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UV 임프린트 리소그래피 공정을 통한 친환경적인 다양한 패턴필름의 제조와 특성분석
정민희(Min-Hui Jeong),육지호(Ji-Ho Youk),이승준(Seung-Jun Lee) 한국고분자학회 2020 폴리머 Vol.44 No.4
During the imprint lithography process (ILP), ILP technology using ultraviolet (UV) light is the method of pressing UV curing resins at a constant pressure (low pressure) with mold fabricated using pattern master, then UV irradiation, hardening resins, and then pulling away and transcription. This method is simpler and more efficient than the thermal ILP technology, which requires high temperature and high pressure. Thus, in this study, the UV-ILP for various pattern formulation was conducted, and the UV curing resin developed was used with environment-friendly acrylic resin. The resin does not contain fluorine, making it difficult to develop hydrophobic properties. Thus, by different mold surface patterns through the imprint process, acrylic resin also showed the super-hydrophobic surface characteristics. To evaluate the physical characteristics of UV curing resins developed, the surface properties, hardness, contact angle, and thermal characteristics were conducted. In conclusion, water-contact angle of honeycomb pattern film has shown the super-hydrophobic property over than 120 degree compared to the flat type pattern film.