http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
저 에너지 초소형 전자칼럼 리소그래피를 이용한 SiO₂ 박막의 Pattern 제작에 관한 연구
요시모토 다카토시(T. Yoshimoto),김호섭(H. S. Kim),김대욱(D. W. Kim),안승준(S. Ahn) 한국자기학회 2007 韓國磁氣學會誌 Vol.17 No.4
Electron beam lithography has been studied as a next-generation lithography technology instead of photo lithography for ULSI semiconductor devices. In this work, we have made a low-energy electron beam lithography system based on the microcolumn and investigated the dependence of the pattern thickness on the energies and dose concentration of the electron beam. We have also demonstrated the potential of low-energy lithography by achieving 100 ㎚-SiO₂ thin film patterning.
Advanced Microcolumn Operation for Low-Energy Electron-Beam Lithography
Y. C. Kim,D. W. Kim,H. S. Kim,H. W. Kim,S. J. Ahn,T. Yoshimoto 한국물리학회 2006 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.49 No.4
Microcolumns have been investigated and applied to low-energy electron-beam lithography. How- ever, when the beam energy is too low, it is di±cult to control the electron resist for nano-patterning. Considering the practical details adopted in a real lithographic process, it may be di±cult to adopt an electron beam whose beam energy is lower than ≫ a few 100 eV. In this work, the operation of an Einzel lens is modi.ed to increase the output beam energy while keeping the emitter voltage constant. Usually, a proper bias voltage (focusing voltage) is applied to the central electrode of the Einzel lens with the other two electrodes being grounded. By applying an additional poten- tial to the two outer electrodes, we can perform an additional function of controlling the output electron-beam's energy. Based on this operation mode, that is, the °oating mode operation, the de- pendence of the electron-beam diameter at the sample plane on the working distance or the °oating voltage is estimated. According to the simulation results, the °oating mode operation can provide a smaller beam diameter than the conventional accelerating or retarding mode operation with a higher electron-beam energy, which indicates that operation of an Einzel lens with this mode will oer improved results in electron-beam lithography.
Liu, Qiushi,Jung, Joohee,Somiya, Masaharu,Iijima, Masumi,Yoshimoto, Nobuo,Niimi, Tomoaki,Maturana, André,s D,Shin, Seol Hwa,Jeong, Seong-Yun,Choi, Eun Kyung,Kuroda, Shun’ichi Dove Medical Press 2015 INTERNATIONAL JOURNAL OF NANOMEDICINE Vol.10 No.-
<P>Bionanocapsules (BNCs) are hollow nanoparticles consisting of hepatitis B virus (HBV) envelope L proteins and have been shown to deliver drugs and genes specifically to human hepatic tissues by utilizing HBV-derived infection machinery. The complex of BNCs with liposomes (LPs), the BNC–LP complexes (a LP surrounded by BNCs in a rugged spherical form), could also become active targeting nanocarriers by the BNC function. In this study, under acidic conditions and high temperature, BNCs were found to fully fuse with LPs (smooth-surfaced spherical form), deploying L proteins with a membrane topology similar to that of BNCs (ie, virosomes displaying L proteins). Doxorubicin (DOX) was efficiently encapsulated via the remote loading method at 14.2%±1.0% of total lipid weight (mean ± SD, n=3), with a capsule size of 118.2±4.7 nm and a ζ-potential of −51.1±1.0 mV (mean ± SD, n=5). When mammalian cells were exposed to the virosomes, the virosomes showed strong cytotoxicity in human hepatic cells (target cells of BNCs), but not in human colon cancer cells (nontarget cells of BNCs), whereas LPs containing DOX and DOXOVES (structurally stabilized PEGylated LPs containing DOX) did not show strong cytotoxicity in either cell type. Furthermore, the virosomes preferentially delivered DOX to the nuclei of human hepatic cells. Xenograft mice harboring either target or nontarget cell-derived tumors were injected twice intravenously with the virosomes containing DOX at a low dose (2.3 mg/kg as DOX, 5 days interval). The growth of target cell-derived tumors was retarded effectively and specifically. Next, the combination of high dose (10.0 mg/kg as DOX, once) with tumor-specific radiotherapy (3 Gy, once after 2 hours) exhibited the most effective antitumor growth activity in mice harboring target cell-derived tumors. These results demonstrated that the HBV-based virosomes containing DOX could be an effective antitumor nanomedicine specific to human hepatic tissues, especially in combination with radiotherapy.</P>
Yamada, M.,Oeda, A.,Jung, J.,Iijima, M.,Yoshimoto, N.,Niimi, T.,Jeong, S.Y.,Choi, E.K.,Tanizawa, K.,Kuroda, S. Elsevier Science Publishers 2012 Journal of controlled release Vol.160 No.2
A bio-nanocapsule (BNC) is a hollow nanoparticle consisting of an approximately 100-nm-diameter liposome with about 110 molecules of hepatitis B virus (HBV) surface antigen L protein embedded as a transmembrane protein. BNC can encapsulate various drugs and genes and deliver them specifically to human hepatic cells based on the ability of HBV to recognize human hepatocyte, which is integrated in the N-terminal region of L protein. However, it is elusive whether the cellular attachment and entry into hepatic cells of BNC utilize the early infection mechanism of HBV. In this study, we have found that while all human hepatic cells show distinct affinities for BNC compared to non-hepatic cells, primary hepatocytes shows the highest efficiency for cellular binding and incorporation of BNC. Amounts of BNCs bound weakly and strongly to cell membranes and those entered into the cells varied significantly depending on the types of human hepatic cells. The weak and strong binding modes of BNC are likely mediated through binding to two distinct HBV receptors (heparin-mediated low-affinity and unidentified high-affinity receptors), which play major roles in the early infection mechanism of HBV. The rates of cellular uptake of BNC are similar to those reported for HBV. The BNCs incorporated into the cells are swiftly sorted to either early endosomes or macropinosomes and then to late endosomes and/or lysosomes. These findings strongly suggest that BNC is bound to and incorporated into human hepatic cells according to the early infection mechanism of HBV.