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연속 공정 PVD 방법에 의한 Coated Conductor 제조
고락길,정준기,김호섭,하홍수,송규정,박찬,유상임,문승현,김영철,Ko, Rock-Kil,Chung, Jun-Ki,Kim, Ho-Sup,Ha, Hong-Soo,Shi, Dongqi,Song, Kyu-Jeong,Park, Chan,Yoo, Sang-Im,Moon, Seung-Hyun,Kim, Young-Cheol 한국전기전자재료학회 2004 전기전자재료학회논문지 Vol.17 No.11
Continuous physical vapor deposition (PVD) method is one of many processes to fabricate long length coated conductor which is required for successful large-scale application of superconducting power devices. Three film deposition systems (pulsed laser deposition, sputtering, and evaporation) equipped with reel-to-reel(R2R) metal tape moving apparatus were installed and used to deposit multi-layer oxide thin films. Both RABiTS and IBAD texture templates are used. IBAD template consists of CeO$_2$(PLD)/YSZ(IBAD) on stainless steel(SS) metal tape, and RABiTS template has the structure of CeO$_2$/YSZ/Y$_2$O$_3$ which was continuously deposited on Ni-alloy tape using R$_2$R evaporation and DC reactive sputtering in a deposition system designed to do both processes. 0.4 m-long coated conductor with Ic(77 K) of 34 A/cm was fabricated using RABiTS template. 0.5 m and 1.1 m-long coated conductor with Ic(77 K) of 41 A/cm and 26 A/cm were fabricated using IBAD template.
RABiTS 위에 PLD 방법으로 증착된 YBCO 초전도 박막 선재의 제조
고락길,정준기,하홍수,김호섭,송규정,박찬,문승현,유상임,김영철,Ko Rock-Kil,Shi Dongqi,Chung Jun-Ki,Ha Hong-Soo,Kim Ho-Soup,Song Kyu-Jeong,Park Chan,Moon Seung-Hyun,Yoo Sang Im,Kim Young-Cheol 한국초전도학회 2004 Progress in superconductivity Vol.6 No.1
YBCO coated conductor is one of the most promising materials as a new generations wire especially for practical power applications. In this work, $YBa_2$$Cu_3$$O_{7}$ -$\delta$/(YBCO) coated conductors (CC) were deposited by pulsed laser deposition (PLD) from buffer layers to superconducting layer on hi-axially textured metal tape. The oxide multilayer buffered substrate of architectures of $CeO_2$/$YSZ/Y_2$$O_3$ was fabricated by PLD at steady status. Then YBCO layer was deposited on RABiTS substrate by stationary and reel-to-reel (R2R) continuous process and we compared with deposition conditions of both processes. The degree of texture of each layer was investigated using X-ray diffraction including $\theta$-2$\theta$ scans, $\omega$-scans and $\Phi$-scans analysis. Their surface morphology was observed by scanning electron microscopy (SEM). The FWHM of the X-ray $\Phi$-scans and $\Phi$-scans indicated that YBCO and buffer layers closely replicate the in-plane and out-of-plane texture of metal tape. Critical current (Ic) at 77 K, self-field of 75.8 A/cm-width, critical temperature (Tc) of 85 K, and critical current density (Ic) of 3.7 MA/$\textrm{cm}^2$ were measured from coated conductor deposited by stationary process. And coated conductor deposited by R2R continuous process had Ic of 57.5 A/cm-width, Tc of 86.5 K and Jc of 2.0 MA/$\textrm{cm}^2$. The film also exhibits a homogeneous and dense surface morphology.