Understanding of RF Impedance Matching System Using VI-Probe

이지하,박현근,이정수,홍상진 한국반도체디스플레이기술학회 2020 반도체디스플레이기술학회지 Vol.19 No.3

The demand for stable plasma has been on the rise because of the increased delivery power amount in the chamber for improving productivity, and fast and accurate plasma impedance matching become a crucial performance measure for radio frequency (RF) power system in semiconductor manufacturing equipment. In this paper, the overall impedance matching was understood, and voltage and current values were extracted with voltage - current (VI) probe to measure plasma impedance in real-time. Actual matching data were analyzed to derive calibration coefficient for V and I measurements to understand the characteristics of VI probe, and we demonstrated the tendency of RF impedance matching according to changes in load impedance. This preliminary empirical research can contribute to fast RF matching as well as advanced equipment control for the next level of detailed investigation on embedded system based-RF matching controller.

Impedance Matching Based Control for the Resonance Damping of Microgrids with Multiple Grid Connected Converters

Shulong Tan,Hua Geng,Geng Yang 전력전자학회 2016 JOURNAL OF POWER ELECTRONICS Vol.16 No.6

This paper presents an impedance-matching-based control scheme for the harmonic resonance damping of multiple grid-connected-converters (GCCs) with LCL filters. As indicated in this paper, harmonic resonance occurs if a GCC possesses an output impedance that is not matched with the rest of the network in some specific frequency bands. It is also revealed that the resonance frequency is associated with the number of GCCs, the grid impedance and even the capacitive loads. By controlling the grid-side current instead of the converter-side current, the critical LCL filter is restricted as an internal component. Thus, the closed-loop output impedance of the GCC within the filter can be configured. The proposed scheme actively regulates the output impedance of the GCC to match the impedance of the external network, based on the detected resonance frequency. As a result, the resonance risk of multiple GCCs can be avoided, which is beneficial for the plug-and-play property of the GCCs in microgrids. Simulation and experimental results validate the effectiveness of the proposed method.

Impedance Matching Based Control for the Resonance Damping of Microgrids with Multiple Grid Connected Converters

Tan, Shulong,Geng, Hua,Yang, Geng The Korean Institute of Power Electronics 2016 JOURNAL OF POWER ELECTRONICS Vol.16 No.6

This paper presents an impedance-matching-based control scheme for the harmonic resonance damping of multiple grid-connected-converters (GCCs) with LCL filters. As indicated in this paper, harmonic resonance occurs if a GCC possesses an output impedance that is not matched with the rest of the network in some specific frequency bands. It is also revealed that the resonance frequency is associated with the number of GCCs, the grid impedance and even the capacitive loads. By controlling the grid-side current instead of the converter-side current, the critical LCL filter is restricted as an internal component. Thus, the closed-loop output impedance of the GCC within the filter can be configured. The proposed scheme actively regulates the output impedance of the GCC to match the impedance of the external network, based on the detected resonance frequency. As a result, the resonance risk of multiple GCCs can be avoided, which is beneficial for the plug-and-play property of the GCCs in microgrids. Simulation and experimental results validate the effectiveness of the proposed method.

Impedance-Matching Network Box of the RF Power Amplifier for the RFT-30 Cyclotron

Ho Seung Song,Young Bae Kong,Eun Je Lee,Min Goo Hur 한국물리학회 2018 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.73 No.8

RFT-30 is a 30-MeV prototype cyclotron for radioactive isotope (RI) production, neutron gen- eration, and fundamental research. Charged particles are accelerated by using a radio-frequency (RF) cavity and a high-power RF signal transmitted by an RF amplifier. This paper describes the impedance-matching network box of an RF power amplifier for an RFT-30 cyclotron. The impedance-matching process is an essential procedure for maximizing the RF amplifier's perfor- mance with respect to eciency and stability. In a dummy load test, the impedance value remains almost constant. However, in terms of beam loading, the impedance varies because of the vac- uum and water/air cooling. These effects make the resonance conditions different; thus, the RF amplifier's operation becomes unstable. In this work, an impedance-matching network box with a stub-line inductor, which is applied to the cathode of the power amplifier (PA) tube, is proposed. A calculation for the impedance-matching network box was performed and then simulated through optimization processes. In addition, the stub-line inductor measurement and the RF performance when using this matching network box are described.

네거티브 임피던스 변환기에 기반을 둔 저항성 V 다이폴 안테나의 논 포스터 임피던스 매칭

양혜민(Hyemin Yang),김강욱(Kangwook Kim) 한국전자파학회 2015 한국전자파학회논문지 Vol.26 No.7

네거티브 임피던스 변환기를 이용한 전기적 소형 안테나의 논 포스터 임피던스 매칭 방법을 제안한다. 사용한 안테나는 저항성 V 다이폴 안테나로써, 이 안테나는 급전점에서 매우 큰 입력 리액턴스를 가지기 때문에 반사손실이 매우 크다. 급전점에 장착하는 논 포스터 매칭 회로는 두 단의 네거티브 임피던스 변환기와 단 사이의 추가 커패시턴스로 이루어진다. 네거티브 임피던스 변환기는 연산 증폭기와 저항 소자를 사용하여 구현한다. 실제 사용하는 연산 증폭기의 유한 오픈 루프 이득을 고려한 임피던스를 분석하고, 설계에 적용하였다. 안테나 입력 임피던스를 포함한 전체 매칭 회로에 대해 안정성 검사를 수행하였고, 설계된 매칭 회로는 제작되어 실험으로 그 성능을 검증하였다. 임피던스 매칭 후의 저항성 V 다이폴 안테나의 입력 임피던스를 측정한 결과, 제안한 논 포스터 매칭 회로가 효과적으로 안테나의 입력 리액턴스를 줄이는 것을 확인하였다. Negative impedance converter(NIC)-based non-Foster impedance matching is proposed for an electrically small antenna. The antenna considered in this work is a resistively loaded vee dipole(RVD) antenna, which has considerable reflection at the feed point because of its large negative input reactance. The non-Foster matching circuit built near the feed point consists of two-stage NIC circuit and a capacitor connected between the stages. The NIC is realized by using operational amplifiers(op-amps) and resistors. The circuit is designed by considering of the input impedance according to the finite open-loop gain of the practical NICs. The stability test of the impedance-matched RVD antenna is performed. The non- Foster matching circuit is implemented with the RVD antenna. The measured impedance demonstrates that the proposed non-Foster matching circuit effectively reduces the input reactance of the RVD antenna.

MATLAB/Simulink Pulse-echo Ultrasound System Simulator with Electrical Impedance Matching

Shin, Sangmin,Kim, Taehoon,Kim, Suhwan The Institute of Electronics and Information Engin 2018 Journal of semiconductor technology and science Vol.18 No.3

In an ultrasound system, impedance matching between a transducer and an electronics is one of the crucial factors to determine the performance. An electronics must operate with different transducers, which have their characteristic impulse responses and widely varying impedances so that impedance matching is difficult. Also, the parasitic element is another factor that impedes the impedance matching. In this paper, using MATLAB and Simulink, we simulate a pulse-echo ultrasound system and the matching network which is required to allow the use of transducers with widely differing impedances. Our simulation includes models of the high-voltage transmitter, the transmission interface, the acoustic subsystem which includes wave propagation and reflection, the receiving interface, and the front-end receiver, as well as a lumped model of the matching interface which can easily be adjusted by the designer. The simulated pulse-echo behavior was in close agreement with experimental measurements.

MATLAB/Simulink Pulse-echo Ultrasound System Simulator with Electrical Impedance Matching

Sangmin Shin,Taehoon Kim,Suhwan Kim 대한전자공학회 2018 Journal of semiconductor technology and science Vol.18 No.3

In an ultrasound system, impedance matching between a transducer and an electronics is one of the crucial factors to determine the performance. An electronics must operate with different transducers, which have their characteristic impulse responses and widely varying impedances so that impedance matching is difficult. Also, the parasitic element is another factor that impedes the impedance matching. In this paper, using MATLAB and Simulink, we simulate a pulse-echo ultrasound system and the matching network which is required to allow the use of transducers with widely differing impedances. Our simulation includes models of the high-voltage transmitter, the transmission interface, the acoustic subsystem which includes wave propagation and reflection, the receiving interface, and the front-end receiver, as well as a lumped model of the matching interface which can easily be adjusted by the designer. The simulated pulse-echo behavior was in close agreement with experimental measurements.

임피던스 매칭과 필드 매칭을 이용한 20[GHz] Microstrip-to-CPW Transition 설계

윤재광,김동호,박종대 明知大學校 産業技術硏究所 2009 産業技術硏究所論文集 Vol.28 No.-

A compact design of 20[GHz] Microstrip-to-CPW(coplanar waveguide) transition using Impedance matching and field matching is proposed in this paper. The transition is comprise of CBCPW(conductor backed coplanar waveguide), which is connected to Microstrip and CPW for reducing reflection loss by field and impedance mismatching‘ In this paper, varying Ground shapes and via positions are offered for field and impedance matching. Because simulation and measurement results show broadband characteristic, this transition can be very useful in various UWB component MMICs and MICs.

Impedance Matching Techniques of Multi-layered PZT Ceramics for Piezoelectric Energy Harvesters

Kyung Ho Cho,Dong‑Jin Shin,Chang Soo Lee,Jung‑Hyuk Koh 대한금속·재료학회 2019 ELECTRONIC MATERIALS LETTERS Vol.15 No.4

In this research, the possibility of passive damping system based on the piezoelectric energy harvesting has been proposedand tested. To apply passive damper system, piezoelectric ceramics were stacked, and impedance was matched. Piezoelectricenergy harvesters were employed due to their excellent piezoelectric and robust properties. Especially, multilayered (Pb,Zr)TiO3 piezoelectric ceramic have high piezoelectric charge coefficient d33and piezoelectric voltage coefficient g33for actuatorand harvester applications, respectively. Multilayered (Pb,Zr)TiO3 piezoelectric ceramics can generate comparatively highcurrent level compared with single layered piezoelectric ceramics due to its parallel connected capacitors. In energy harvesterapplications, multilayered (Pb,Zr)TiO3 piezoelectric ceramics have a role of voltage source with capacitive impedance. Dueto considerable impedance in voltage sources, the role of impedance matching between the source and output terminal ismore critical. By employing the piezoelectric energy harvesting system for the passive damper, output energy of 11 μJ/cm3was obtained at the 100 μF capacitors. Therefore, impedance matching technologies were intensively investigated to obtainmaximum output energy for storing capacitors.

400 kHz 페라이트 유도 결합 플라즈마를 위한 임피던스 매칭 네트워크

조성원,방진영,이영광,정진욱,Cho, Sung-Won,Bang, Jin-Young,Lee, Young-Kwang,Chung, Chin-Wook 한국반도체디스플레이기술학회 2007 반도체디스플레이기술학회지 Vol.6 No.2

Low frequency (400 kHz) Ferrite ICP has been proposed for large area processing. Because the coupling coefficient is close to 1, the transformer matching can be adapted to Ferrite ICP. The transformer matching system is simple. In this paper the new matching system by controlling the turns of transformer using relays is proposed for impedance matching. We developed a simple matching system and characterized it when the turns were changed. It was observed that the 2-channel relay is available for transformer matching.