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광대역 광통신을 위한 $LiNbO_3$ 광변조기소자의 저손실 패키징 및 특성에 관한 연구
윤형도,이한영,윤대원,이경식,Yun, Hyeong-Do,Lee, Han-Yeong,Yun, Dae-Won,Lee, Gyeong-Sik 대한전자공학회 2001 電子工學會論文誌-SD (Semiconductor and devices) Vol.38 No.5
광대역 초고속 광변조기소자 패키지와 연계되는 주요 문제점인 die feature, pigtailing, suppression of RF package resonance, RF launcher approach, termination approach의 5가지 특성을 차례로 분석한 후 우수한 특성이 나올 수 있도록 소자를 패키징하였다. Microcoax에 의해 패키징된 변조기의 전기적 특성인 S21은 10㎓ 이상까지 -3㏈ 이상의 파워를 유지하였고, S11은 18㎓까지 -l5㏈를 유지하였다. 10㎓까지 광파워는 최대값으로부터 3㏈ 이상 떨어지지 않았고 50km 전송실험 후 소광비는 약 10.6㏈, 지터 값은 3.2ps로 양호한 값을 나타내어 패키징을 원만히 해결해야만 변조기의 변조 능력은 10㎓ 이상이 됨을 알 수 있다. The issues that influence the packaging of high-speed LiNbO$_{3}$ modulators are discussed, and packaging approaches that result in only minor degradation of the modulator's RF performance are described. The primary problems dealt in this paper, associated with high-speed device packaging, are fallen into the following five categories: die features, pigtailing, suppression of RF package resonance, RF launcher approach, termination approach. By considering factors to influence the modulator performance in packaging, a LiNbO$_{3}$ intensity modulator was fabricated and packaged to have S21 better than -3㏈ upto 10㎓ and S11 below -l5㏈ upto 18㎓.
윤형도,김성구,이한영,윤대원 대한전자공학회 1998 電子工學會論文誌, D Vol.d35 No.7
In this work was produced and analyzed a z-cut Ti:LiNbO$_{3}$ optical waveguide which applies for various optical devices.A waveguide channel with a thickness 8 .mu.m and a length 66,000.mu.m and a mach-zehnder interferometer type waveguide were fabricated at a diffusion temperature 1050.deg. C for 6-8hours in a wet $O_{2}$ environment. The resulting Ti:LiNbO$_{3}$ optical waveguide was measured to have a Ti-strip thickness of 950.angs. and low loss. Surfaces and cross-sections of a fabricated waveguide were analysed. The mode pattern anaysis revealed that the waveguide showed a single mode at a 1550nm wavelength. The effective dimension of the waveguide was calculated by measuring a gaussian profile; Wx=10.95.mu. and Wy=9.14.mu.m. a propagation loss, of 0.50dB/cm for a TM mode and 0.45dB/cm for a TE mode, was low enough to be accepatable for optical devices.
윤형도,한상필,김성구,임영민,윤대원 대한전자공학회 1997 電子工學會論文誌, D Vol.d34 No.11
The characteristics of optical waeguides and IDT electrodes fabricated for acousto-optic tunable filters (AOTE) used for optical communications were analyzed. A $Ti:LiNbO_3$ in-diffusion method was employed for the formation of the optical waveguide with a dimension of width $8\mu\textrm{m}$, length $30000\mu\textrm{m}$, and thickness $1150{\AA}$. The diffusion was carried at $1050^{\circ}C$ for 8 houss to pattern the optical waveguide with Ti. The resulted waveguide exhibited a single mode at a 1550nm wavelength range and its propagation loss was less than 0.5dB/cm. The width of IDT, with 10 SAW periods, was $5000\mu\textrm{m}$, S11 reflection characteristics and impedances of th eelectrodes deposited with Au were analyzed using a network analyzer; $48.1\Omega$ at th ecenter frquency of 193MHz for Au deposition thickness of $1500{\AA}$ and $50.7\Omega$ at the center frequency of 192MHz for au deposition thickness of $1600{\AA}$.
윤형도,이한영,구자현,장진현,박종훈,이경식,Yoon, Hyung-Do,Lee, Han-Young,Ku, Ja-Hyon,Chang, Jin-Hyeon,Park, Jong-Hoon,Lee, Kyung-Shik 대한전자공학회 1999 電子工學會論文誌, D Vol.d36 No.11
온도보상용 광섬유격자필터를 실현하기 위하여 서로다른 열팽창계수를 갖는 두물질을 이용하여 패키징을 한 후 -10도부터 70도 사이에서 온도변화실험을 하였다. 그결과 003nm이하의 파장변화율을 보여 상기온도 범위내에서 일반의 온도보상되지 않는 광섬유 격자에 비하여 약 30배의 온도보상 효과를 보였다. To temperature-compensate the Bragg wavelength of fiber grating filters two materials with different thermal expansion coefficients were depolyed for packaging. After temperature-compensation packaging the maximum difference of the Bragg wavelength in the temperature range of $-10^{\circ}C$ to $70^{\circ}C$ was 0.03nm, which is only about one thirtiety of the Bragg wavelength shift of the temperature-uncompensated fiber grating filter.
Ti:LiN$bO_3$ 광변조기 소자의 패키징 및 전기.광학적 특성
윤형도,김성구,이한영,윤대원 대한전자공학회 1998 電子工學會論文誌, D Vol.d35 No.6
Ti:LiNbO$_3$ 광도파로위에 CPW 전극 구조를한 광변조기 내부칩을 제작한 후 일련공정에 따라 패키징 작업을 하였고 소자의 전기적특성과 광학적특성을 측정하였다. 광변조기 패키징을 위하여 페룰, 보조용 LN블럭 및 글래스, 진동 및 흡수용패드, 알루미나피더의 부분품을 사용하였으며 피그테일링, Au 와이어본딩, 에폭싱, SMA커넥팅, 실링 작업을 수행하였다. 전기적 특성에서 S/sub 21/은 -3 dB 점에서 9.8GHz의 값을, S/sub 11/은 14.4 GHz 대에서 -8.9 dB 값을 나타내었다. 광학적 특성은 제작된 광도파로가 1550nm 파장대에서 단일모드를 만족하였고, 패키지후 소자의 삽입손실은 실온에서 4.3 dB 이였으며, 소자를 온도감압챔버에 넣은후 5∼45℃까지 온도변화를 주었을 때 4.3∼6.4 dB의 삽입손실을 보였다. E-O bandwidth 응답은 3dB점에서 7.8GHz를 나타내어 10Gbps급 광통신시스템에 응용할수 있음을 확인하였다. An optical modulator Ti:LiNbO$_3$optical waveguide and CPW electrode structure were fabricated. The optical modulator was packaged using components such as ferrules, dirmy LN block and glass, vibration and shock absorbption pad, and alumina feeder through processings of pigtailing. Au wire bonding, epoxing, SMA connecting, sealing. The electrical and optical characteristics were measured after packaging. The electrical properties of S$_{21}$ and S$_{11}$ were obtained as 9.8 GHz at -3 dB and -8.9dB at 14.4GHz, respectively. Optical waveguide prepared met requirements for a single mode at a 1550nm wavelength range. Insertion loss was 4.3dB at room temperature after packaging, and was varied 4.3~6.4dB at various temperatures, 5~45$^{\circ}C$. E-O bandwidth measurement showed 3dB optical response at 7.8GHz, which means that it is applicable for 10Gbps optical communicationon
윤형도,김성구,허현,윤대원,Yoon, Hyung-Do,Kim, Seong-Ku,Hyu, Hyun,Yoon, Dae-Won 대한전자공학회 1998 電子工學會論文誌, D Vol.d35 No.2
An optical modulator with CPW(coplanar waveguide) electode on Ti:LiNbO$_{3}$ optical waveguide wasfabricated and characterized. The electrical-optical bandwidth measurement showed an optical response of -3dBat 10 GHzand S$_{11}$ lessthan -10dB upto 20GHz. The typeical specifications are : 5.6V of driving voltage, 4.2dB of insertion loss and 30dB of on/off extinction. The eye pattern proved that the optical meduator, fabricated in this work, has properties good enough for application.