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RISS 인기검색어
- 검색키워드
- 주제어 : Plasma Ignition (검색결과 2 건)
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In-Situ Monitoring of Radical Generation in Plasma Ignition Step of Photoresist Strip Process
플라즈마의 이온과 라디칼의 형성은 전자 온도와 전자 밀도로 결정되는 플라즈마 특성에 의해 결정된다. 플라즈마의 특성을 확인하기 위해, 침습적 방법 (랭뮤어 프로브, 컷오프 프로브)와 비침습적 방법 (광 방출 분광계)가 사용되고 있다. 그러나 침습적 방법은 탐침의 오염에 의한 한계가 존재하고, 비침습적 방법은 고압 조건에서의 복잡한 계산에 의한 한계가 존재한다. 이 연구에서는 광학 플라즈마 모니터링 시스템이라는 센서를 통해 플라즈마의 점화 과정과 플라즈마 특성이 연결되었다. 전자 온도와 전자 밀도의 연관성은 플라즈마가 점화 후 안정화되는 데에 필요한 시간과, 안정화 이후의 전체 광 방출 강도에 의해 결정되었다. 추가적으로, 플라즈마의 특성과 플라즈마 내의 라디칼 생성을 연결하기 위해 포토레지스트 스트립 공정이 수행되었다. 결과적으로, 플라즈마의 특성이 공정 결과에 미치는 영향이 포토레지스트 스트립 정도를 통해 확인되었다. The formation of ions and radicals is determined by plasma parameters defined in terms of electron temperature and electron density. To characterize plasma, invasive methods (Langmuir probe and cut-off probe) and noninvasive methods (optical emission spectroscopy) are used. Invasive approaches, conversely, exhibit limits owing to tip corrosion, while noninvasive methods exhibit limitations due to difficult calculations under high-pressure settings. The plasma ignition mechanism and plasma characteristics were connected in this investigation utilizing an optical plasma monitoring system sensor. The correlation between electron temperature and electron density was confirmed by determining the time required for the plasma to stabilize after ignition and the total light intensity emitted after stabilization. In addition, a photoresist strip process was used to link plasma characteristics with variations in plasma radical production. Then, the influence of the plasma characteristics on the process outcome was validated using the photoresist strip rate.
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Hydrodynamic Instabilities in High-energy-Density Physics
Angulo, Adrianna M University of Michigan ProQuest Dissertations & Th 2023 해외박사(DDOD)
소속기관이 구독 중이 아닌 경우 오후 4시부터 익일 오전 9시까지 원문보기가 가능합니다.
The most proficient star-forming galaxies involve galactic filaments that supply gas to the center of the galactic halo. These galactic filaments are susceptible to the Kelvin-Helmholtz (KH) instability, which may potentially disrupt the filaments before they can penetrate deeply within the galaxy. In inertial confinement fusion, the Rayleigh Taylor (RT) instability is known to induce mixing or a turbulent transition, which in turn cools the hot spot and hinders ignition. The fine-scale features of the RT instability, which are difficult to image in HED systems, may help determine if the system is mixing or is transitioning to turbulence. Previous experiments conducted at the National Ignition Facility (NIF) utilized diagnostics with insufficient spatial and temporal resolution to diagnose the dynamics that occur along the RT structure. The Crystal Backlighter Imager (CBI) was developed to produce a high-resolution, x-ray radiograph capable of resolving the fine-scale features expected in these RT unstable systems. Although the resolution of the system has improved twofold, target constraints have prevented sufficient experimental resolution to be achieved.This dissertation presents two HED experiments and observe two separate hydrodynamic instabilities. The first experiment presents how the experimental resolution of a system was improved by changing key parameters in the diagnostic and the target. A series of radiation hydrodynamic simulations were performed using the LLNL code, HYDRA to inform target and diagnostic designs for multiple shot days. By implementing interface spectral analysis and density variation analysis on the simulations and experimental data, I diagnose the perturbation growth to determine if the system meets the minimum requirement for the transition to turbulence. The second experiment describes a scaled, high-energy-density laboratory experiment on the Omega-EP laser that emulates and studies the cosmological process of filament supplying matter to the galactic halo. I use a radiography diagnostic to observe the KH instability on the filament boundary and tune hydrodynamic simulations performed using CRASH. From the data and tuned simulations, I determine the effects of the KH instability on filament and the conditions required for filament disruption.
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