Characteristics of a plasma information variable in phenomenology-based, statistically-tuned virtual metrology to predict silicon dioxide etching depth

Jang, Yunchang,Roh, Hyun-Joon,Park, Seolhye,Jeong, Sangmin,Ryu, Sanywon,Kwon, Ji-Won,Kim, Nam-Kyun,Kim, Gon-Ho Elsevier 2019 Current Applied Physics Vol.19 No.10

<P><B>Abstract</B></P> <P>A phenomenology-based virtual metrology (VM) for monitoring SiO<SUB>2</SUB> etching depth was proposed by Park (2015). It achieved high prediction accuracy by introducing newly developed plasma information (PI) variables as designated inputs, called PI-VM. The PI variables represent the state of the plasma, the sheath, and the target during the process. We investigate how a PI variable can help to improve prediction accuracy of VM and how it plays a special role in the statistical selection. We choose only PI<SUB>EEDF</SUB> among the three PI variables to focus on the investigation. The PI<SUB>EEDF</SUB> is determined from the ratio of line-intensities of optical emission spectroscopy. We apply Pearson's correlation filter (PCF), principal component analysis (PCA), and stepwise variable selection (SVS) as statistical selection methods on the variables set including PI<SUB>EEDF</SUB> or not. Multilinear regression is used to model the VM. This study reveals that PI<SUB>EEDF</SUB> variable is a good variable in terms of independence from other input variables and explanatory power for an output variable. Especially, VM using SVS method applied to variable sets including PI<SUB>EEDF</SUB> achieves the highest accuracy, comparable to Park's PI-VM. This study shows that PI<SUB>EEDF</SUB> variable is particularly useful for monitoring of the fine variations in semiconductor manufacturing process and it also extends the utilization of OES sensor data.</P>

Elaborate Manipulation for Sub-10 nm Hollow Catalyst Sensitized Heterogeneous Oxide Nanofibers for Room Temperature Chemical Sensors

Jang, Ji-Soo,Choi, Seon-Jin,Koo, Won-Tae,Kim, Sang-Joon,Cheong, Jun Young,Kim, Il-Doo American Chemical Society 2017 ACS APPLIED MATERIALS & INTERFACES Vol.9 No.29

<P>Room-temperature (RT) operation sensors are constantly in increasing demand because of their low power consumption, simple operation, and long lifetime. However, critical challenges such as low sensing performance, vulnerability under highly humid state, and poor recyclability hinder their commercialization. In this work, sub-10 nm hollow, bimetallic Pt-Ag nanoparticles (NPs) were successfully formed by galvanic replacement reaction in bioinspired hollow protein templates and sensitized on the multidimensional SnO2-WO3 heterojunction nanofibers (HNFs). Formation of hollow, bimetallic NPs resulted in the double-side catalytic effect, rendering both surface and inner side chemical reactions. Subsequently, SnO2-WO3 HNFs were synthesized by incorporating 2D WO3 nanosheets (NSs) with 0D SnO2 sphere by c-axis growth inhibition effect and fluid dynamics of liquid Sn during calcination. Hierarchically assembled HNFs effectively modulate surface depletion layer of 2D WO3 NSs by electron transfers from WO3 to SnO2 stemming from creation of heterojunction. Careful combination of bimetallic catalyst NPs with HNFs provided an extreme recyclability under exhaled breath (95 RH%) with, outstanding H2S sensitivity. Such sensing platform dearly distinguished between the breath of healthy people and simulated halitosis patients.</P>

Widespread detection of a brominated flame retardant, hexabromocyclododecane, in expanded polystyrene marine debris and microplastics from South Korea and the Asia-Pacific coastal region

Jang, Mi,Shim, Won Joon,Han, Gi Myung,Rani, Manviri,Song, Young Kyoung,Hong, Sang Hee Elsevier Applied Science Publishers 2017 Environmental pollution Vol.231 No.1

<P><B>Abstract</B></P> <P>The role of marine plastic debris and microplastics as a carrier of hazardous chemicals in the marine environment is an emerging issue. This study investigated expanded polystyrene (EPS, commonly known as styrofoam) debris, which is a common marine debris item worldwide, and its additive chemical, hexabromocyclododecane (HBCD). To obtain a better understanding of chemical dispersion via EPS pollution in the marine environment, intensive monitoring of HBCD levels in EPS debris and microplastics was conducted in South Korea, where EPS is the predominant marine debris originate mainly from fishing and aquaculture buoys. At the same time, EPS debris were collected from 12 other countries in the Asia-Pacific region, and HBCD concentrations were measured. HBCD was detected extensively in EPS buoy debris and EPS microplastics stranded along the Korean coasts, which might be related to the detection of a quantity of HBCD in non-flame-retardant EPS bead (raw material). The wide detection of the flame retardant in sea-floating buoys, and the recycling of high-HBCD-containing EPS waste inside large buoys highlight the need for proper guidelines for the production and use of EPS raw materials, and the recycling of EPS waste. HBCD was also abundantly detected in EPS debris collected from the Asia-Pacific coastal region, indicating that HBCD contamination via EPS debris is a common environmental issue worldwide. Suspected tsunami debris from Alaskan beaches indicated that EPS debris has the potential for long-range transport in the ocean, accompanying the movement of hazardous chemicals. The results of this study indicate that EPS debris can be a source of HBCD in marine environments and marine food web.</P> <P><B>Highlights</B></P> <P> <UL> <LI> A brominated flame retardant, HBCD, was assessed in EPS debris and microplastics. </LI> <LI> HBCD was widely detected in EPS debris from the Asia-Pacific coastal region. </LI> <LI> Additive HBCD are dispersed via EPS pollution in marine environments. </LI> <LI> EPS debris can be a source of HBCD in the marine environment. </LI> </UL> </P> <P><B>Graphical abstract</B></P> <P>[DISPLAY OMISSION]</P>

Shear Strength of Insulated Concrete Sandwich Wall Panels by Using Different Types of Insulation

Jang, Seok-joon(장석준),Song, Young-Jae(송영재),Kang, Su-Won(강수원),Kim, Ho-Ryong(김호룡),You, Younh-Chan(유영찬),Yun, Hyun-Do(윤현도) 한국콘크리트학회 2012 한국콘크리트학회 학술대회 논문집 Vol.2012 No.5

Inter-segment foot motion in girls using a three-dimensional multi-segment foot model

Jang, Woo Young,Lee, Dong Yeon,Jung, Hae Woon,Lee, Doo Jae,Yoo, Won Joon,Choi, In Ho Elsevier 2018 GAIT AND POSTURE Vol.63 No.-

<P><B>Abstract</B></P> <P><B>Background</B></P> <P>Several multi-segment foot models (MFMs) have been introduced for in vivo analyses of dynamic foot kinematics. However, the normal gait patterns of healthy children and adolescents remain uncharacterized. We sought to determine normal foot kinematics according to age in clinically normal female children and adolescents using a Foot 3D model.</P> <P><B>Methods</B></P> <P>Fifty-eight girls (age 7–17 years) with normal function and without radiographic abnormalities were tested. Three representative strides from five separate trials were analyzed. Kinematic data of foot segment motion were tracked and evaluated using an MFM with a 15-marker set (Foot 3D model). As controls, 50 symptom-free female adults (20–35 years old) were analyzed.</P> <P><B>Results</B></P> <P>In the hindfoot kinematic analysis, plantar flexion motion in the pre-swing phase was significantly greater in girls aged 11 years or older than in girls aged <11 years, thereby resulting in a larger sagittal range of motion. Coronal plane hindfoot motion exhibited pronation, whereas transverse plane hindfoot motion exhibited increased internal rotation in girls aged <11 years. Hallux valgus angles increased significantly in girls aged 11 years or older. The foot progression angle showed mildly increased internal rotation in the loading response phase and the swing phase in girls aged <11 years old.</P> <P><B>Conclusion</B></P> <P>The patterns of inter-segment foot motion in girls aged 11 years or older showed low-arch kinematic characteristics, whereas those in girls aged 11 years or older were more similar to the patterns in young adult women.</P> <P><B>Highlights</B></P> <P> <UL> <LI> The kinematics of the inter-segment foot motion were investigated in girl. </LI> <LI> Girls <11 years old showed low-arch kinematic characteristics. </LI> <LI> Girls 11 years or older showed similar inter-segment foot motion to adult females. </LI> <LI> This study can help to distinguish between normal and abnormal gait in girl. </LI> </UL> </P>

High Performance Anode-Supported Solid Oxide Fuel Cells with Thin Film Yttria-Stabilized Zirconia Membrane Prepared by Aerosol-Assisted Chemical Vapor Deposition

Jang, Dong Young,Kim, Manjin,Kim, Jun Woo,Bae, Kiho,Son, Ji-won,Schlupp, Meike V. F.,Shim, Joon Hyung The Electrochemical Society 2017 Journal of the Electrochemical Society Vol.164 No.6

<P>In this study, we have successfully fabricated yttria-stabilized zirconia (YSZ) electrolyte thin films by aerosol-assisted chemical vapor deposition (AACVD) for solid oxide fuel cells (SOFCs) working at an intermediate temperature range under 600. degrees C. The mix ratio of precursor sources and the deposition temperature of the AACVD process are optimized to obtain target composition and crystal structure of the YSZ film. The optimized AACVD YSZ membrane is incorporated onto Ni-YSZ anodes supported without interlayers for evaluation of SOFC performance. Fully dense 1-mu m-thick AACVD YSZ electrolyte successfully produces a stable open circuit voltage (OCV) greater than 1 V at all test temperatures in the range of 450- 600. degrees C. Power output of the test cell is measured as about 600 mW cm(-2) at 600. degrees C. Performance of our cell is compared to that of a reference cell with the same structure but with an 8-mu m-thick membrane produced by screen-printing; our cell produces 1.4 to 4 times as much power as the reference cell at all test temperatures. Electrochemical impedance analysis has confirmed that the power enhancement with the thin AACVD YSZ membrane is due to effective reduction of both ohmic and polarization resistances. (C) 2017 The Electrochemical Society. All rights reserved.</P>

Pulmonary Cryptococcosis That Mimicked Rheumatoid Nodule in Rheumatoid Arthritis Lesion

Jang, Dong Won,Jeong, Ina,Kim, Seon Jae,Kim, Seok Won,Park, Soo Yeon,Kwon, Yong Hwan,Jeong, Yeon Oh,Lee, Ji Yeon,Kim, Bo Sung,Kim, Woo-Shik,Joh, Joon-Sung The Korean Academy of Tuberculosis and Respiratory 2014 Tuberculosis and Respiratory Diseases Vol.77 No.6

Recently, the incidence of pulmonary cryptococcosis is gradually increasing in rheumatoid arthritis (RA) patients. Pulmonary rheumatoid nodules (PRN) are rare manifestations of RA. Eighteen months ago, a 65-year old woman was admitted to hospital due to multiple nodules ( $2.5{\times}2.1{\times}2cm$) with cavitations in the right lower lobe. She was diagnosed with RA three year ago. She had been taking methotrexate, leflunomide, and triamcinolone. A video-assisted thoracoscopic surgery biopsy was performed and PRN was diagnosed. However, a newly growing huge opacity with cavitation was detected in the same site. Pulmonary cryptococcal infection was diagnosed through a transthoracic computed tomograpy guided needle biopsy. Cryptococcus antigen was detected in serum but not in cerebrospinal fluid. The patient was treated with oral fluconazole which resulted clinical improvement and regression of the nodule on a series of radiography. Herein, we report the case of pulmonary cryptococcosis occurring in the same location as that of the PRN.

Orthopaedic Manifestations of Arthrogryposis-Renal Dysfunction-Cholestasis Syndrome

Jang, Woo Young,Cho, Tae-Joon,Bae, Jung Yun,Jung, Hae Woon,Ko, Jae Sung,Park, Moon Seok,Yoo, Won Joon,Chung, Chin Youb,Seo, Jeong Kee,Choi, In Ho Lippincott Williams Wilkins, Inc. 2011 Journal of pediatric orthopedics Vol.31 No.1

BACKGROUND: Arthrogryposis-Renal dysfunction-Cholestasis (ARC) syndrome (MIM♯208085) is a rare multisystem disorder, which involves the kidney, liver, skin, and central nervous and musculoskeletal systems. It is inherited as an autosomal-recessive trait, associated with germ-line mutations in the VPS33B gene. In this study, the authors reviewed the orthopaedic manifestations of ARC syndrome. MATERIALS: Ten patients diagnosed as having ARC syndrome were the subjects of this study. ARC syndrome was confirmed by mutation analysis in 8 of the 10 patients. Medical records and radiographs were retrospectively reviewed with a focus on musculoskeletal manifestations. RESULTS: Seven patients either expired at 4 to 19 months of age or were presumed to have expired. The remaining 3 patients remained alive at the time of writing this manuscript and were aged from 7 to 23 months. All patients showed musculoskeletal symptoms and/or signs, which included vertical talus (7 feet, 4 patients), pes calcaneovalgus (4 feet, 3 patients), hip dislocation (6 hips, 3 patients), pathologic fractures (5 fractures in 5 patients), and rigid kyphosis (2 patients). No surgical intervention was performed. Orthopaedic treatments, other than fracture management, were abandoned soon after diagnoses were made. CONCLUSIONS: ARC syndrome should be included in the differential diagnosis of arthrogryposis. As there is no specific effective treatment for renal dysfunction and cholestasis, orthopaedic intervention should be postponed until long-term survival is expected, though this is unlikely. LEVEL OF EVIDENCE: Level IV, diagnostic studies, case series.

Molecular Investigation of Two Consecutive Nosocomial Clusters of Candida tropicalis Candiduria Using Pulsed-Field Gel Electrophoresis

Joon Rho,Jong Hee Shin,Jeong Won Song,Mi-Ra Park,Seung Jung Kee,Sook Jin Jang,Young Kyu Park,Soon Pal Suh,Dong Wook Ryang 한국미생물학회 2004 The journal of microbiology Vol.42 No.2

Pulsed-field gel electrophoresis (PFGE) typing was applied to the epidemiological investigation of 21 Candida tropicalis isolates collected from urine specimens of 11 patients and one healthcare worker, in an intensive care unit (ICU) over a 4-month period. Seventeen epidemiologically unrelated strains from 14 patients were also tested to determine the discriminatory power of PFGE. PFGE typing consisted of electrophoretic karyotyping (EK) and restriction endonuclease analysis of genomic DNA (REAG), using two restriction enzymes (BssHII and SfiI). The EK pattern was the same in all 38 isolates, while REAG using SfiI separated the isolates into nine types. However, 16 different PFGE types were identified by REAG with BssHII, and the same results were obtained when the results of both REAG tests were combined. In serial urinary isolates from 10 patients, all strains from each patient had the same PFGE pattern. While the epidemiologically unrelated strains from 14 patients consisted of 13 different PFGE types, the 20 isolates from the 11 ICU patients fell into only two PFGE types (types C1 and C2), and these apparently originated from the two different outbreaks. All strains of type C1 (n = 12) were isolated from six patients, between November 1999 and January 2000, and all of the type C2 strains (n=8) were isolated from five patients, during January and February 2000. This study shows two consecutive clusters of C. tropicalis candiduria in an ICU, defined by PFGE typing, and also demonstrates that a PFGE typing method using BssHII is perhaps the most useful method for investigating C. tropicalis candiduria.

Formation of microplastics by polychaetes (<i>Marphysa sanguinea</i>) inhabiting expanded polystyrene marine debris

Jang, Mi,Shim, Won Joon,Han, Gi Myung,Song, Young Kyoung,Hong, Sang Hee Elsevier 2018 Marine pollution bulletin Vol.131 No.1

<P><B>Abstract</B></P> <P>Fragmentation of large plastic debris into smaller particles results in increasing microplastic concentrations in the marine environment. In plastic debris fragmentation processes, the influence of biological factors remains largely unknown. This study investigated the fragmentation of expanded polystyrene (EPS) debris by polychaetes (<I>Marphysa sanguinea</I>) living on the debris. A large number of EPS particles (131 ± 131 particles/individual, 0.2–3.8 mm in length) were found in the digestive tracts of burrowing polychaetes living on EPS debris. To confirm the formation of microplastics by polychaetes and identify the quantity and morphology of produced microplastics, polychaetes were exposed to EPS blocks in filtered seawater under laboratory conditions. Polychaetes burrowed into the blocks and created numerous EPS microplastic particles, indicating that a single polychaete can produce hundreds of thousands of microplastic particles per year. These results reveal the potential role of marine organisms as microplastic producers in the marine environment.</P> <P><B>Highlights</B></P> <P> <UL> <LI> Floating marine debris becomes a habitat for marine organisms. </LI> <LI> A lot of EPS particles were found in the feces of polychaetes from EPS debris. </LI> <LI> Polychaetes burrowed into EPS debris and created numerous EPS microplastic particles. </LI> <LI> Marine organisms inhabiting marine debris contribute to microplastic formation. </LI> </UL> </P> <P><B>Graphical abstract</B></P> <P>[DISPLAY OMISSION]</P>