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반도체·디스플레이 장비용 바닥 환경진동허용규제치의 실험적 평가방법 고찰
안채헌,최정희,박준순,박민수,An, Chae Hun,Choi, Jeong Hee,Park, Joon Soon,Park, Min Su 한국반도체디스플레이기술학회 2021 반도체디스플레이기술학회지 Vol.20 No.1
The semiconductor and display equipment demands an ultra-fine precision of several nm to several ㎛, and the scale is getting smaller due to the explosive development. The manufacturing process equipment for such products with ultra-fine precision is very sensitive to ultra-small vibrations flowing from the floor, resulting in problems of production defects and yield degradation. The vibration criteria are a standard that regulates the vibration environment of the floor where such precision process equipment will be installed. The BBN vibration criteria defined the allowable vibration velocity level in the frequency domain with a flat and inclined line and presented a rating according to it. However, the actual vibration criteria have appeared with various magnitudes in the frequency domain according to the dynamic characteristics of individual equipment. In this study, the relationship between the relative motion of two major points in the equipment and the vibration magnitude of the floor is presented using the frequency response function of a simple 3-DOF model. It is describing the magnitudes according to the frequency of the floor vibration that guarantees the allowable relative motion and this can be used as the vibration criteria. In order to obtain the vibration criteria experimentally a method of extracting through a modal test was introduced and verified analytically. It provides vulnerable frequency and magnitude to floor vibration in consideration of the dynamic characteristics of individual equipment. And it is possible to know necessary to improve the dynamic characteristics of the equipment, and it can be used to check the vibration compatibility of the place where the equipment will be installed.
안채헌,임경화 한국소음진동공학회 2003 한국소음진동공학회 논문집 Vol.13 No.3
Dynamic analysis using impulse responses is formulated to estimate effect of slider rail shape on dynamic responses in near-field optical recording drive. Impulse responses are obtained on numerical nonlinear model including rigid motion of a slider and fluid motion of an air bearing under the slider. Dynamic characteristics of slider motion are evaluated by utilizing the decay ratio of impulse responses and modal frequencies from frequency response functions. The dynamic characteristics of the designed NFR slider are checked by comparing those of a HDD slider(Nutcracker). Also, sensitivities of slider Position conditions and rotation speed on the dynamic characteristics are investigated.
안채헌(An, Chae-Hun),임광혁(Yim, Kwang-Hyeok),진경복(Jin, Kyong-Bok),임경화(Rim, Kyung-Hwa) 한국소음진동공학회 2007 한국소음진동공학회 논문집 Vol.17 No.7
In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.