복합적인 레지스트 패턴 붕괴현장의 역학적 해석

이형주,박준택,안일신,김옥근,오혜근 한양대학교 이학기술연구소 2003 이학기술연구지 Vol.6 No.-

패턴의 선폭이 100nm이하로 작아짐에 따라 패턴이 부러지고, 휘고, 떨어져 나가는 현상이 발생하는데 이러한 현상을 패턴 붕괴 현상이라고 하며, 반도체 생산과 수율에 많은 영향을 미친다. 패턴 붕괴 현상은 리소그래피 과정 중 현상 후 세척액을 건조하는 과정에서 주로 발생하며 세척액의 표면장력에 의한 모세관 현상이 주된 원인으로 알려져 있다. 패턴 붕괴 현상을 시뮬레이션하기 위하여 패턴이 세척액에 의해서 균일한 압력을 받을 때와 집중 압력을 받을 때의 역학적 모델을 세우기 각각의 모델을 통하여 선폭과 패턴간의 거리에 따른 임계 높이/선폭비 (aspect ratio) 를 계산하여 실제 실험 결과와 일치하는 모델을 선정하였다. 또한 패턴 내부에 생기는 stress 에 의한 부러짐 현상과 패턴 과 레지스트 패턴 하부 층 사이의 접착력 부족으로 발생하는 떨어짐 현상을 해석하였다. High aspect ratio resist patterns with dimensions below 100 nm often bend, break or tear. These phenomena are generically called "resist pattern collapse". Pattern collapse is a very serious problem in fine patterning of less than 100 nm critical dimension (CD), so that it decreases the yield. In order to mechanically analyze this phenomenon and create its simulator, two models have been made and compared. In this paper, various approaches with various analyses are made to understand pattern collapse. Also, the critical aspect ratio for 100 nm node, that determines whether pattern collapse happens or not, can be calculated with these approaches. Finally, tear type caused by insufficiency of adhesion strength between the substrate and the resist is analyzed with a point of view of the surface free energy.

專門大學 體育舞踊科 敎育課程의 開發硏究

李鐵煥,金泰亨,李任仙,姜信和 진주여자전문대학 1986 論文集 Vol.8 No.-

STS 304 강의 저주기 및 고주기 피로에 있어 초기 마르텐사이트의 영향

이현승,신형주,김송희 江原大學校 産業技術硏究所 2001 産業技術硏究 Vol.21 No.B

Zero to tension fatigue tests and strain controlled fatigue tests were carried out to find how initial strain induced martensite, α' affects low and high cycle fatigue behavior and fatigue crack growth mechanisms. Microscopic study and phase analysis were carried out with TEM, SEM, EDAX, Optical Microscope, Ferriscope, and X-ray diffractometry. The amount of Initial α' was controlled from 0% to 33% by controlling the temperatures for cold working and heat treatment. Lower contents of initial α' showed higher fatigue resistance in low cycle fatigue but lower fatigue resistance in high cycle fatigue because it is ascribed to the more transformation of α' martensite during low cycle fatigue and higher ductility. In high cycle fatigue, fatigue life is attributed to the strength and phase transformation of austenite into α' during fatigue was negligible. γ boundary, γ/twin boundary, and γ/α' boundary were found to be the preferred site of fatigue crack initiation.

건축형태의 미학적 인식과 해석에 관한 연구

이청웅,강형구,임신원 朝鮮大學校 建設技術硏究所 2001 建設技術硏究 Vol.21 No.1

This study is to analyze architectural beauty in regard to architectural form and visual beauty, and to analyze the hypothesis that, when architectural beauty is classified into formative beauty and shape beauty, shape beauty of building mass as a cubic shape, can acquire a unique beautiful duality of the principle figure when it takes shape of the principle figure. The result of this study is as follows. When the observation of the architectural beauty is not limited to the architectural form, but extended to outward and inclusive esthetic category, it is concluded that various artistic element of architecture is not reflected by the architectural shape only, so that a new genre of architectural esthetics is essentially to be created to include various esthetic categories of architectural beauty, and that the architectural beauty focusing at visual, shape and formative theory, has to be reanalyzed as a fundamental and inclusive category. The history of the western architecture shows the meaning of building formation in decorative beauty and shape beauty. The figurative shape eliminates physical elements, and also eliminates decorativeness of painting art and carving-modeling art, so that the building mass is treated as a cubic shape, and a shape beauty of the architectural form is obtained by analyzing figurative shape. The basic figure, a geometric form containing naturalness, historical meanings, and architectural meanings, has its unique beautiful quality showing figurative and geometric shape beauty, and this beautiful quality might be called a perfection that approaches esthetic perfectness. The perfection of the basic figure supports shape beauty of the building mass as a cubic form.

하악지시상분할절단술에서 자가수혈의 이용시 혈액학적변화에 관한 연구

김신헌,윤형기,박진혁,김우형,이희철,Park, Jin-Bae 인제대학교 백병원 2002 仁濟醫學 Vol.23 No.4

Objective : s we has known risk of acquired immunodeficiency disease due to trans-fusion, we recognize the importance of autologous blood transfusion. Since 1990, the use of autologous blood transfusion was increased in Korea. The use of autologous blood transfusion in orthognathic surgery is common. The purpose of this research is to determine, in patients undergoing sagittal split ramus osteotomy, clinical predictive cri??eria for preoperative autologous blood donation and to propose guidelines to increase the efficiency of it. Methods and Material : This article reviewed one hundred two patient who had received bilateral sagittal split ramus osteotomy with autologous blood donation in oral and maxillofacial surgery, Paik hospital, Pusan, from January 1995 to December 1999. Hemoglobin & hematocrit change was evaluated pre- and postoperatively, and erythropoiesis, relationship between procedure time and blood loss was evaluated. Results : 1. Mean age of male patient was 23.1 years and that of female patient 22.5 years. Mean body weight was 73.7㎏ in male and 49.4㎏ in female. 2. Preoperative autologous blood donation unit was mean 1.9 unit(1unit=320㎖), and transfused unit was mean 1.3 unit. 3. Three of 102 patients had positive reaction for hapatitis B virus, but no complication were occurred. 4. The interval from initial donation of autologous blood to surgery was 19 days, and from last donation to surgery was 11 days. 5. Mean hemoglobin levels in predonation period were 15.1 g/㎗ in male and 12.7g/㎗ in female. Hemoglobin and hamatocrit levels decreased by 1.0g/㎗ and 3.2% in male and 1.1g/㎗ and 3.3% in female, respectively, after collection of 1 unit of autologous blood, and decreased by 1.8 g/㎗ and 6.4% in male and 1.9 g/㎗ and 6.9% in female after collection of 2 units. 6. Preoperative erythropoiesis from first donation to surgery showed no statistically significant difference between male and female patients. 7. Estimated blood volume(EBV) ranged from 4,100㎖ to 5,800㎖ in male and from 2,600㎖ to 3,600㎖ in female. Mean estimated blood loss(EBL) was 640㎖, and up to 32% of EBV. 8. All 25 patients with more than 20% loss of EBV were trnasfused intraoperatively, and 18 of 24 patient with 16-20% loss, 16 of 30 patient with l1~15% loss, 7 of 20 patient with less than 10% loss were transfused. Transfusion requirement was increased parallel to EBV. Conclusion : It seems that the proper unit of autologous blood donation is 1.3 unit, and autologous blood transfusion is a safe method in elective surgery that predicted large blood loss. In the future, if transfused blood was controlled based on hypotensive anesthesia, preoperative hemoglobin and hemotocrit level, the proper level of autologous blood transfusion will be accomplished.

中風病辨證診斷標準에 의한 臨床的 硏究

任長信,文祥官,高昌男,權正男,曺基湖,金永錫,裵亨燮,李京燮 경희대학교 1997 慶熙醫學 Vol.13 No.3

Grafcet에 의한 간이 자동 창고 시스템 모델링 : retrieval system by Grafcet model

손신국,김용호,이광형 한국경영과학회 1989 한국경영과학회 학술대회논문집 Vol.- No.1

The Grafcet model is a tool which has been defined by a group of persons belonging to AFCET. Its goals are (1) to allow the description of any logical system and (2) to be understandable by a wide range of people of various specialties and carious levels of formation. But, until now, it cannot deal with ant queue which may be happened in a system to be modeled. In this paper, a queue modeling in the Grafcet model is introduced for handling the queues and also it is applied to a simple automatic storage / retrieval system to show its usefulness.

澱粉용액의 리오로지적 性質에 관한 硏究

卞裕亮,李神榮,曺亨勇 연세대학교 대학원 1981 延世論叢 Vol.18 No.1

The viscometric behavior of rice starch solution was studied with the capillary tube viscometer operated under various pleasures. Heated starch solution ranged from 3 to 9wt% were used as samples and flow constants in an equation r=(1/K)(gcτ- gcτy)n were determined by a non-linear least square method using the digital electronic computer. The value of flow behavior index n was found to be 1.2 in all samples. In the case of 3 and 5 wt% solutions, the values of yield stress could be overlooked, but the values of τy were relatively large and increased with the increase in concentration from 5 to 9 wt%. The temperatue dependence of flow consistency index K measured at 30~80℃ were expressed by Arrhenius equation. The values of activation energy were 3.5 to 10.2 kcal/mol.

정맥내 통증자가조절법을 이용한 Nalbuphine-Ketorolac과 Butorphanol-Ketorolac의 술후 진통효과 비교

윤석화,이원형,손수창,신용섭,김윤희,양신영 충남대학교 의과대학 의학연구소 2003 충남의대잡지 Vol.30 No.1

This study aimed to compare analgegic efficacy, satisfaction score and side effect of nalbuphine-ketorolac and butorphanol-ketorolac by using intravenous patient controlled analgesia(IV-PCA) for postoperative anlgesia following a gastrectomy for stomach cancer. Ninety patients who had undergone gastrectomy for stomach cancer under general anesthesia were randomly divided into two groups. Each group recieived nalbuphine 50mg with ketorolac 150mg(Group 1, n=45) and butorphanol 5mg with ketorolac 150mg(Group 2, n=45) by using IV-PCA during postoperative 48hrs. Assessments for pain with numerical rating scale(NRS), and side effects were evaluated at 2hr, 6hr, 12hr, 24hr, 36hr and 48hr after the operation. There were no significant difference in NRS for pain during rest, but Group 2 requested significantly greater amount of supplementary diclofenac during first 24 hours. Side effects were higher Group 1 in pruritus, nausea and vomiting and Group 2 in sedation, nausea and vomiting. This study suggests that adding ketorolac with intravenous nalbuphine or butrophanol in using an intravenous PCA can decrease analgesics requirement and improve analgesic property without the major morbidity like respiratory depression, but needs for the careful observation and treatment on the side effects like nausea. vomiting, pruritis and sedation...

GC 및 활성탄에 의한 알킬 치환 페놀류의 분자면적 추정

배선영,안형신,김건,이동선 서울여자대학교 자연과학연구소 1996 자연과학연구논문집 Vol.7 No.-

Activated carbons were prepared from leaves of Ginkgo biloba by activation process with zinc chloride after carbonization. The specific surface area of this activated carbon measured by BET surface analyzer was obtained as 469.8㎡/g. Adsorption of alkyl substituted phenols on activated carbon was determined using gas chromatography. It was found that molecular area could be estimated using Langmuir's isotherm, specific surface area, and Avogadro's number. Molecular areas for phenol, 2-ethyl phenol, 2,5-dimethyl phenol, 2-isopropyl phenol were 0.0288n㎡, 0.0796n㎡, 0.0384n㎡, and 0.1182n㎡, respectively. This estimation techniques are potentially useful to obtain molecular area for various compounds.