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Wet Station 모니터링을 위한 제어 모듈의 설계 및 구현
한광록(Han KwangRok),황미자(Hwang Mi Zar) 한국정보처리학회 1998 정보처리학회논문지 Vol.5 No.7
In this paper, wet station monitoring system is implemented by designing functional tasks and using shared memory for inter process communication. We design recipe command in order to process semiconductor wafer units they ar called a lot, and discuss a monitoring method of batch process of lots by the recipe. We implement the task, the recipe and the shared memory according to the designed format and apply them to the real equipment. As a result of the experiment, each task proceeds the batch processing with the shared memory according to the recipe command and we can visually monitor all of the process by the graphic window.