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신경회로망을 이용한 RF 스퍼터링 ZnO 박막 증착 프로세스 모델링
임근영,이상극,박춘배,Lim, Keun-Young,Lee, Sang-Keuk,Park, Choon-Bae 한국전기전자재료학회 2006 전기전자재료학회논문지 Vol.19 No.7
ZnO deposition parameters are not independent and have a nonlinear and complex property. To propose a method that could verify and predict the relations of process variables, neural network was used. At first, ZnO thin films were deposited by using RF magnetron sputtering process with various conditions. Si, GaAs, and Glass were used as substrates. The temperature, work pressure, and RF power of the substrate were $50\sim500^{\circ}C$, 15 mTorr, and $180\sim210W$, respectively : the purity of the target was ZnO 4 N. Structural properties of ZnO thin films were estimated by using XRD (0002) peak intensity. The structure of neural network was a form of 4-7-1 that have one hidden layer. In training a network, learning rate and momentum were selected as 0.2, 0.6 respectively. A backpropagation neural network were performed with XRD (0002) peak data. After training a network, the temperature of substrate was evaluated as the most important parameter by sensitivity analysis and response surface. As a result, neural network could capture nonlinear and complex relationships between process parameters and predict structural properties of ZnO thin films with a limited set of experiments.
이근배 ( Keun Bae Lee ),최진 ( Jin Choi ),문은선 ( Eun Sun Moon ),윤택림 ( Taek Rim Yoon ),임근영 ( Keun Young Lim ) 대한골절학회 2006 대한골절학회지 Vol.19 No.1
Purpose: To evaluate the negative pressure wound therapy for traumatic soft tissue defects by vacuum-assised closure (V.A.C.(R)). Materials and Methods: 33 patients with traumatic soft tissue defects were treated by using V.A.C.(R) which removes edema fluid, eliminates an extrinsic cause of microcirculatory embarrassment and may directly stimulate cellular proliferation of reparative granulation tissue. We removed all necrotic tissue prior to application of the V.A.C.(R). The foam dressing was placed into direct contact with wound and was changed every 48∼72 hours. The setting for vacuum pump was continuous pressure of 100 to 125 mm Hg. C-reactive protein was checked to evaluate wound infection. We measured wound size and total duration of treatment. Results: Mean duration of treatment was 25.2 days and mean decrease of wound size was 31.9%. The concentration of CRP after V.A.C.(R) therapy reduced by day 8 below 1.0 mg/dl and gradually decreased to normal level by day 10. All patients showed hastened wound healing by rapid formation of granulation tissue. Conclusion: Negative pressure wound therapy is useful in patients with traumatic soft tissue defects, which reduces treatment duration and cost by rapid wound healing and effective infection control.
ZnO 바리스터의 단입계면 분석을 위한 마이크로 전극 제작과 전기적 특성 해석
소순진,임근영,박춘배,So, Soon-Jin,Lim, Keun-Young,Park, Choon-Bae 한국전기전자재료학회 2005 전기전자재료학회논문지 Vol.18 No.3
To investigate the electrical properties at the single grainboundary of ZnO varistors, micro-electrodes were fabricated on the surface which was polished and thermally etched. Our micro-electrode had 2000 $\AA$ silicon nitride layer between micro-electrode and ZnO surface. This layer was deposited by PECVD and etched by RIE after photoresistor pattering process using by mask 1. The metal patterning of micro-electrodes used lift-off method. We found that the breakdown voltage of single grainboundary is about 3.5∼4.2 V at 0.1 mA on I-V curves. Also, capacitance-voltage measurement at single grainboundary gave several parameters( $N_{d}$, $N_{t}$, $\Phi$$_{b}$, t) which were related with grainboundary.ary.
양성 골 종양의 절제 및 소파술 후 사용한 신선 동결 동종골 이식의 결과
정성택,배봉현,임근영,공일규,Jung, Sung-Taek,Bae, Bong-Hyun,Lim, Keun-Young,Kong, Il-Kyu 대한근골격종양학회 2005 대한골관절종양학회지 Vol.11 No.1
Purpose: We compared the time how much time spent until the bone unions, when we grafted fresh frozen allograft during therapy of benign bone tumor depends on the degrees of bony unions. Materials and Methods: This study selected 29 cases, in which a curettage on the benign bone tumors was conducted and a fresh frozen allograft was transplanted. The area of the focus, the new bone formation, the recurrence of the focus and complications in the plain radiographs were observed. Results: The average time when we could find out bony unions in the radiographs is eleven weeks. The time when we could observe the unions in the radiographs are 11.4 weeks in allograft group, 10.7 weeks in allograft and autograft groups and 13.6 weeks in allograft and bone substitute. On radiologic findings, the average lesion size is 40 cm3. The time when we could find bony unions are 9.3 weeks in less than 40 $cm^3$ and 12.9 weeks in more than 40 $cm^3$. We could observe recurrences in two cases. Conclusion: The authors could get the similar results between fresh frozen allograft, allograft and autograft after curettage of benign bone tumor. We can think the ideal method which is the transplantation of autograft, but if we can’t get autograft enough, the best way which heal the defects is the transplantation of fresh frozen allograft.
Ampoule-tube 법을 이용한 P와 As 도핑 p형 ZnO 박막의 미세구조와 Hall 특성
소순진 ( Soon Jin So ),임근영 ( Keun Young Lim ),유인성 ( In Sung Yoo ),박춘배 ( Choon Bae Park ) 한국전기전자재료학회 2005 한국전기전자재료학회 하계학술대회 논문집 Vol.2005 No.0
To investigate the ZnO thin films which is interested in the next generation of short wavelength LEDs and Lasers, our ZnO thin films were deposited by RF sputtering system. At sputtering process of ZnO thin films, substrate temperature, work pressure respectively is 300℃ and 5.2 mTorr, and the purity of target is ZnO 5N. The thickness of ZnO thin films was about 1.9㎛ at SEM analysis after sputtering process. Phosphorus (P) and arsenic (As) were diffused into ZnO thin films sputtered by RF magnetron sputtering system in ampoule tube which was below 5×10(-7)Torr. The dopant sources of phosphorus and arsenic were Zn₃P₂ and ZnAs₂. Those diffusion was perform at 500, 600, and 700℃ during 3hr. We find the condition of p-type ZnO whose diffusion condition is 700℃, 3hr. Our p-type ZnO thin film has not only very high carrier concentration of above 10(19)/㎤ but also low resistivity of 5×10(-3)Ω㎝.
원위 경골 골절에서 잠김 압박 금속판을 이용한 최소 침습적 골유합술
김성규 ( Sung Kyu Kim ),이근배 ( Keun Bae Lee ),문은선 ( Eun Sun Moon ),임근영 ( Keun Young Lim ) 대한골절학회 2011 대한골절학회지 Vol.24 No.1
Purpose: To evaluate the outcome of minimally invasive osteosynthesis using locking compression plate for distal tibia fractures. Materials and Methods: Forty five patients (45 cases) who underwent minimally invasive osteosynthesis using locking compression plate for distal tibia fractures between January 2006 and June 2008, were followed for more than one year. The average duration of the follow-up was 30.5 months (12∼54 months). The fracture types were as followed: 26 cases (58%) of extraarticular fractures, 19 cases (42%) of intraarticular fractures, and 16 cases (36%) of open fractures. Results: All patients achieved bone union at average of 21weeks (12∼36 weeks). The average American Orthopedic Foot & Ankle Society ankle-hindfoot scales was 84.6 points (65∼100 points) and range of ankle motion averaged at 46.5 degrees (20∼60 degrees). Complications included 6 cases of superficial infection, 3 cases of malalignment and 5 cases of skin irritation by plate. There were no cases of deep infection, skin necrosis, shortening and metal breakage. Conclusion: Minimally invasive osteosynthesis using locking compression plate for distal tibia fractures is considered to be an effective method with high healing rate, rapid functional recovery and low complication rate due to minimal disruption of bone and soft tissue biology and improved fixation strength.