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TiS$i_2$ 박막의 열안정성에 미치는 막 스트레스의 영향
김영욱,김영욱,고종우,이내인,김일권,박순오,안성태,이문용,이종길,Kim, Yeong-Uk,Kim, Yeong-Uk,Go, Jong-U,Lee, Nae-In,Kim, Il-Gwon,Park, Sun-O,An, Seong-Tae,Lee, Mun-Yong,Lee, Jong-Gil 한국재료학회 1993 한국재료학회지 Vol.3 No.1
단결정 실리콘위에 스퍼터법으로 증착된 티타니움막을 급속가열로에서 고상반응에 의해 형성시킨 면저항 1.2 ohm/sq. 내외의 TiS$i_2$ 박막에 있어서 열안정성을 상부절연막의 유무 및 종류에 따라 조사하였다. 상부절연막은 상압 CVD로 증착한 USG(Undoped Silicate Glass, Si$i_2$) 막과 플라즈마 CVD법으로 증착한 PE-SiN(S$i_3$$N_4$)막을 사용했다. 열안정성 평가는 90$0^{\circ}C$에서 시간을 달리하여 TiS$i_2$막, PE-SiN막, USG막의 스트레스는 각각 1.3${\times}{10^{9}}$, 1.25 ${\times}{10^{10}}$, 2.26 ${\times}{10^{10}}$ dyne/c$m^2$의 인장응력을 나타내었다. 응집현상은 TiS$i_2$의 응집현상은 Nabarro-Herring 마이크로 크리프에 의한 원자의 확산관점에서 검토되었다. Abstract The effect of the film stress on the thermal stability of TiSi, films under the dielectric overcoat was investigated. TiS$i_2$ films with the sheet resistance of 1.2 ohm/sq. were produced by a solid-state reaction between sputtered Ti film and single-crystalline Si in an RTA (rapid thermal anneal) machine. Dielectric overcoats such as the USG (Undoped Silicate Glass, Si$O_2$) film and the PE-SiN(S$i_3$$N_4$) film were deposited by AP-CVD and PE-CVD, respectively, on the TiS$i_2$ film. The thermal stability of the TiSi, film was evaluated by changes in the sheet resistance, film stress and microstructure after furnace anneals at 90$0^{\circ}C$. Agglomeration of the TiSi2 film high temperatures results in the increase of sheet resistance and the decrease of tensile stress of TiSi, film. The stress level of the TiSi" PE-SiN and ~SG films at 90$0^{\circ}C$C was 1.3${\times}{10^{9}}$, 1.25 ${\times}{10^{10}}$, 2.26 ${\times}{10^{10}}$ dyne/c$m^2$ in tensile, respectively. Dielectric films deposited by CVD on TiSi, was effective on preventing agglomeration of TiSi,. The PE-SiN film mproved the thermal stability of TiSi, more effectively than the AP-CVD USG film. It is considered that agglomeration of the TiS$i_2$ film under the stress of dielectric overcoat at high temperature can be caused by a diffusional flow of atom called Nabarro-Herring microcreep.reep.
김영욱 민족음악학회 2004 음악과 민족 Vol.27 No.-
This paper studies the oriental ideas of music education through Yegi (『禮記』) yueh-chi(『樂記』). There are two important points in the oriental ideas of music education from a Confucianist's point of view. First, the core of the oriental ideas of music education may be understood through the Chinese Confucianist's ideas of music education. Second, the current Korean music education gave too much importance to European theories of arts and music education. Under the present circumstances, it is very important to study the idealogical origin of Korean traditional music education. This paper tries to find the idealogical roots of Korean traditional music education with the help of the Confucianist's ideas of music, origin of oriental ideas of music education.
김영욱,이철호,한억,태원택,이준경 한국콩연구회 1985 韓國콩硏究會誌 Vol.2 No.2
루우핀콩 蛋白質 濃縮物(LPC)을 利用한 豆乳에 7 가지 乳酸菌과 13가지 유산균 組合을 接種하여 酸生成能力을 검토하고 루우핀 豆乳에 炭水化物 分解 酸素로 處理한 것과 하지 않은 것의 差異를 살펴보았다. 그 結果, L. acidophilus, L. casei, S. Lactis, L. mesenteroides, L. acidophilus와 S. thermophilus의 混合菌과 S. lactis와 L. mesenteroides의 混合菌을 선정하여 炭水化物 분해효소로 處理한 루우핀豆乳와 處理하지 않은 루우핀 豆乳에서의 유산균 生育과 酸生成 能力을 調査하였다. 酵素慮理에 의한 루우핀 豆乳의 糖組成은 處理하지 않은 루우핀 豆乳에 比하여 Fructose가 8.2倍, Glucose가 3.0倍 그리고 maltose가 2.3倍였으며 總遊離糖 含量은 1.5倍였다. 酵素처리하지 않은 루우핀 豆乳에서는 L. mesenteroides가 最大 生菌數 1.O×10^9/㎖ 最終 pH 4.40 및 最終 酸度 0.46 %를 나타내어 가장 우수하였으며 酵素 處理한 루우핀 豆乳에서는 L. acidophilus와 S. thermophilus의 混合菌이 最大 生菌數 1.9×10^9/㎖, 最終 pH 3.69 및 最終 酸度 1.13 %를 보여주어 가장 뛰어난 乳酸菌 組合임을 나타내었다. 유산醱酵를 통한 루우핀 豆乳의 物理的 性質의 變化를 살펴보면 大體로 醱酵가 進行됨에 따라 酵素 처리하지 않은 루우핀 豆乳 基質에서는 粘度가 증가하였고 酵素처리한 基質에서는 減少하는 傾向을 나타내었다. 또한 발효된 루우핀豆乳의 粘度변화와 침전속도는 乳酸菌에 따라 다양함을 보여 주었다. 官能 檢査 結果에서 효소 처리한 루우핀 豆乳를 S. lactis 및 L. casei로 배양한 것과 S.Lactis와 L. mesenteroides 및 L. acidophilus와 S. thermophilus의 混合菌으로 倍養한 것이 비교적 우수한 風味를 지녔으며 乳酸菌 음료로서의 使用 可能性이 確認되었다. Seven different strains of lactic bacteria and 13 combinations of these microorganisms were tested for their acid forming capacity on a vegetable milk made from lupinseed protein concentrate (LPC). L. acidophilus, L. casei, S. lactis, L, mesenteroides, mixed culture of L. acidophilus and S thermophilus, and mixed culture of S. lactis and L. mesenteroides were selected and further tested for their growth pattern and acid forming property on lupinseed milk both untreated and partly hydrolized one with carbohydrate decomposing enzymes. The enzyme hydrolized lupinseed milk had 1.5 folds of total free sugar; 8.2 folds of fructose, 3 folds glucose, 2.3 folds maltose, compared to the untreated lupinseed milk. For the untreated lupinseed milk, L. mesenteroides was appeared to he most suitable microorganism having the maximum cell concentration of 1.0 × 10^9/㎖ and the final pH 4.40 with the acidity 0.46%. For the enzyme treated lupinseed milk, mixed culture of L. acidophilus and S. thermophilus showed the best performance having 1.9 × 10^9/㎖ maximum cell number and the final pH and acidity were 3.69 and 1.13%, respectively. Lactic acid fermentation altered the physical property of lupinseed milk; by fermentation the viscosity generally increased with untreated lupinseed milk, but decreased with enzyme hydrolized one. The viscosity change and sedimentation rate of fermented milk varied with the type of lactic bacteria. The results of sensory evaluation indicated that S. lactis. L. casei, mixed culture of S. lactis and L. mesenteroides, and mixed culture of L. acidophilus and S. thermophilus, grown on enzyme hydrolized lupinseed milk, could produce acceptable lactic acid beverage.