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RISS 인기검색어
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- 저자 : 이완규 ( Wan Gyu Lee ) (검색결과 25 건)
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Spin-on Dielectric 막의 전기적 특성에 미치는 전구체의 영향
이완규,Lee, Wan-Gyu 한국재료학회 2011 한국재료학회지 Vol.21 No.4
Polysilazane and silazane-based precursor films were deposited on stacked TiN/Ti/TEOS/Si-substrate by spin-coating, then annealed at $150{\sim}400^{\circ}C$, integrated further to form the top electrode and pad, and finally characterized. The precursor solutions were composed of 20% perhydro-polysilazane ($SiH_2NH$)n, and 20% hydropolymethyl silazane ($SiHCH_3NH$)n in dibutyl ether. Annealing of the precursor films led to the compositional change of the two chemicals into silicon (di)oxides, which was confirmed by Fourier transform infrared spectroscopy (FTIR) spectra. It is thought that the different results that were obtained originated from the fact that the two precursors, despite having the same synthetic route and annealing conditions, had different chemical properties. Electrical measurement indicated that under 0.6MV/cm, a larger capacitance of $2.776{\times}10^{-11}$ F and a lower leakage current of 0.4 pA were obtained from the polysilazane-based dielectric films, as compared to $9.457{\times}10^{-12}$ F and 2.4 pA from the silazane-based film, thus producing a higher dielectric constant of 5.48 compared to 3.96. FTIR indicated that these superior electrical properties are directly correlated to the amount of Si-O bonds and the improved chemical bonding structures of the spin-on dielectric films, which were derived from a precursor without C. The chemical properties of the precursor films affected both the formation and the electrical properties of the spin-on dielectric film.
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50 nm 이상의 CMOS 기술에 이용되는 Spin-on Dielectric 박막 형성과 그 특성에 미치는 전구체의 영향
이완규,Lee, Wan-Gyu 한국진공학회 2011 Applied Science and Convergence Technology Vol.20 No.3
Polysilazane and polymethylsilazane based precursor films were deposited on Si-substrate by spin-coating, subsequently annealed at $150{\sim}850^{\circ}C$, and characterized. Structural analysis, shrink, compositional change, etch rate, and gap-filling were observed. Annealing the precursor films led to formation of spin-on dielectric films. C-containing precursor films showed that less loss of N, H, and C while less gain of O than that of C-free precursor films at $400^{\circ}C$, but more loss of N, H, and C while more gain of O at $850^{\circ}C$. Thus polysilazane based precursor films exhibited less reduction in thickness of 14.5% than silazane based one of 15.6% at $400^{\circ}C$ but more 37.4% than 19.4% at $850^{\circ}C$. FTIR indicated that C induced smaller amount of Si-O bond, non-uniform property, and lower resistance to chemical etching.
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다채널 단일톤 신호의 위상검출을 위한 Hybrid SoC 구현
이완규(Wan-Gyu Lee),김병일(Byoung-Il Kim),장태규(Tae-Gyu Chang) 대한전기학회 2006 대한전기학회 학술대회 논문집 Vol.2006 No.10
This paper presents a hybrid SoC design for phase detection of single tone signal. The designed hybrid SoC is composed of three functional blocks, i.e., an analog to digital converter module, a phase detection module and a controller module. A design of the controller module is based on a 16-bit RISC architecture. An I/O interface and an LCD control interface for transmission and display of phase measurement values are included in the design of the controller module. A design of the phase detector is based on a recursive sliding-DFT. The recursive architecture effectively reduces the gale numbers required in the implementation of the module. The ADC module includes a single-bit second-order sigma-della modulator and a digital decimation filter. The decimation filter is designed to give 98㏈ of SNR for the ADC. The effective resolution of the ADC is enhanced to 98㏈ of SNR by the incorporation of a pre FIR filter, a 2-stage cascaded integrator- comb(CIC) filter and a 3D-tab FIR filter in the decimation. The hybrid SoC is verified in FPGA and implemented in 0.35 CMOS Technology.
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이완규(Lee Wan Gyu),홍근표,장태규 대한전기학회 2006 대한전기학회 학술대회 논문집 Vol.2006 No.7
본 논문에서는 고속의 멀티미디어 Streaming data를 처리하기 위한 DSP 기반의 플랫폼을 설계하였다. 개발한 하드웨어는 오디오/비디오 데이터를 처리하는데 있어서 유연성과 확장성을 부여하기위하여 DSP를 사용하였으며 기존의 DSP플랫폼과 다르게 PC에 의존하지않는 독립적인 H/W를 만들기 위하여 ARM Processor를 사용하였다. 이는 저해상도, 저비트율의 오디오/비디오가 분리된 형태의 플랫폼이아닌 DSP기반의 독립적인 유연 플랫폼 구조를 통하여 고속 고해상도를 가능하게 한다. LAN을 통하여 전송받은 Streaming data는 PCI Interface를 이용하여 DSP로 전달되며 디코딩되어 출력된다.
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이완규(Lee Wan-Gyu) 한국형사소송법학회 2012 형사소송 이론과 실무 Vol.4 No.1
The law of illegal collection evidence exclusion was stipulated in the modified Criminal Procedure Code in 2007 so that the exclusion has been applied to material evidence. Previously, the evidence ability was recognized even if there was illegality in the process of obtaining the evidence. Thus, there was no deep and sufficient discussion regarding interpretation or legislation about urgent coercive measure. In such research situation, the law of illegal collection evidence exclusion was suddenly regulated and there have been frequent conflicts about illegality of urgent coercive measure but it became pressing to organize a theory to respond to diverse problematic situations in the field. Moreover, the process of legal obtainment of evidence should be supplemented in the investigation organizations if the law of illegal collection evidence exclusion would become regulated, but it is not enough so there is a blank in the field. It is urgent to legalize supplementary for irrational blank in the field. However, the theory of legislation is a separate theory that it is proper to solve parts those can be solve rationally with the theory of interpretation in existing law, so that the efforts for this is also pressing. The properties of post-warrant for urgent seizure and search in the existing law should be interpreted within the legal selection frame of the legislator based on the interpretation of constitution, and the problem of warrant system violation for applying newly introduced the law of illegal collection evidence exclusion also should be reviewed according to such theory of interpretation.
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