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임선종,이찬홍 한국공작기계학회 2008 한국공작기계학회 춘계학술대회논문집 Vol.2008 No.-
Measurement of probe current is used to align the column and to check proper current for image. The data is compared with data of other system and could be standard data for developing the system. In the measurement for aligning the column, scanning control signal is only utilized. The current for image is changed by aperture size. Faraday cup is one of tools for doing this and is used in this paper. It is composed of mesh and a cup to be connected to signal line. The current is measured by a pico-amperemeter.
임선종,이찬홍 한국공작기계학회 2009 한국공작기계학회 춘계학술대회논문집 Vol.2009 No.-
The focal length decreases as the current increase. The focal length increases at higher accelerating voltages for the same lens excitation since the velocity of the electrons increases with increasing beam voltage. If the focal length is short, probe current is small because the most part of electrons connect on aperture. In this paper, we analysis the relation between focal length and probe current. In the measurement of probe current, faraday cup is used for it and it does not allow the backscattered and secondary electrons generated by the incident beam to escape.
임선종,이찬홍 한국공작기계학회 2006 한국공작기계학회 추계학술대회논문집 Vol.2006 No.-
Because the E-Beam manufacturing system, to which the proposed modeling is applied, is based on a Scanning Electron Microscopy(SEM), the development process includes the stage of electronic microscope. This is also a stage for confirming the basic performance of the E-Beam manufacturing system. This paper proposed the control signal systemization from electron beam generation to image capture. For control signal systemization, we designed control boards.
주사 전자현미경에서 집속 렌즈를 이용한 프르브 전류의 차단
임선종,이찬홍 한국공작기계학회 2008 한국공작기계학회 추계학술대회논문집 Vol.2008 No.-
Beam blanker containing blank plate intercepts probe current by drawing electron beam. It is suitable for a variety of pattern process because of its responsibility. But it changes electron beam path. Condenser lens controls focal length by currents. The focal length is the distance along the optic axis from the point where an electron first changes direction to the point where the electron crosses the axis. Increasing the strength of the condenser lens decreases both the final probe size and the amount of current in the final probe. In this paper, we implement the beam blank function using the focal length of condenser lens without beam blanker.
주사 전자 현미경에서 전자빔 프르브 생성을 위한 하드웨어 설계
임선종,이찬홍 한국공작기계학회 2007 한국공작기계학회 추계학술대회논문집 Vol.2007 No.-
Electron probe refers to the focused electron beam at the specimen. It generates the various image signals. Image of SEM is dependent upon the beam parameters: electron-probe size, electron-probe-current and electron probe convergence angle. In this paper, we presented hardware design for generation of electron probe.