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반도체 공정을 고려한 유한요소해석에 의한 MEMS 압전 작동기의 동특성 해석
김동운(Dong Woohn Kim),송종형(Jonghyeong Song),안승도(Seungdo An),우기석(Kisuk Woo) 한국소음진동공학회 2013 한국소음진동공학회 학술대회논문집 Vol.2013 No.4
For the purpose of rapid development and superior design quality assurance, sophisticated finite element model for SOM(Spatial Optical Modulator) piezo actuator of MOEMS device has been developed and evaluated for the accuracy of dynamics and residual stress analysis. Parametric finite element model is constructed using ANSYS APDL language to increase the design and analysis performance. Geometric dimensions, mechanical material properties for each thin film layer are input parameters of FE model and residual stresses in all thin film layers are simulated by thermal expansion method with psedu process temperature. 6<SUP>th</SUP> mask design samples are manufactured and 1<SUP>st</SUP> natural frequency and 10V PZT driving displacement are measured with LDV. The results of experiment are compared with those of the simulation and validate the good agreement in 1<SUP>st</SUP> natural frequency within 5% error. But large error over 30% occurred in 10V PZT driving displacement because of insufficient PZT constant d31 measurement technology.