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수소 환원기체와 (hfac)Cu(3,3-dimethyl-1-butene) 증착원을 이용한 Pulsed MOCVD로 Cu seed layer 증착 특성에 미치는 영향에 관한 연구
박재범,이진형,이재갑,Park Jaebum,Lee Jinhyung,Lee Jaegab 한국재료학회 2004 한국재료학회지 Vol.14 No.9
Pulsed metalorganic chemical vapor deposition (MOCVD) of conformal copper seed layers, for the electrodeposition Cu films, has been achieved by an alternating supply of a Cu(I) source and $H_2$ reactant at the deposition temperatures from 50 to $100^{\circ}C$. The Cu thickness increased proportionally to the number of cycles, and the growth rate was in the range from 3.5 to $8.2{\AA}/cycle$, showing the ability to control the nano-scale thickness. As-deposited films show highly smooth surfaces even for films thicker than 100 nm. In addition about a $90\%$ step coverage was obtained inside trenches, with an aspect ratio greater than 30:1. $H_2$, introduced as a reactant gas, can play an active role in achieving highly conformal coating, with increased grain sizes.
박재범,하종현,최규환,배정목,김호영 대한기계학회 2019 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.33 No.4
EWOD (electrowetting on dielectric) is a viable scheme to drive optofluidic devices that utilize the liquid interface as a refractive surface. Although AC (alternating current) voltage is often applied to an electrode in EWOD devices to improve electrical characteristics, it may cause oscillations of liquid interfaces which can be detrimental to the system's performance as an optical device. Here we experimentally identify the origin of the interfacial oscillations of polymeric electrolyte solutions by observing the dynamic responses of contact lines as a function of the AC frequency. Penetration of small charged matters into the dielectric film of the opposite polarity is shown to induce the voltage relaxation that leads to deterioration of electrowetting performance. Measuring the relaxation time scale which is different for each polarity allows us to find the critical AC frequency that ensures stable interface control.
박재범,염만오 한국공작기계학회 2002 한국공작기계학회 춘계학술대회논문집 Vol.2002 No.-
Pneumatic system has been mainly used as main equipment for actuation and control of compressed air force in manufacturing industry. pneumatic circuit for the most part is used in Meter-Out circuit. Meter-Out circuit method is Flow Control Valve to fit in exhaust part of cylinder port. In the reverse, Meter-In circuit is Flow Control Valve to fit in input part of cylinder port. This study examines the dynamic characteristics comparison of Meter-In and Meter-Out Circuits in the pneumatic circuits. The results of the experimental research are obtained to the followings: ⅰ) System Response is Meter-In Circuit Circuit more than Meter-Out one before cushion zone. ⅱ) we conjectured that the collision of piston and head cover is ease to collide Meter-In Circuit more than Meter-Out one at the stroke end part.
운동파이론 기반 지형기후학적 순간단위도를 이용한 도시유역 유출 분석
박재범,강두기,신현석 한국방재학회 2013 한국방재학회논문집 Vol.13 No.2
Although urban area is composed of street, pipes and channels, hydraulic elements is included by hydraulic routing at downstream subcatchment in urban stormwater model but the hydraulic elements is ignored and frequently greatly simplified at upstream headwater subcatchment. In this study, we construct a UGMcIUH(Urban Grid based geoMorpho-Climatic Instantaneous Unit Hydrograph), which defines the IUH as the probability density function of the travel time including hydraulic elements in a urban area and evaluate the application for Onchun River. Flow paths are extracted from a spatially processed digital elevation model that incorporates hillslopes, pipes and channels, and travel times are computed in each grid using the average wave celerity from kinematic wave theory. Hydraulic elements in urban catchments has a significant role in determining the travel times and hydrologic response of the watershed. 도시유역은 거리, 관망, 하천 등으로 구성되어 있지만 우수유출모형에서 하류 소유역은 하도추적을 통해 관망, 하천과 같은수리학적 요소를 고려하고 있으나 상류 수원 소유역은 수리학적 요소를 고려하지 않고 단순하게 모의하고 있다. 본 연구에서는도시유역내 수리학적 요소를 고려한 유하시간의 확률밀도함수로 순간단위도를 정의하는 UGMcIUH(Urban Grid geoMorpho- Climatic Instantaneous Unit Hydrograph)모형을 구축하고 온천천유역을 대상으로 적용성을 검토하였다. 사면, 거리, 관망, 하천등을 통합한 지형표고모델을 이용하여 흐름경로를 산정하였고 홍수파(Kinematic Wave)이론을 적용하여 산정한 평균 홍수파의유속을 이용하여 격자별 유하시간을 산정하였다. 도시유역내 수리요소는 유하시간과 수문학적응답특성 산정시 큰 영향을 미치는것으로 분석되었다.