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PECVD로 제조된 비정질 질화탄소 박막의 물성에 미치는 열처리 효과
문형모,김상섭,Moon, Hyung-Mo,Kim, Sang-Sub 한국재료학회 2003 한국재료학회지 Vol.13 No.5
Amorphous carbon nitride films deposited on Si(001) substrates by a plasma enhanced chemical vapor deposition (PECVD) technique using CH$_4$and $N_2$as reaction gases were thermally annealed at various temperatures under$ N_2$atmosphere, then their physical properties were investigated particularly as a function of annealing temperature. Above $600^{\circ}C$ a small amount of crystalline $\beta$-$C_3$$N_4$ phase evolves, while the film surface becomes very rough due to agglomeration of fine grains on the surface. As the annealing temperature increases, both the hardness and the $sp^3$ bonding nature are enhanced. In contrast to our expectation, higher annealing temperature results in a relatively higher friction mainly due to big increase in roughness at that temperature.
PECVD로 제조된 비정질 질화탄소 박막의 특성에 미치는 증착변수의 영향
문형모,김상섭,Moon, Hyung-Mo,Kim, Sang-Sub 한국재료학회 2003 한국재료학회지 Vol.13 No.3
Amorphous carbon nitride films were deposited on Si(001) substrates by a plasma enhanced chemical vapor deposition technique (PECVD) using $CH_4$and $N_2$as reaction gases. The growth and film properties were investigated while the gas ratio and the working pressure were changed systematically. At 1 Torr working pressure, an increase in the $N_2$partial pressure results in a significant increase of the deposition rate as well as an apparent presence of C ≡N bonding, while little affecting the microstructure and amorphus nature of the films. In the case of changing the working pressure at a fixed $N_2$partial pressure of 98%, a film grown at a medium pressure of $1${\times}$10^{-2}$ Torr shows the most prominent C=N bonding nature and photoluminescent property.
문형모,이성호 釜山大學校 都市問題硏究所 2003 都市硏究報 Vol.14 No.-
Geography Information System is devided to many details fields Urban Information System, Mlitary Information System etc. Theses detailed fields are connected each other an National Geography Information System. Now Geography Information System is being used in many fields with Urban Information System information of all field is being constructed to network. The purpose of this study is to use digital map for Land Information System. These applicable digital maps have a merit to anlize the regionality when one selected a data structure appropriate to a features of an objective region. GIS software which solve these problems of data structure being developed. The suitability of land use that are devided into urban areas(residential, commercial and industrial) and green areas was analyzed using overlay method by constructed database using digital map. The method and process for grafting digital map on Land Information System were examined and related environmental factors and relative importance among them were investigated on the base of preceding researches.