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이선우,이동주,이응숙,제태진 한국공작기계학회 2001 한국공작기계학회 춘계학술대회논문집 Vol.2001 No.-
The needs for precision machining of micro to milli parts have been increased as the industry require high quality products, especially for the micro-machining of IT products. The ultra-precision machining system is essential for the micro machining of fine structures, which insures machining accuracy, low systematic and random error and repeatability. In this study, we developed micro machining system, which is equipped with air bearing stage for ultra precision machining and also we present the results of V-grooving experiments, conducted by the developed system, to verify the performance of system. The results show that the machined V-grooving had good accuracy with repeatable stability.
윤종호,이재종,이응숙,이동주,김영호 한국공작기계학회 2004 한국공작기계학회 춘계학술대회논문집 Vol.2004 No.-
Electro-rheological fluid is recently used for the micro polishing of 3-dimensional micro-aspherical lens. It's also used for polishing small area defects on the wide flat wafer. Since ER fluid shows a behavior of viscosity changing under certain electric fields, micro polishing efficiency may be enhanced for certain cases. In this paper, a perfluorinated carbonyl fluoride oil based ER fluids was used to improve surface polishing rate and submicron-scale accuracy. As the polishing electrodes, micro size cylindrical tools had been used for maximizing the electric field. An experimental device, which was applied for micro polishing a number of wafers of 4 inches in size and other workpieces, was made on a precision polishing system. It consisted of a steel electrode, a wafer fixture, 10mA current and DC 5kV power supply unit, and a controller unit. From the Experiments, the ER fluid is applicable for micro polishing of small parts.
마이크로 드릴링 M/C에 의한 미세구멍가공특성에 관한 연구
민승기,이동주,이응숙,강재훈,김동우 한국공작기계학회 2001 한국공작기계학회 춘계학술대회논문집 Vol.2001 No.-
Recently, the trends of industrial products grow more miniaturization, variety and mass production. Micro drilling which take high precision in cutting work is requested more micro hole and high speed working. Especially, Micro deep hole drilling is becoming more important in a wide spectrum of precision production industries, ranging from the production of automotive fuel injection nozzle, watch and camera parts, medical needles, and thick multi-layered Printed Circuit Boards(PCB) that are demanded for very high density electric circuitry. This paper shows the tool monitoring results of micro drill with tool dynamometer. And additionally, microscope with built-in monitor inspection show the relationship between burr in work piece and chip form of micro drill machining.
Ruled Surface로 형성된 임펠러 블레이드의 5-축 가공에 관한 연구
정대일,조현덕,윤문철,최두선,신보성,이응숙 한국공작기계학회 2000 한국공작기계학회 추계학술대회논문집 Vol.2000 No.-
This paper describes the method and the process for impeller machining on 5-axis CNC machining center. Also, The CAD/CAM software for the impeller post processing is developed. The software can be interfaced with Solid-works software for confirmation of the impeller shapes. In this study, blades on impeller is described from Ruled-surfaces between two Ferguson curves. In this study, using 5-axis NC part program obtained from the developed software, a sample impeller was machined on 5-axis CNC machining center. The machined impeller was very agreeable to the designed impeller. Thus, theories proposed in this study can be very useful for the 5-axis machining of impeller blades with Ruled-surfaces.
High-throughput step-and-repeat UV-nanoimprint lithography
Eung-sug Lee,Jun-ho Jeong,Young-suk Sim,Ki-don Kim,Dae-geun Choi,Jun-hyuk Choi 한국물리학회 2006 Current Applied Physics Vol.6 No.1l
UV-NIL has shown promise as new disruptive technology to displace photolithography in patterning nano features. This method is attractive because of their high-throughput with easy operation at room temperature and low pressure with low-cost. In this paper, a new UV-NIL process is proposed to apply a large-area stamp to a high-throughput step-and-repeat process at atmospheric conditions, utilizing additive gas pressurization and an elementwise patterned stamp (EPS), which consists of elements separated by channels. With the proposed method, only four imprints were required to press an 8 in. wafer. EPS features measuring 50–80 nm were successfully transferred onto the wafers. The experiments demonstrated that a 5 · 5 in.2. EPS could be used with a step-and-repeat UV-NIL process to imprint 8 in. wafers under atmospheric conditions.
Fabrication of UV imprint stamp using diamond-like carbon coating technology
EUNG-SUG LEE(이응숙),JUN-HO JEONG(정준호),KI-DON KIM(김기돈),YOUNG-SUK SIM(심영석),DAE-GEUN CHOI(최대근),JUNHYUK CHOI(최준혁),TAE-WOO LIM(임태우),SANG-HU PARK(박상후),DONG-YOL YANG(양동열),NAM-GOO CHA(차남구),IN-KWON KIM(김인권),JIN- 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.11
The two-dimensional (2D) and three-dimensional (3D) diamond-like carbon (DLC) stamps for ultraviolet nanoimprint lithography (UV-NIL) were fabricated using two kinds of methods, which were a DLC coating process followed by the focused ion beam (FIB) lithography and the two-photon polymerization (TPP) patterning followed by nano-scale thick DLC coating. We fabricated 70 ㎚ deep lines with a width of 100 ㎚ and 70 ㎚ deep lines with a width of 150 ㎚ on 100 ㎚ thick DLC layers coated on quartz substrates using the FIB lithography. 200 ㎚ wide lines, 3D rings with a diameter of 1.35 ㎛ and a height of 1.97 ㎛, and a 3D cone with a bottom diameter of 2.88 ㎛ and a height of 1.97 ㎛ were successfully fabricated using the TPP patterning and DLC coating process. The wafers were successfully printed on an UV-NIL using the DLC stamp. We could see the excellent correlation between the dimensions of features of stamp and the corresponding imprinted features.
Fabrication of Nano- and Micro-Scale UV Imprint Stamp Using Diamond-Like Carbon Coating Technology
Lee, Eung-Sug,Jeong, Jun-Ho,Kim, Ki-Don,Sim, Young-Suk,Choi, Dae-Geun,Choi, Junhyuk,Park, Sang-Hu,Lim, Tae-Woo,Yang, Dong-Yol,Cha, Nam-Goo,Park, Jin-Goo,Lee, Wi-Ro American Scientific Publishers 2006 Journal of Nanoscience and Nanotechnology Vol.6 No.11
<P>Two-dimensional (2-D) and three-dimensional (3-D) diamond-like carbon (DLC) stamps for ultraviolet nanoimprint lithography were fabricated with two methods: namely, a DLC coating process, followed by focused ion beam lithography; and two-photon polymerization patterning, followed by nanoscale-thick DLC coating. We used focused ion beam lithography to fabricate 70 nm deep lines with a width of 100 nm, as well as 70 nm deep lines with a width of 150 nm, on 100 nm thick DLC layers coated on quartz substrates. We also used two-photon polymerization patterning and a DLC coating process to successfully fabricate 200 nm wide lines, as well as 3-D rings with a diameter of 1.35 <I>μ</I>m and a height of 1.97 <I>μ</I>m, and a 3-D cone with a bottom diameter of 2.88 <I>μ</I>m and a height of 1.97 <I>μ</I>m. The wafers were successfully printed on an UV-NIL using the DLC stamps without an anti-adhesive layer. The correlation between the dimensions of the stamp's features and the corresponding imprinted features was excellent.</P>
이응호(Eung-Ho Lee),이정석(Jung-Suck Lee),주동식(Dong-Sik Joo),박중제(Jung-Je Park),김희경(Hee-Kyung Kim),장석준(Sug-Zoon Chang) 한국식품영양과학회 1996 한국식품영양과학회지 Vol.25 No.2
전남지방의 전통 수산발효식품인 토하젓의 인지도 향상 및 국가경쟁력을 갖춘 지역특산품으로 발전시키기 위한 일련의 연구로써, 식품학적 기초자료를 얻기 위하여 숙성기간이 다른 시판 토하젓을 구입하여 정미 성분을 분석ㆍ검토하였다. 저온 (5±2℃)에서 90일간 숙성시킨 토하젓의 전체 유리아미노산 함량은 건물당 1873.0㎎/100g으로 담금 직후 토하젓의 전체 유리아미노산(719.4㎎/100g) 보다 2배 이상 많았다. 한편 숙성된 토하젓의 주요 유리아미노산은 glutamic acid, alanine, leucine, valine 및 phenylalanine으로 전체 유리아미노산에 대해 58.6%를 차지하였다. 핵산 관련물질은 담금 직후 및 숙성된 토하젓 모두 hypoxanthine의 함량이 월등히 많았으며, 그 다음으로 AMP 및 IMP 순이였다. 그리고 숙성된 토하젓은 담금 직후의 토하젓과 비교해서 AMP 및 IMP는 적었으나, hypoxanthine의 함량은 많았다. 불휘발성 유기산을 GC 분석한 결과, 담금 직 후 및 숙성된 제품 모두에 lactic acid가 가장 많아 각각 건물당 389.3㎎/100g 및 752.3㎎/100g이였고, succinic acid는 미량 함유되어 있었다. 90일간 숙성된 토하젓의 TMAO, betaine 및 total creatinine 함량은 건물량 기준으로 각각 63.6㎎/100g, 179.1㎎/100g 및 123.7㎎/100g이었다. Omission test를 이용하여 각 정미성분을 관능검사한 결과, 유리아미노산 및 불휘발성 유기산이 토하젓의 맛에 중요한 역할을 하는 것으로 밝혀졌으며, 핵산 관련물질은 그다지 맛에 대한 기여도가 높지 않았다. 따라서 시판 토하젓의 맛에는 유리아미노산 및 불휘발성 유기산이 중요한 역할을 하며, 핵산 관련물질이나 TMAO, betaine 및 total creatinine은 보조적인 역할을 할 것으로 생각된다. Toha-jeot, salt-fermented freshwater shrimp(Caridina denticulata denticulata D_E H_(AAN)) is a traditional food in Chonlanam-Do in Korea. Commercial product, after fermentation is completed, used to be prepared by mixing Toha-jeot with ingredients such as boiled glutinous rice, ginger, garlic, and sesame. Taste compounds in Toha-jeot were analyzed on the basis of different fermentation methods and time. Total free amino acids in fermented Toha-jeot were two times more than those in unfermented one. Major free amino acids in fermented Toha-jeot were glutamic acid, alanine, leucine, valine, and phenylalanine. In case of non-volatile organic acids, and nucleotides and their related compounds, lactic acid and hypoxanthine were the major ones in both samples, respectively. In fermented Toha-jeot trimethylamine oxide, betaine, and total creatinine were determined to be 63.6㎎/100g, 179.1㎎/100g, and 123.7㎎/100g on moisture free basis, respectively. The result of taste evaluation by omission test revealed that the major taste compounds in fermented Toha-jeot were free amino acids and non-volatile organic acids.