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광학적 신호감지의 유전박막 다이아프레임을 이용하는 압력센서
김명규,유양욱,박동수,김진섭,이정희,손병기 ( Myung Gyoo Kim,Yang Woog Ryu,Dong Soo Park,Jin Sup Kim,Jung Hee Lee,Byung Ki Sohn ) 한국센서학회 1996 센서학회지 Vol.5 No.4
Optical intensity-type pressure sensor was fabricated by coupling optical fiber with a micromachined thin dielectric diaphragm, which consists of a 300 nm thick SiO₂ layer sandwiched between 150 nm thick top and bottom Si₃N₄ layers. At the wavelength of the sensor light source near 1.3 ㎛, the optical transmittance of the diaphragm was about 50 %, but it was decreased to a few percents by depositing 1,000 Å. thick gold(Au) layer on the diaphragm, which is sufficient enough to be used as a light reflection layer of the sensor. From the optical output power-pressure characteristics of the sensors, it was found that the output power linearly decreased with increasing applied pressure from 0 to 77 torr regardless of the diaphragm size. The respective sensitivities were 0.52, 0.65, and 0.77 nW/torr for the diaphragm sizes of 3 X 3, 4 x 4, and 5 X 5 ㎟, indicating that the sensitivity increases as diaphragm size decreases.
김명규(Myung-Gyoo Kim),권대혁(Dae-Hyuk Kwon),김진변(Jin-Sup Kim),박재희(Jae-Hee Park),이정희(Jung-Hee Lee),손병기(Byung-Ki Sohn) 한국진공학회(ASCT) 1997 Applied Science and Convergence Technology Vol.6 No.3
실시콘 미세가공기술로 형성된 프레임 모양의 실리콘 기판에 의해 지지되는 100 ㎚-Au/30 ㎚-NiCr/150 ㎚-Si₃N₄/300㎚-SiO₂/150㎚-Si₃N₄ 광반사막을 제조하였으며, 이것을 광섬유와 결합하여 강도형 다모드 광섬유 압력센서를 제작하고 그 특성을 조사하였다. Si₃N₄/SiO₂/Si₃N₄ 다이아프램을 광반사막으로 사용하기 위하여 이 다이아프램의 뒷면에 NiCr 및 Au 박막을 각각 진공증착하여 광반사막에서의 광투과에 의한 광손실을 수 %로 감소시킬 수 있었다. 유전체 다이아프램의 상하에 각각 있는 Si₃N₄막은 KOH 수용액에 의한 실리콘 이방성 식각시 자동시각 정지층 역할을 하여 다이아프램 두께의 재현성이 우수하였다. 다이아프램의 크기가 3×3 ㎟, 4×4 ㎟ 및 5×5 ㎟인 센서는 각각 0~126.64 kPa, 0~79.98 kPa 및 0~46.66 kPa의 압력범위에서 선형적인 광출력-압력 특성을 나타내었으며, 이들 센서의 압력감도는 각각 약 20.69 nW/kPa, 26,70 nW/kPa 및 39.33 nW/kPa로서, 다이아프램의 크기가 증가할수록 압력감도도 증가하였다. An optical intensity-type pressure sensor has been fabricated by coupling multimode optical fiber with 100 ㎚-Au/30 ㎚-NiCr/150 ㎚-Si₃N₄/300 ㎚-SiO₂/150 ㎚-Si₃N₄ optical reflection layer supported by micromachined frame-shape silicon substrate, and its characteristics was investigated. For the application of Si₃N₄/SiO₂/Si₃N₄ diaphragm to the optical reflection layer of the sensor, NiCr and Au films were deposited on the backside of the diaphragm by thermal evaporation, respectively, and thus optical loss caused by transmission in the reflection layer could be decreased to a few percents. Dielectric diaphragms with uniform thickness were able to be also reproduced because top- and bottom-Si₃N₄ layer of the diaphragm could automatically stop silicon anisotropic etching. The respective pressure ranges in which the sensor showed linear optical output power-pressure characteristics were 0~126.64 kPa, 0~79.98 kPa, and 0~46.66 kPa, and the respective pressure sensitivities of the sensor were about 20.69 nW/kPa, 26.70 nW/kPa, and 39.33 nW/kPa, for the diaphragm sizes of 3×3 ㎟, 4×4 ㎟, and 5×5 ㎟, indicating that the sensitivity increases as diaphragm size increases.
박재희,김명규,손병기 ( Jae Hee Park,Myung Gyoo Kim,Byung Ki Sohn ) 한국센서학회 1996 센서학회지 Vol.5 No.6
The feasibility of producing a practical buried fiber optic sensor with high sensitivity for detecting intruders is demonstrated. Experiments were carried out with the use of an all fiber Michelson interferometer, the sensing arm of which was buried in sand. When the sensing arm was buried 8 inches deep in sand, the pressure length product required for a half fringe shift in the sensor output was 1.09 kPa·m. The relation between the applied weight and the phase change was. almost linear. Experimental results indicated that the sensitivity of the optical fiber sensor was sufficient to detect people on foot and vehicles passing over the buried fiber.
박재희,김명규,손병기 ( Jae Hee Park,Myung Gyoo Kim,Byung Ki Sohn ) 한국센서학회 1996 센서학회지 Vol.5 No.6
In order to develop gas sensor operating at low temperature, thick film Co₃O₄ sensor was fabricated. Co₃O₄ powder was prepared by precipitation from cobalt nitrate solution and the powders containing ethylene glycol as a binder was screen-printed on alumina substrate. Characteristics of sensitivity, response time, and recovery were investigated in terms of binder content and heat treating conditions. The Co₃O₄ sensor contained 15% ethylene glycol and heat-treated at 300℃ for 24hr showed the highest sensitivity at the operating temperature of 250℃. Its sensitivity of 1.1 to 5000ppm butane gas was very high, as compared with 0.8∼0.85 at the operating temperature of 350∼400℃ for a commercial SnO₂ gas sensor. It is found that response time was fast, but recovery was poor for the sensor.
광섬유 Fabry - Perot 간섭형 센서 제조를 위한 TiO2 반사막의 형성 및 그 특성
박동수,김명규,김창원,이정희,강신원,손병기 ( Dong Soo Park,Myung Gyoo Kim,Chang Won Kim,Jung Hee Lee ) 한국센서학회 1995 센서학회지 Vol.4 No.3
For the fabrication of high sensitive intrinsic fiber optic Fabry-Perot interferometeric sensor, the deposition conditions of TiO₂ thin film used to the internal mirrors of the sensor were investigated. The TiO₂ film deposited by RF magnetron sputter had higher refractive index (2.36∼2.98) and better stoiciometry (O/Ti = 2) than that deposited by e-beam evaporator. In the case of forming TiO₂ internal mirror by using fusion splicing technique, the TiO₂ reflection mirror deposited by RF magnetron sputter in the condition of 120W RF power showed high reflectance and excellent controllability of reflection power. The fabricated intrinsic fiber optic Fabry-Perot interferometer with two TiO₂ internal mirrors deposited under the condition showed very stable fringe patterns. It is. therefore, expected that the interferometer will be applicable to various high precision sensors.
김창원,박동수,김명규,이정희,강신원,손병기 ( Chang Won Kim,Dong Su Park,Myung Gyoo Kim,Jung Hee Lee,Shin Won Kang,Byung Ki Sohn ) 한국센서학회 1995 센서학회지 Vol.4 No.2
A Michelson interferometric AC current sensor has been fabricated by using a single mode optical fiber and a cylindrical PZT tube of which a radial dimension varies with applied voltage. The signal processing scheme used in this work, measures the magnitude of AC current regardless of the frequency of the current. An AC current is measured by counting the number of interference fringe during half cycle of the AC current. he number of interference fringes varies linearly with the magnitude of the current and the error range is within 5% at the temperature range from -20 ℃ to 80 ℃.
스트레스균형이 이루어진 멤버레인 및 박막 열전대를 응용한 유체센서
안영배,김진섭,김명규,이종현,이정희 ( Yeong Bae Ahn,Jin Sup Kim,Myung Gyoo Kim . Jong Hyun Lee . Jung Hee Lee ) 한국센서학회 1996 센서학회지 Vol.5 No.6
A flow sensor has been fabricated by preparing thin film Pt-heater and Bi-Sb thermocouples array on 150 nm-Si₃N₄/300 nm-SiO₂/150 nm-Si₃N₄ dielectric diaphragm which has low thermal conductivity and balanced stress with silicon substrate for the purpose of improving the thermal isolation between heater and silicon substrate. Pt-heater showed nonlinear I-V characteristics due to the thermal isolation effect of the diaphragm. Its temperature coefficient of resistance was about 0.00378 /℃ and Seebeck coefficient of Bi-Sb thermocouple was about 97 ㎶/K. The sensor showed that thermoelectric voltage decreased as thermal conductivity of gas increased, and flow sensitivity increased as heater voltage increased or as the distance between heater and thermocouple decreased. When heater voltage was about 2.5 V, N₂-flow sensitivity and thermal response time of the sensor were about 1.27 mV·(scan)^(-1/2) and 0.13 sec., respectively.
N/O/N 박막 다이아프레임을 이용한 광섬유 압력센서의 제작 및 그 압력특성
유양욱,김명규,박동수,김창원,김진섭,이정희,손병기 경북대학교 센서기술연구소 1995 센서技術學術大會論文集 Vol.6 No.1
The 0.6 μm N/O/N triple layer, Si_(3)N_(4)(150 nm)/SiO_(2)(300 nm)/Si_(3)N_(4)(150 nm), was deposited on silicon substrate and the N/O/N thin film diaphragm was formed using anisotropic etching technique. The stress of the formed diaphragm was very small with temperature variations. Combining this diaphragm and the optical fiber, intensity-type pressure sensor was fabricated and its pressure characteristics were investigated. The relation between the optical output power, inversely proportional to the deflection of the diaphragm, and the applied pressure was almost linear in 0~77 torr range.
매설형 광섬유 Fabry-Perot 간섭형 센서의 제조 및 특성
이호일,이경진,김명규,박재희,강신원 경북대학교 센서기술연구소 1998 센서技術學術大會論文集 Vol.9 No.1
Fiber-optic Fabry-Perot Interferometric(FFPI) sensor was embedded in the scaled down reinforced concrete structure and its characteristics were investigated. The intrinsic FFPI consists of two internal mirrors 11 mm apart in the optical fiber and TiO_(2) thin film was sputtered for the mirrors. The sensor showed excellent optical interference characteristics and the phase shift of the sensor output signal was proportional to the external loads applied to the structure. Three sensors at different points were multiplexed by the TDM method, so the deformation to the external loads at each point in the structure could be simultaneously monitored.