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고감도 H<sub>2</sub>S 감지를 위한 SnO<sub>2</sub> 장식된 Cr<sub>2</sub>O<sub>3</sub> nanorods 이종구조
정재한 ( Jae Han Chung ),조윤행 ( Yun-haeng Cho ),황준호 ( Junho Hwang ),이수형 ( Su Hyeong Lee ),이승기 ( Seunggi Lee ),박시형 ( See-hyung Park ),손성우 ( Sungwoo Sohn ),조동휘 ( Donghwi Cho ),이광재 ( Kwangjae Lee ),심영석 ( You 한국센서학회 2024 센서학회지 Vol.33 No.1
The creation of vertically aligned one-dimensional (1D) nanostructures through the decoration of n-type tin oxide (SnO<sub>2</sub>) on p-type chromium oxide (Cr<sub>2</sub>O<sub>3</sub>) constitutes an effective strategy for enhancing gas sensing performance. These heterostructures are deposited in multiple stages using a glancing angle deposition technique with an electron beam evaporator, resulting in a reduction in the surface porosity of the nanorods as SnO<sub>2</sub> is incorporated. In comparison to Cr<sub>2</sub>O<sub>3</sub> films, the bare Cr<sub>2</sub>O<sub>3</sub> nanorods exhibits a response 3.3 times greater to 50 ppm H<sub>2</sub>S at 300°C, while the SnO<sub>2</sub>-decorated Cr<sub>2</sub>O<sub>3</sub> nanorods demonstrate an eleven-fold increase in response. Furthermore, when subjected to various gases (CH<sub>4</sub>, H<sub>2</sub>S, CO<sub>2</sub>, H<sub>2</sub>), a notable selectivity toward H<sub>2</sub>S is observed. This study paves the way for the development of p-type semiconductor sensors with heightened selectivity and sensitivity towards H<sub>2</sub>S, thus advancing the prospects of gas sensor technology.
경사각 증착법 이용한 1차원 나노구조체 기반의 가스센서에 관한 연구 동향
이승기(Seunggi Lee),정재한(Jae Han Chung),조윤행(Yun Haeng Cho),조동휘(Donghwi Cho),심영석(Young-Seok Shim) 한국세라믹학회 2023 세라미스트 Vol.26 No.3
One-dimensional (1D) nanostructures allow for precise control of geometrical size and shape, offering greater design flexibility than other nanostructures. 1D nanostructures, in particular, hold immense potential for revolutionizing the gas sensor field, owing to their extensive surface areas conducive to chemical reactions. To harness this potential, researchers have dedicated their efforts to developing fabrication methods that incorporate 1D nanostructures into gas sensor applications. Various techniques have been explored, including hydrothermal synthesis, electrospinning, sol-gel processes, solid-state chemical reactions, vapor-phase transport, and chemical vapor deposition. Despite these advancements, challenges regarding uniformity and reproducibility persist. In this report, we review the glancing angle deposition (GLAD) technique for applying 1D nanostructures to gas sensors and discuss to the potential of GLAD in overcoming existing limitations and driving forward the realm of 1D nanostructure-based gas sensors.