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PLD법에 의해 제조된 ZnO박막의 두께 변화에 따른 특성 연구
윤욱희,명재민,이동희,배상혁,윤일구,이상렬,Yun, Uk-Hui,Myeong, Jae-Min,Lee, Dong-Hui,Bae, Sang-Hyeok,Yun, Il-Gu,Lee, Sang-Ryeol 한국재료학회 2001 한국재료학회지 Vol.11 No.4
펄스레이저 증착법 (PLD)으로 (0001)면 사파이어 기판 위에 성장시킨 ZnO 박막의 두게 변화가 표면형상, 결정성 및 전기/광학적 특성에 미치는 효과에 대하여 조사하였다. SEM 및 XRD 분석을 통해 약 4000 의 두께에서 3차원 island들이 생성되며, 박막의 두께가 증가함에 따라 결정립의 크기가 증가하고, 결정성이 향상되었음을 알 수 있었다 상온에서의 PL 측정을 통해 두께가 증가함에 따라 ultraviolet(UV) 및 deep level emission peak의 강도가 급격히 증가함을 알 수 있었다. Hall측정 결과, 모든 박막들이 H형 전도도를 보였고, 운반자농도가 $10^{19}$ $cm^{-3}$ 이상이었으며, 두께가 증가할수록 운반자농도가 감소하여 약 4000 에서 포화되는 경향을 보였다. 따라서, 사파이어 기판 위에 증착시킨 ZnO 박막은 약 4000 의 두께에서 bulk ZnO의 특성을 나타내었다. In order to investigate the effect of thickness on the properties of ZnO thin films, a series of films having different thickness were deposited on (0001) sapphire by using pulsed laser deposition(PLD). SEM and XRD analyses showed that, as the film thickness increases, the grain size increased and the crystallinity improved. Room-temperature PL spectra also exhibited that the intensities of both ultraviolet and deep level emission Peaks increased as the film thickness increased. Hall measurements at room- temperature revealed that, as the film thickness changes from 400 to 4000 , the carrier concentration of the film showed sharp decrease, which that of thicker film gradually saturated. Therefore, it is concluded that the strain due to the lattice mismatch between substrate and film is fully relaxed around the thickness of 4000 .
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한경희(Kyong-Hee Han),허준행(Jun-Haeng Heo),윤일구(Il-Gu Yun),이강택(Kang-Taek Lee),강호정(Ho-Jeong Kang) 한국공학교육학회 2012 공학교육연구 Vol.15 No.1
The core issue of ethical problem solving in engineering is to understand what exactly happened and to define its nature. Problems often arise mostly in morally complex situations. Traditional philosophical theories usually focus on extreme conflicts of interest and suggest moral theory-centered problem solving methods. However, these methods are not only difficult to specifically apply to real situations, but also are likely to fail to deal with actual moral issues in engineering fields. This study aims to develop more desirable ethical problem solving methods, based on STS (Science and Technology Studies) and engineering ethics combined. First, we have examined the engineering ethics with implications of an STS perspective, then have analyzed traditional ethical problem solving methods in a critical point of view. This study will suggest a new ethical problem solving method named Matrix Guide, based upon those analyses. Specifically, this study classifies four stages of problem definition, analysis, solving, and feedback. Here, we focus on how to combine technological and non-technological factors in each stage, when we are facing morally complex situations in engineering sectors.
ScienceON
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