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ECR plasma 식각장치에서 CF4 에 의한 Si 의 식각반응에 관한 연구
윤민희,김종배,남기석,이상목,박원일,이기방 ( Min Hee Yun,Chong Bae Kim,Kee Suk Nahm,Sang Mok Lee,Won Il Park,Kee Bang Lee ) 한국화학공학회 1993 Korean Chemical Engineering Research(HWAHAK KONGHA Vol.31 No.3
The etching reaction of silicon with CF₄ was studied in a home-made ECR(electron cyclotron resonance) plasma etching system. Experimental data for the etch rates of p-Si(100) and n-Si(100) were measured and analyzed with varying etch time, etching pressure, CF₄ flow rate, the partial pressure of O₂ and etching temperature to investigate the characteristics of the etching system. The etch rates were almost the same for both p- and n-type Si(100) and increased with the increases in etching pressure and CF₄ flow rate, while the etch rate decreased because polymer film was formed on the Si surface at high pressure and reactive species were pumped away at high flow rate of CF₄. The etch rate became maximum when the amount of O₂ added to CF₄ was about 15% and showed uniformity. The etching profile showed anisotropic etching at low pressure and isotropic etching at high pressure.
윤민희(Min-Hee Yun) 현대미술사학회 2002 현대미술사연구 Vol.14 No.-
Softness of the material in modern arts is expressed through the various type of media such as fiber art, space, environment, act and play, not simply beyond the characteristics of the soft material, but beyond the concept of soft sculpture or craft. This study is based on soft material & woman work in modern art. In this study, the dissolution of the genres and theirs boundaries, the trend of circulating expression of arts, open concept of mutual communication and the trend of extended expression have been reviewed by studying the important trends of expressions in modern arts since 1960's focused on the material characteristics of fiber, typical of expression trend of the mild material. This study is centered on the chronological analysis of visual works of arts. is studied. The modeling analysis for the works of arts is performed by studying the characteristic trend of expression of the renowned woman artists over the periods from 1960's to 1990's.