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2차원 $90^{\circ}$ 곡관에서 균일전단류의 특성에 대한 실험적 연구 (2) -난류유동장-
임효재,성형진,정명균 대한기계학회 1995 대한기계학회논문집 Vol.19 No.3
An experimental study is made of turbulent shear flows in a nearly two-dimensional 90.deg. curved duct by using the hot-wire anemometer. The Reynolds normal and shear stresses, triple velocity products, integral length scales, Taylor micro length scales and dissipation length scales are measured and analyzed. For a positive shear at the inlet, the afore-mentioned turbulence quantities are all suppressed. However, when the inlet shear flow is negative, they are augmented, i.e., the convex curvature suppresses the turbulence whereas the concave curvature augments it. It is found that the curvature effects are rather sensitive to the triple velocity products than the Reynolds stresses. The evolution of turbulence under the curvature with the different shear conditions is well described by the modified curvature parameter S' and the non-dimensional development time ${\tau}$.'
개선형 ISPM에서 공기역학적 렌즈의 최적조건에 대한 실험적 연구
임효재,차옥환,설용태 한국반도체디스플레이기술학회 2004 반도체디스플레이기술학회지 Vol.3 No.2
An experimental study was conducted on the optimal configuration and size of ADFL(Aerodynamic Focusing Lens) which used in modified ISPM(In-Situ Particle Monitoring). The particle counting efficiency has been known as a function of distance and size of ADFL, thus we varied these parameters to find out the optimum values. From a result of experiment, it was found that two lenses and 6mm space between them showed a maximum particle measuring efficiency. To apply this modified ISPM to semiconductor manufacturing field, we need more experiment about the pressure change, flow rate, and input particle size.