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DFB 레이저 다이오드를 위한 홀로그래픽 시스템을 이용한 회절격자 제작
강명구,오환술 대한전자공학회 1996 전자공학회논문지-A Vol.33 No.6
Periodic gratings for 1.55$\mu$m distributed feedback laser diode (DFB LD) have been fabricated by a holographic interference exposure system using an etalon stabilized Ar ion laser. We obtain a good development condition at developer concentration of 65% and obtain etching rate of 1000$\AA$/min at 20.deg. C by the mixed solution HBr:HNO$_{3}$:H$_{2}$O(1:1:10 in volume ratio). We obtain good first order grating with period of 2400${\AA}[\pm}2{\AA}$ at etching time of 45 sec from grating period and diffraction efficiency measurement, and SEM observation of grating fabricated on InP substrate.
중국의 일대일로 구상과 유라시아 인프라 지원을 위한 금융협력
강명구 서울대학교 러시아연구소 2019 러시아연구 Vol.29 No.2
The Eurasia region lacks financial resources which make it difficult for this region to build its own transportation and logistics infrastructure. Therefore, it is promoting infrastructure construction through the financial support of the Multilateral Development Bank and global IBs. The fundings for the construction of transportation and logistics infrastructure in the Eurasian region includes MDBs such as EBRD, AIIB, EDB and Silk Road Fund supports loans, co-financing, parallel financing, syndicated loans and loans in the construction of transportation and logistics infrastructure in Eurasia. China established AIIB in January 2016, in cooperation with multilateral development banks to provide funds for the construction of transportation and logistics infrastructure to the countries. Korea needs to establish a foundation for financing the development of the Eurasian region infrastructure by establishing a two-financing platform with MDB and a specialized fund such as China’s Silk Road Fund. To this end, China established AIIB, a leading infrastructure investment bank to achieve its One Belt-One Road goal, and created a silk road fund to support infrastructure construction in Eurasia. Korea should seek ways to participate in China’s One Belt-One Road construction. Korea is highly likely to pursue AIIB projects centering on key projects carried out by countries in Eurasia, so it is necessary to establish a customized entry strategy. To this end, Korea needs to establish a foundation for financing the development of the Eurasian region infrastructure by establishing a two-financing platform with MDB and a specialized fund such as China’s Silk Road Fund. 유라시아지역은 재정 여력이 부족하여 독자적으로 교통‧물류 인프라 건설이 어려워 다자개발은행과 글로벌 IB들의 금융지원을 통해 인프라 건설을 지속하고 있다. 유라시아지역의 교통‧물류 인프라 건설에 자금을 EBRD, AIIB, EDB 등 MDB와 유라시아 안정화 및 개발 펀드(EFSD), 주)실크로드 펀드 등을 통해 지원하고 있다. 지원 방법으로는 차관, 협조융자(Co financing), 평행융자(Parallel Financing), 신디케이트론(syndicate loan), 대출(loan) 등의 방법을 사용하고 있다. 중국은 인프라투자은행인 AIIB를 설립하였고, 유라시아지역의 인프라 건설을 지원할 실크로드 펀드를 조성하였다. 중국은 AIIB를 통해 중국-중앙아시아·러시아-유럽으로 이어지는 교통‧물류 인프라를 구축하는 일대일로를 추진하고 있다. 한국은 중국의 일대일로 건설에 참여하는 방안을 모색해야 한다. 한국은 유라시아지역의 국가별로 추진되는 중점 사업을 중심으로 AIIB, MDB와 협력을 강화하여 유라시아지역의 인프라 건설에 참여하거나, AIIB가 추진하는 유라시아지역 인프라 사업에 EDCF를 연계하여 참여해야 한다. 이를 위해 한국 금융기관은 MDB와 공동으로 투융자 플랫폼을 조성하고 중국의 실크로드 펀드와 같은 투자 펀드를 조성하여 유라시아지역의 인프라 개발에 자금을 지원해야 한다.
유도결합 플라즈마에 의해 식각된 PZT 박막의 식각 Damage 개선
강명구,김경태,김창일 한국전기전자재료학회 2001 전기전자재료학회논문지 Vol.14 No.7
In this work, the recovery of etching damage in the etched PZT thin film with $O_2$ annealing has been studied. The PZT thin films were etched as a function of Cl$_2$/Ar and additive CF$_4$ into Cl$_2$(80%) /Ar(20%). the etch rates of PZT thin films were 1600$\AA$/min at Cl$_2$(80%)/Ar(20%) and 1970 $\AA$/min at 30% additive Cf$_4$ into Cl$_2$(80%)/Ar(20%). In order to recover the characteristics of etched PZT thin films, the etched PZT thin films were annealed in $O_2$ atmosphere at various temperatures. From the hysteresis curves, ferroelectrical properties are improved by $O_2$ annealing process. The improvement of ferroelectric behavior is consistent with the increase of the (100) and (200) PZT phase revealed by x-ray diffraction (XRD). From x-ray photoelectron spectroscopy (XPS) analysis, intensities of Pb-O, Zr-O and Ti-O peak increase and the chemical residue peak is reduced by $O_2$ annealing. From the atomic force microscopy (AFM) images. it shows that the surface morphology of re-annealed PZT thin films after etching is improved.