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최천기 ( Chaun Gi Choi ),김우수 ( Woo Soo Kim ),배병수 ( Byeong Soo Bae ) 대한금속재료학회 ( 구 대한금속학회 ) 2005 ELECTRONIC MATERIALS LETTERS Vol.1 No.1
In this paper, we report the fabrication of fluorinated organic-inorganic hybrid materials and the investigation of the effects of fluorine contents on the dielectric constant of the fluorinated organic-inorganic hybrid materials. Thickness of the hybrid thin film was about 500 nm by single spin coating and the adhesion between the substrate and the hybrid film was good. Dielectric constants of hybrid thin films decreased from 4.2 to 2.98 (at 1 MHz) as the fluorine content increased.