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무수 불화수소와 메탄올의 기상식각에 의한 실리콘 표면 미세 가공
장원익,최창억,이창승,홍윤식,이종현,백종태,김보우 ( W . I . Jang,C . A . Choi,C . S . Lee,Y . S . Hong,J . H . Lee,J . T . Baek,B . W . Kim ) 한국센서학회 1998 센서학회지 Vol.7 No.1
In silicon surface micro-machining, the newly developed GPE(gas-phase etching) process was verified as a very effective method for the release of highly compliant micro-structures. The developed GPE system with anhydrous HF gas and CH₃OH vapor was characterized and the selective etching properties of sacrificial layers to release silicon micro-structures were discussed. P-doped polysilicon and SOI(silicon on insulator) substrate were used as a structural layer and TEOS(tetraethyorthosilicate) oxide, thermal oxide and LTO(low temperature oxide) as a sacrificial layer. Compared with conventional wet-release, we successfully fabricated micro-structures with virtually no process-induced suction and residual product.
마이크로 공진 구조체 제작을 위한 다층 폴리실리콘의 스트레스 특성
최창억(C . A . Choi),이창승(C . S . Lee),장원익(W . I . Jang),홍윤식(Y . S . Hong),이종현(J . H . Lee),손병기(B . K . Sohn) 한국센서학회 1999 센서학회지 Vol.8 No.1
Micro polysilicon actuators, which are widely used in the field of MEMS (Microelectromechanical System) technology, were fabricated using polysilicon thin layers. Polysilicon deposition were carried out to have symmetrical layer structures with a LPCVD (Low Pressure Chemical Vapor Deposition) system, and we have measured physical characteristics by micro test patterns, such as bridges and cantilevers to verify minimal mechanical stress and stress gradient in the polysilicon layers according to the methods of mutilayer deposition, doping, and thermal treatment, also, analyzed the properties of each specimen, which have a different process condition, by XRD, and SIMS etc.. Finally, the fabricated planar polysilicon resonator, symmetrically stacked to 6.5㎛ thickness, showed Q of 1270 and oscillation ampitude of 5㎛ under DC 15V, AC 0.05V, and 1000 mtorr pressure. The developed micro polysilicon resonator can be utilized to micro gyroscope and accelerometor sensor.