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고주희(Juhee Ko),이동혁(Donghyuk Lee),김석범(Seokbeom Kim),김광석(Kwangseok Kim),이정철(Jungchul Lee) 대한기계학회 2016 대한기계학회 춘추학술대회 Vol.2016 No.12
Since it demands extensive efforts to fabricate atomic force microscope (AFM) cantilevers with a sharp tip, it is necessary to develop a simple and cost-effective fabrication method. Recently, our group has employed replica molding and subsequent UV curing for hydrogels inside polydimethylsiloxane (PDMS) molds to make all-hydrogel AFM cantilevers where the PDMS tip mold was replicated from an anisotropically wet-etched silicon wafer. Although the PDMS tip mold was bi-axially compressed to vary the aspect ratio of the replicated hydrogel AFM tip, the achievable aspect ratio was limited below ~2.5. Here, we propose a new idea to use an electrochemically etched tungsten wire as a positive tip mold from which the negative PDMS mold can be directly replicated. To reproduce similar sharpness of the etched tungsten, a high speed comparator along with a feedback circuit was employed. With the PDMS tip mold replicated from the tungsten wire etched at 3 V in 3 M NaOH solution, the hydrogel tip radius of 50 nm was able to be attached to a tipless hydrogel cantilever.