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자유지지 MEMS 구조물의 띠 굽힘 시험 시편 설계를 위한 유한 요소해석
김정실(Jung-Sil Kim),이학주(Hak-Joo Lee),김재현(Jae-Hyun Kim),최병익(Byung-Ik Choi),좌성훈(Sung Hoon Choa),이창승(Chang Seung Lee) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5
Freestanding thin films are generally used in MEMS/NEMS devices. In order to design and fabricate these devices, it is essential to estimate the mechanical properties of their constituted materials. Strip bending test is one of the methods to characterize mechanical behavior of thin films. The stress concentration of a strip bending specimen have to be considered to get accurate measurement results. In this study, we try to suggest guidlines for desining strip bending specimens. We compare with the analytical results of a straight strip and a modified strip using finite element method. In addition, the experiments are conducted to ensure the validity of finite element analysis.
플라즈마 화학 증착된 질화 규소 미소 구조물의 탄성 계수 측정
김재현(Jae-Hyun Kim),이학주(Hak-Joo Lee),한승우(Seung-Woo Han),최병익(Byung-Ik Choi),좌성훈(Sung-Hoon Choa),이창승(Chang-Seung Lee) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5
Silicon nitride micro-structures are extensively utilized in MEMS applications. In order to design and simulate a silicon nitride structure in MEMS, its mechanical property is required to be measured. In this study, the silicon nitride thin film of about 1000 ㎚ thick is deposited on silicon substrate by Plasma Enhanced Chemical Vapor Deposition (PECVD) method and patterned by optical lithography. The silicon nitride microstructures are released by silicon bulk etching process (DRIE). The mechanical behaviors of the microstructures are measured by strip bending test and the elastic modulus is extracted from the measured stressstrain curve. The measured elastic modulus is compared with that measured by nanoindentation.
MEMS 소재의 기계적 특성 평가를 위한 인장형 시편 및 시험기 제작
박준협(Jun-Hyub Park),김정엽(Chung-Youb Kim),이창승(Chang Seung Lee),좌성훈(Sung-Hoon Choa),송지호(Ji-Ho Song) 대한기계학회 2004 대한기계학회 춘추학술대회 Vol.2004 No.4
Mechanical property evaluation of micrometer-sized structures is necessary to help design reliable microelectromechanical systems(MEMS) devices. Most material properties are known to exhibit dependence on specimen size and such properties of microscale structures are not well characterized. This paper describes techniques developed for tensile testing of materials used in MEMS. Epi-polycrystalline silicon is currently the most widely used material, and its tensile strength has been measured as 1.52GPa. We have developed an uniaxial testing machine for testing microscale specimen using electro-magnetic actuator. The field magnet and the moving coil taken from an audio-speaker were utilized as the components of the actuator. Structure of specimen was designed and manufactured for easy handling and alignment. In addition to the static tensile tests, new techniques and procedures for measuring strength are described.
RF MEMS Filter 설계를 위한 몰리브덴박막의 기계적 물성 측정
명만식(Man Sik Myung),김윤재(Yun-Jae Kim),좌성훈(Sung-Hoon Choa),이창승(Chang Seung Lee),박준협(Jun-Hyub Park) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.11
This paper presents a novel experimental method to investigate the strength of material, Mo, which is commonly used as an electrode in RF(radio frequency) microelectromechanical systems(MEMS) filter. An experimental method was developed to save time of set-up of specimen and easy to align. A non-contact position measuring system based on the principle of capacitance micrometry with 0.1nm resolution for displacement measurement was used to measure total displacement. And new specimen was designed and fabricated to easily manipulate, align and grip a thin-film for a tensile test. FE analysis for specimen was performed to calculate stress-strain curve from the measured load-displacement curve. The 2 kinds of widths were tested to investigate a size effect. The thickness of the thin film is 1.0μm and 2 kinds of width were tested to get mechanical properties.
RF MEMS switch 설계를 위한 Al-3 Ti 박막의 기계적 물성 측정
박준협(Jun-Hyub Park),명만식(Man Sik Myung),김윤재(Yun-Jae Kim),좌성훈(Sung-Hoon Choa),이창승(Chang Seung Lee) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5
This paper presents a novel experimental method to investigate the strength of material, Al-3 Ti, which is commonly used in RF(radio frequency) microelectromechanical systems(MEMS) switch. The experimental method involves the development of a new tensile loading system. A non-contact position measuring system based on the principle of capacitance micrometry with 0.1㎚ resolution for displacement measurement. And new specimen was designed and fabricated to easily manipulate, align and grip a thin-film for a tensile test. The material used in this study was Al-3 Ti thin film, which was used in RF switch. The thickness of the thin film is 1.1 m and 3 kinds of width were tested to get mechanical properties.