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Advanced ceramics in wire bonding capillaries for semiconductor package technology
Kim, I.J.,Kim, H.S.,Seo, M.Y.,Gauckler, L.J. Elsevier Sequoia 2008 Materials science & engineering. properties, micro Vol.498 No.1
The ultra precision technology will take a key role in future manufacturing systems in gold wire bonding capillary for semiconductor package technologies industries, so that much more efforts are needed to meet the future demands of semiconductor industries. Due to their high modulus and hardness, low density and resistance to high temperature and corrosive environment, there is a great interest in using ceramics in demanding structural applications such as bonding capillary, optical lens body, and LC (liquid crystal) nozzle, where their use would result in long life, operation at high temperatures and weight saving. The microstructure of ZrO<SUB>2</SUB> toughened Al<SUB>2</SUB>O<SUB>3</SUB> ceramics and Al<SUB>2</SUB>O<SUB>3</SUB>-Cr<SUB>2</SUB>O<SUB>3</SUB> ceramics (ruby) were carefully controlled so as to obtain dense and fine-grained ceramics, thereby improving the properties and reliability of the ceramics for capillary applications in semiconductor bonding technology. The composites were produced via ceramic injection molding technology, followed by sintering/hot isostatic pressing (HIP). Room temperature strength, hardness, Young's modulus, thermal expansion coefficient and toughness were determined, as well as surface strengthening induced by the fine-grained homogenous microstructure and the thermal treatment. The changes in microstructure grain size, sintering condition and HIP treatment were found to be correlated.
박막공정의 융합화를 통한 초소형 고체산화물 연료전지의 제작: I. Spray Pyrolysis법으로 증착된Ni 기반 음극과 스퍼터링으로 증착된 YSZ 전해질의 다층구조
손지원,김형철,김혜령,이종호,이해원,A. Bieberle-H?ter,J. L. M. Rupp,U. P. M?cke,D. Beckel,L. J. Gauckler 한국세라믹학회 2007 한국세라믹학회지 Vol.44 No.10
Physical properties of sputtered YSZ thin film electrolytes on anode thin film by spray pyrolisis has been investigated to realize the porous electrode and dense electrolyte multilayer structure for micro solid oxide fuel cells. It is shown that for better crystallinity and density, YSZ need to be deposited at an elevated temperature. However, if pure NiO anode was used for high temperature deposition, massive defects such as spalling and delamination were induced due to high thermal expansion mismatch. By changing anode to NiOCGO composite, defects were significantly reduced even at high deposition temperature. Further research on realization of full cells by processing hybridization and cell performance characterization will be performed in near future.
박막공정의 융합화를 통한 초소형 고체산화물 연료전지의 제작: I. Spray Pyrolysis법으로 증착된 Ni 기반 음극과 스퍼터링으로 증착된 YSZ 전해질의 다층구조
Son, Ji-Won,Kim, Hyoung-Chul,Kim, Hae-Ryoung,Lee, Jong-Ho,Lee, Hae-Weon,Bieberle-Hutter, A.,Rupp, J.L.M.,Muecke, U.P.,Beckel, D.,Gauckler, L.J. 한국세라믹학회 2007 한국세라믹학회지 Vol.44 No.10
Physical properties of sputtered YSZ thin film electrolytes on anode thin film by spray pyrolisis has been investigated to realize the porous electrode and dense electrolyte multilayer structure for micro solid oxide fuel cells. It is shown that for better crystallinity and density, YSZ need to be deposited at an elevated temperature. However, if pure NiO anode was used for high temperature deposition, massive defects such as spalling and delamination were induced due to high thermal expansion mismatch. By changing anode to NiOCGO composite, defects were significantly reduced even at high deposition temperature. Further research on realization of full cells by processing hybridization and cell performance characterization will be performed in near future.