOCVD without cleaning the TiN substrate prior to Cu deposition. In this study effects of plasma precleaning on the Cu nucleation density were investigated using SEM, XPS, AES, AFM analyses. Direct plasma pretreatment is much more effective than remote plasma pretreatment in enhancing Cu nucleation. Cleaning effects are enhanced with increasing the rf-power and the plasma exposure time in hydrogen plasma pretreatment. The mechanism through which Cu nucleation is enhanced by plasma pretreatment is as follows: Hydrogen ion\ulcorner in the hydrogen plasma react with TiN to form Ti and $NH_3$ Cu nucleation is easier on the Ti substrate than TiN substrate.
반경험적 포텐셜에 의한 $C_{24}와 C_{60}$의 구조 및 에너지에 관한 시뮬레이션
이종무 한국결정학회 1991 韓國結晶學會誌 Vol.2 No.1
반경험적인 Tersoff 포텐셜을 사용한 lattice statics 시뮬레이션 테크닉에 의하여 C24와 C60 fullerenes의 구조와 에너지를 구하였다. 그 결과는 ab initio 계산 결과와 잘 일치 하였다. The geometries and energyies of C24 and C60 tullerenes have been calculated by the lattice statics simplation technique based on a semiempirical Tersoff Potential. The simulation results results agree well with ab initio calculations.
Vertical Coupling of Polymeric Double-Layered Waveguides Using a Stepped MMI Coupler
이종무,안준태,주정진,DooHeeCho,이명현,KyoungHonKim 한국전자통신연구원 2003 ETRI Journal Vol.25 No.2
We designed a multimode interference (MMI) coupler to use in vertical coupling of double layered polymeric waveguides and analyzed the coupling characteristics by comparing our experimental and simulation results. We found that our proposed new structure, a stepped MMI coupler, is effective in vertical coupling between waveguide layers with a short length of MMI and has a high tolerance for the variation in the structure of an MMI coupler that can be induced as errors in the fabrication process.