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      • 복합 운동프로그램이 초등학생의 신체구성, 혈중지질 및 체력에 미치는 영향

        전종귀,이왕록,박희근,정준현,이영란,신동원,이경숙 충남대학교 체육과학연구소 2006 體育科學硏究誌 Vol.23 No.1

        The purpose of the present study was to examine the effects of combined training on the changes of body composition, blood lipid profile and fitness in elementary school students. Thirty subjects participated in the present study. The subjects were divided into two groups either exercise group for 10weeks(15n) or control group for 10weeks(l5n) The results were described as follows; 1) There were significant differences in the body weight and lean body mass after the exercise program between two groups. 2) There were no significant differences in the blood TC, HDL-C, LDL-C, TG concentration after the exercise program between two groups. 3) There were significant differences in the sit-up and flexibility after the exercise group between two groups. In conclusion, it might be thought that the combined training improved the levels of body composition and health-related fitness in elementary subjects.

      • KCI등재

        다중흐름모형에서 정책기업가의 역할 시론적 연구 : 공무원 범죄에 관한 몰수 특례법(전두환 추징금 사례 1997~2013)의 개정 논의를 중심으로

        Dong Kyu Lee,Dong Geun Yum,Jun Ho Lee,Kyoung Rok Kim 위기관리 이론과 실천 2014 Crisisonomy Vol.10 No.11

        This study examines the preceding researches on the policy entrepreneurs at home and abroad and after discussing the policy entrepreneurs, analyzes the flow of the revision process of the partial revised bill(hereinafter referred to as Chun Doo-hwan Collection Law) of the confiscation special law about public official crime by administration using the multiple streams framework model, and this researcher attempts to analyze the activities of how the policy entrepreneur among diverse policy actors who plays an important role in opening policy window influenced the revision process in the process of enacting the partial revised bill of the confiscation special law about public official crime. And how the policy window of the partial revised bill of the confiscation special law about public official crime that was not opened in the previous administrations came to be opened in the Park Geun-hye administration is analyzed. The results of this study confirmed that in the previous administrations the policy entrepreneur to open the policy window did not appear but in the Park Geun-hye administration President Park Geun-hye played the role of the policy entrepreneur, producing Chun Doo-hwan 본 연구는 정책기업가 대한 국내외 선행연구를 검토하고, 정책 기업가에 대한 심도있는 논의를 하고자 하였다. 또한 공무원 범죄에 관한 몰수 특례법 일부 개정안(이하 전두환 추징법)의 정책과정을 다중흐름모형을 이용하여 각 정권별로 흐름을 분석하였다. 공무원 범죄에 관한 몰수 특례법 일부 개정안의 정책결정 과정에서, 정책기업가 (policy entrepreneur)가 어떻게 중요한 영향을 미칠 수 있는 활동을 할 수 있었는지에 대한 분석을 시도하고자 한다. 그리고 이전 정권에서는 열리지 않던 ‘공무원 범죄에 관한 몰수 특례법’ 일부 개정안에 대한 정책의 창이 현재 박근혜 정부에 와서는 어떻게 열리게 되었는지에 대한 분석을 한다. 연구결과, 이전의 정권들에서는 정책의 창을 여는 정책기업가가 나타나지 않았고, 박근혜 정부에서는 박근혜 대통령이 정책기업가의 역할을 하여 전두환 추징법이 산출되었다는 것을 확인하였다.

      • 지역순환형 자립발전전략

        이성근 ( Seong Keun Lee ),나중규 ( Jung Gyu Na ),최영은 ( Young Eun Choi ),임규채 ( Gyu Chae Im ),최용준 ( Yong Jun Choi ),이정미 ( Jungmi Lee ),홍근석 ( Geun Seok Hong ) 영남대학교 한국균형발전연구소(구 영남대학교 영남지역발전연구소) 2013 한국균형발전연구 Vol.4 No.1

        최근 우리나라의 지역개발이나 정책에 있어 과거의 중앙정부 중심, 물적 성장 중심의 개발 패러다임에서 벗어나 자립적 역량강화, 지역 간 연계협력, 융합화 등이 강조되고 있다. 이에 본 연구의 목적은 지방자치제가 실시되었으나 지방의 자치기반이 취약하여 지역간 불균형 발전이 심화되는 가운데, 박근혜정부의 출범과 함께 최근 국내외적으로 변화하고 있는 지역발전의 패러다임에 직면하여 지방분권과 균형발전에 토대를 둔 지역 주도의 자립적 지역발전을 이루기 위한 구체적 방안을 제시하는 데 있다. 이를 위해 시대적 요구와 필요성을 절감하고, 지역적 차원에서 창조경제에 기반한 새로운 지역발전 패러다임으로서 국민대통합과 지역균형발전을 지향하는 「지역순환형 자립발전모델」을 제시하였다. 이는 궁극적으로 국내외 패러다임의 변화를 체계적 이론적 틀로써 통합하고 실질적으로 적용하기 위한 것으로 지역을 중심으로 사람을 키우고, 청년을 살게 하고, 사람이 모이게 하는 것을 의미한다. 이를 달성하기 위한 구체적 전략으로서 선순환 전략과 자립전략을 제시하였다. 첫째, 지역순환형 자립발전의 토대가 되는 자립전략으로서 지역발전의 가치와 목적을 ‘지역역량강화(Competency)’. ‘연계협력(Cooperation)’, ‘융합(Convergence)’의 3C전략을 제시하였다. 둘째, 지역순환형 자립발전을 달성하기 위한 선순환 진흥전략으로서 지역교육 진흥, 지역산업진흥, 지역문화예술진흥, 지역복지진흥, 지역창조와 재생을 제시하였다. 첫 번째 전략은 우수 인재양성을 통한 지역교육 진흥(振興)이다 교육부문 진흥을 통해 우수한 인재를 양성하고 지역에 공급하는 시스템을 구축하는 것이다. 둘째, 일자리 창출을 위한 지역산업진흥(振興) 이다, 즉 산업부문 진흥을 통해 청년일자리 창출 및 역동적 지역창출에 기여하는 것이다. 셋째, 지역문화와 예술 기반 구축 및 역량 강화를 통해 지방문화예술을 진흥해 나가야 한다. 넷째, 지역복지역랑 강화를 위한 지역복지 진흥(振興) 이다. 지역복지 진흥을 통해 지역 복지 예산 및 인프라 구축 등을 통해 서민들이 피부로 느낄 수 있는 복지역량을 강화시켜나가야 할 것이다. 마지막으로 지역창조와 재생을 통해 관련 인프라를 확충하여 국토의 고른 공간 창출을 진흥시켜 나가야 할 것이다. Despite local government efforts for regional change, the local self-government based development is vulnerable to deepening disparities between regions. While confronting the paradigm of the latest changes in national and international development of the region that Park Geun-hye government faces, the purpose of this study is to present concrete plans for achieving self-sustaining regional development based on decentralization and balanced development. To this end, with the demands and needs of the times, “The Self-Supporting Development Model of the Regional Circulation” is proposed which professes national unification and balanced regional development as a new regional development paradigm which is based on the creative economy utilizing the local dimension. Ultimately, this is for integrating a domestic and foreign paradigm shift as a systematic theoretical framework and practically applying that in the field. It intends to accomplish this by educating people in the area, making them live in the area, and gathering people into the area. In order to achieve it, we proposed a virtuous and self-supporting development model. Firstly, for tile self-supporting development of the regional circulation, the 3C strategy-Competency, Cooperation, Convergence, Convergence-is proposed. Secondly, in order to achieve self-supporting development as a strategy for promoting regional circulation, we proposed promotion of regional education, regional industrial development, local cultural arts, and community welfare for the creation and regeneration of the region. The first strategy is through promotion of local education by fostering talented people in the regional area. Secondly, by creating jobs for local industrial development and contributing to the creation of a dynamic region. Thirdly, by empowering the local culture and building up the cultural grounds, through promotion of local art and culture. Fourthly, local social welfare should be promoted through community welfare budgets and appropriate infrastructure in order to strengthen the regional social welfare power. As a result, people will benefit through welfare empowerment. Lastly, enhancing the infrastructure through the creation and expansion in the reproduction of the region. As a result of the effort in making a well-balanced regional development, it is expected a well-balanced space development for the whole country.

      • 광학활성 B-Alkoxy-9broabicyclo[3.3.1]nonane-Potassium Hydride 환원계에 의한 라세미 에폭시화물의 분할

        李光雨,孔亨根,車震淳 嶺南大學校附設 基礎科學硏究所 1986 基礎科學硏究 Vol.6 No.-

        In this study, chiral B-alkoxy-9-borabicyclo[3.3.1]nonane-potassium hydride systems were applied to the resolution of representative racemic epoxides, namely 1,2-epoxybutane, 1,2-epoxyoctane and styrene oxide. Chiral B-alkoxy-9-BBN systems were synthesized from the reaction of 9-BBN with (-)-isopinocampheol and (-)-cis-myrtanol, respectively. The resolution of 2 equiv of racemic epoxide was carried out with 1 equiv of the reducing system at 0℃. Thus, the 1 equiv of epoxide was reduced to the alcohol, remaining the other 1 equiv of epoxide intact. The resolving ability of these systems in terms of optical purity of the alcohol appeared to be 25-40% in the case of aliphatic epoxide and 9-12% in the case of styrene oxide. The absolute configuration of the alcohols is consistent with (R)-(-)-aliphatic alcohol and (S)-(-)-1-phenylethanol.

      • KCI등재

        복숭아의 재배 및 저장기간 중 Procymidone, Chlorpyrifos 및 Cypermethrin의 잔류량 변화

        이용재,고광용,원동준,길근환,이규승 한국환경농학회 2003 한국환경농학회지 Vol.22 No.3

        복숭아의 생산단계에서 잔류허용 기준과 최종 소비단계에서의 잔류양상 평가자료로 활용하기 위하여 복숭아에서의 procymidone, chlorpyrifos 및 cypermethrin의 포장상태에서와 실온(20°C) 및 저온(4°C) 저장시 잔류양상을 알아보았다. Procymidone의 포장상태에서의 반감기는 표준량 3.1, 배량 3.4일로 나타났고, chlorpyrifos는 포장상태에서 포준량 7.2, 배량 5.8일로 나타났으며, cypermethrin은 표준 10.1, 배량 14.4일로 나타났다. 약제 살포 후 초기 부착량이 MRL 이하로 내려갈 때까지의 시간을 계산해 본 결과 배량으로 살포 할 경우 procymidone과 chlorpyrifos는 안전사용기준 보다 시간이 오래 걸렸지만, 표준량으로 사용할 경우 별다른 문제가 없는 것으로 나타났다. 저장기간 중의 procymidone, chlorpyrifos, cypermethrin의 반감일수는 20°C에서 4.6, 10.2, 12.9일 이며, 4°C에서는 16.1, 14.3, 13.1일로 저온에서의 반감기가 실온에서보다 더 긴 것을 알 수 있었다. 한편 세척방법에 의한 잔류농약의 제거율은 수돗물에서는 최고 procymidone 82.9%, chlorpyrifos 27.0%, cypermethrin 24.0%로 나타났고, 세제를 사용 할 경우 procymidone 88.8%, chlorpyrifos 59.0%, cypermethrin 59.4%의 제거율을 보였다. The residue patterns of procymidone, chlorpyrifos and cypermethrin in peaches were examined. The pesticides were sprayed at 15 days before harvest and then were determined the residue at 0, 1, 2, 3, 5, 7, 10 and 15 days after pesticide application and calculated their DT_(50). Also, the degradation patterns at 4℃ and 20℃ during storage period were compared. Biological half-lives of procymidone, chlorpyrifos and cypermethrin in peaches during the cultivation period were 3.1, 7.2 and 10.4 days, respectively. The biological half-life of procymidone was shorter than the others. During the storage period, half-lives of procymidone, chlorpyrifos and cypermethrin were 16.0, 14.3 and 13.1 days at 4 C and 4.6, 10.2 and 12.9 days at 20℃, resp ectively. The degradation rates of these three pesticides in storage period were slower than them in cultivation period. Removal rates were 22.2--82.9% by tap water, and 12.5∼88.8% by detergent solution.

      • 전류모드방식 적분기의 구조개선을 통한 성능비교

        이근호,조성익,방준호,김동용 全北大學校 論文集 Vol.42 No.-

        In this paper, a CMOS fully-differential complementary current-mode integrator adequate to design low-voltage, low-power and high frequency application circuit. The designed fully-differential complementary current-mode integrator has a new architecture. When the improved integrator is compared with proposed current-mode integrator, the new integrator has lower power dissipation and higher frequency range. The small signal analysis results are showed in table.1 with several improved characteristics. And the results of PSPICE simulation using ORBIT company's 1.2㎛ CMOS n-well processing parameter shows fig. 3.

      • 한국 경호환경의 동향과 전망에 대한 분석

        이상철,유송근,박준석,김병주 龍仁大學校 1998 용인대학교 논문집 Vol.15 No.-

        It is neccesary to facilitate the developments of the systems, principles and instructions of guarding in order that the security guard be able to meet the needs of the environments of guarding regardless what kind of government system our country may be. The guard also need the nationality and brilliant brains rather than the political power so that the guarded be safe always and everywhere and all people in the country feel peaceful and safe, which requires it that every bodyguard investigate and develope the new technology of guarding through reasonable and scientific methods. And I think followings are necessary for the development and advance of future the Security guard : the strong relations with the related organizations, the education facilities for supporting good and strong bodyguards, the related information bureau with mood image against the internation terror croups, and professionalization for better adaption in the idustralized various society, and the department for study on the principles of guarding. In addition to those, it would be important to be equipped with enough amarments and strong wills. Anyway, the next 21th century requires big change of the everyone's opinions on guarding and it would not be impossible to provide complete guard with only the system of guard itself, so it needs everyone's help. Of course will it require the professionals of Information technology too, in the future information society. I suggest that it need to combine various functions and specialize each fuction of the security guard at the same time. Then it would be more easy to maintain the system to prevent the future dangers, so to acomplish the complete guarding system. As a conclusion, it would be possible to meet the 21th environment of guarding only with the scientific, reasonable and specialized guard system.

      • 不良住宅地區의 政策方案에 關한 硏究 : 서울市 不良住宅地區의 住居實態分析을 中心으로

        裵俊銶,李盛根 嶺南大學校社會科學硏究所 1982 社會科學硏究 Vol.2 No.2

        1. Introduction In a rapidly developing and urbanizing country like Korea, housing has significant economic, social and political ramifications. Rapid urbanization has taken place primarily because the rural poor have migrated into large cities for employment opportunities and better living conditions. Consequently urban housing has become scarce in quantity, expensive in price, and overcrowded to the extent that doubling-up and tripling-up are commonplace. Coincident with these problems is that of the urban squatter settlements, which have become widespread and generate tremendous urban problems. The Korean government has devised numerous measures to tackle the squatter problem. The government's effort has been successful only in a limited sense; it improved the city's physical appearance through slum clearance and renewal. It is, however, subject to serious criticisms; and two of them are particularly significant: inconsistency in policies which often resulted in waste of resources, and deprivation of the individual rights of those directly affected. Another, equally serious as these, has to do with the intolerable financial burden that relocates have to bear. Such criticisms have forced the government to change its policy direction; and the recently considered, new policy measures are geared to selective redevelopment, and immediate legalization, with revised housing standards for squatters. Although it has not yet materialized, the idea is highly commendable. Obviously, more in-depth studies must be carried out; and a set of alternative courses of action generated and evaluated in terms of the legal, institutional and financial implications of each before the new policy is firmly set. Additionally, the on-going policies and programs ought to be rigorously assessed to gain insight from past experience. 2. The Definition of Squatter Dwellings The first question that must be answered is, what is a squatter home? The definition should differ from one country to another, depending upon the degree of squatter settlement concentration and the definition of housing quality and/or standards. The most difficult task in the process of defining substandard housing is to clarify the difference between a substandard unit and an illegal unit. Normally the degree of substandardness is measured in terms of qualitative housing standards, whereas illegal housing is defined simply by the absence of a legal title to the property. A.L. Mabogunje points out that the first step is measuring habitability is to consider the various types of functions that standards are meant to perform in shelter provision. In reviewing the standards for shelter provision, especially in developing countries, he offered a threefold division as follows; 1) Space-Use and Density Standards; 2) Health and Sanitation Standards; 3) Community Facilities and Services Standards. The first category includes minimum lot sizes, number of buildings per unit area, building bulk per unit, number of persons per room or number of persons per area. The second grouping, technological or performance standards, is intended to define the quality of environment, particularly in terms of the quality of construction, the type of materials that must be used, the quality of services that can be offered, or tolerable levels of toxicity. The third grouping defines the lower and upper limits of the size of population, and the area or distance to be served by particular amenities or community facilities. In Korea, however, the measuring criteria for substandard housing are primarily physical and legal. The Ministry of Construction (MOC) utilizes criteria somewhat a mixture of substandard and illegal housing as follows: -floor area is less than 7pyong (substandard) -illegal housing on public land (illegal) -housing without permission (illegal) -housing with inadequate building materials such as shacks (illegal or substandard) -lacking utilities such as electricity, water, and sewer etc, (substandard or illegal) The criteria used by the City of Seoul are similar to those of the MOC. The acquisition of proper title and building permission are two major legal criteria. According to these criteria, substandard housing includes both the legal but physically substandard as well as all illegally built housing. In this paper, therefore, the term (squatter) refers to both these categories of housing; i.e., legally and properly titled but substandard housing, and illegally built, improperly titled housing. 3. An Overview of the Squatter Areas Conditions 1) Physical conditions -materials of dwelling are used more durable materials compared to 1970, for example, cement bricks etc. -size of house became larger than '70, but under half of Seoul average. -total number of room per dwelling is almost equal to Seoul average, but total number of room used by a household is smaller than Seoul average. -housing facilities (sanitary etc.) became better than '70, but sanitary, sewage and waste disposal conditions are unhealthy and insufficient. -in summary physical condition and dwelling density are unhealthy, insufficient and overcrowded compared to Seoul average level. 2) Social conditions -a number of person per household is more than Seoul average, and the preferance to boy is stronger than the other survey areas. -the composition rate of traditional family is higher than Seoul average, and a number of tenements in dwelling is more than Seoul average. -occupations of household head are mainly unskilled workers and cottage industry workers. -the relationships of neighborhood and social networks are very friendly close and intimate. -they show strong interest to the redevelopment program of squatter communities. -residents don't to migrate long distance in a city, instead of moving to near squatter communities. -the period of settlement in present location is mainly before 1970. -present housing areas are considered as essential and critical base for their economical opportunities. 3) Economic conditions -monthly income don't reach to Seoul average, but it has increased compared to '70. -especially, the propensity to saving is high. -house prices and rents in squatter communities are cheaper than the other areas. 4. An Overview of The Redevelopment Policy The early squatter clearance projects, such as building clearance program, citizens apartment program, were ineffective. Squatter settlements policy has been ill-conceived and misguided; squatter settlements were regarded simply as a social disease and the people's welfare was totally overlooked. The City of Seoul enacted the Housing Rehabilitation Act in 1973. The act stipulated that local government would provide infrastructure and community services, and it allowed the government to take full control over the rehabilitation projects of squatters. With this legal support the city prepared the rehabilitation plan for 126,000 units by means of upgrading rather than relocation. The impact of the rehabilitation project was minor at best. The project failed to relate itself to the affordabilities of low income squatter families. Recognizing the failure of the housing rehabilitation policy for squatters provided by the Housing Rehabilitation Act of 1973, the City of Seoul strived to implement the redevelopment policy by means of clearing out squatter homes and constructing new dwelling units, mainly multifamily units, on the same sites. This approach began with the premise that an efficient and effective redevelopment policy should be well coordinated with overall city functions, such as location, community facilities, etc., and consider aesthetic factors as well. The government adopted the Urban Renewal Act in 1976 (December 31), replacing the Urban Redevelopment section of the City Planning Act which had been established after the Korean war (1950-1953). The renewal act of 1976 provided criteria for designating a redevelopment area, the qualifications of an implementing agency and procedures, and methods and procedures for participation of private developers, etc. 5. Evaluation of the Redevelopment Policy for Squatter Areas 1) Evaluation of Policy Objectives The objectives of current policy emphasize recovering the urban functions and aesthetic elements of the city by means of the physical removal and redevelopment of squatter rather than by improving the social welfare of squatter families. Although this ill-conceived and misguided policy has contributed to improving the city's aesthetics considerably, it has brought heavy financial burdens to squatter families, destroyed community integration, downgraded living environments through relocation activities, and consequently engendered sprawls of squatter dwellings on peripheral areas of the city. It is, therefore, difficult to justify the policy objectives of the current program. 2) Evaluation of methodology <Redevelopment> The redevelopment program, involving primarily demolition and renewal in the project areas, is found to have some merit in its renewal of densely developed squatter areas. Furthermore the program achieves the physical improvement of squatter life by securing open space, and the improvement of housing standards. However one has to look at the negative side as well which involves aggravation of the housing shortage and the heavy financial burden on the squatter. <Relocation> As an easy physical control measure implemented in those areas not eligible for either rehabilitation or redevelopment, a relocation policy has been utilized. The procedure begins with the notification of relocation within a one year period. If the families receive the notification to move within the required period, they are eligible for both a priority ticket for public housing accommodation and financial assistance in moving. Otherwise, all families in the area will be removed by force. The statistics for relocation, indicate that 55,169 units were removed by the end of 1978, and 48,103 newly formed units were being cleared. Since the relocation measure removed about 90% of the targeted units, it might imply the successful achievement of the measure statistically. However, the Third Illegal Housing Survey done in 1979 indicated that there were 30,000 additional units to be removed. The relocation policy has many difficulties and is unlike redevelopment which provides a better living environment. 6. The Policy Plan for Squatter Areas If one conceives only the physical improvement of squatter areas, the redevelopment approach has offered and would continuously offer great potential for accomplishing the housing policy objectives. The program was designed to clean up squatter settlements in the city core areas and build new residential complexes on them in accordance with a comprehensive plan. No other planning tool would provide the possibility for such radical change. Although the redevelopment program has much merit for reviving the city functionally and improving its aesthetics it is nevertheless, subject to many criticizms. If the city government is to solve the problem of housing shortage, attention must be given to these segments of society that are most desperately in need of housing, and not to those already in possession of homes. Even if the government is concerned more about the quality of the urban environment, workable and reasonable measures designed to improve the status of existing houses would be more effective than wholesale removal and resettlement. Regardless of what appears to be an obviously more realistic approach to housing policy, and regardless of the important functions that squatter settlements provide to needy residents, the government continues to treat squatters and squatter and squatter settlement both unwisely and unfairly. Squatter areas are regarded as an embarrassment and as the breeding ground for intense political instability. In this regard, John Turner has written: "The reasons for the failure of conventional housing programs, or of any program for the replacement of substandard dwellings, lie in the discrepancies between people's needs and the standards for housing set by the institutions. The immense variability of individual households' needs and the inelasticity of low-income people's housing demands, creates a difficult situation for governments.' The present policy lacks an appreciation for the positive functions that squatter settlements provide, and it endangers the fragile network of physical and social relationships that make it possible for the low-income squatter to survive and pursue a meaningful life in the city. It would be both more sensible and more humane to permit existing levels of squatter settlements to remain and allow the inhabitants to better their lives, than risk the potential negative effects and high costs, both social and individual, inherent in relocation. Much of the discussion has thus far focused on the government's failure to understand the real needs of low income, squatter families with respect to housing. Numerous attempts has been made to alleviate housing conditions of squatter families and yet many have resulted in worsening the situation. It is this paper's recommendation that most squatter settlements in Seoul should be immediately legalized, rehabilitated, and selectively redeveloped. Although squatters comprise the lowest socio-economic group of the urban population, it has been shown that they have a very high level of developmental motivation and aspiration. In no sense are these families down-and-out slum dwellers. They are hard-working, ambitious, and achievement-oriented working class households, who, if given the opportunity, can and will contribute greatly to the overall betterment of the city. As possible mitigation measures, some policy alternatives are proposed in this chapter. These measures deal with the clarification of definition, criteria reformulation, compiling of explicit date, implementation of modified redevelopment, relocation, and financial resources. -clarification of definition -reformulation of criteria -compiling explicit data -implementation of modified redevelopment -relocation -financial resources

      • Tantalum Pentoxide 박막의 전기적 특성에 관한 연구

        장충근,송재용,이기선,강준길,김수용 충남대학교 1990 忠南科學硏究誌 Vol.17 No.2

        Thin tantalum pentoxide(Ta_2O_5) films were deposited by oxygenassisted pyrolysis of tantalum methoxide using LPCVD method and their UV-absorption characteristics, X-ray diffraction, surface structure and I - V characteristics were investigated. Ta_2O_5 films as grown were originally amorphous and became polycrystalline hexagonal δ-Ta_2O_5 after annealing at 800℃ in the nitrogen gas atmosphere for 4 hours. The structures of the si_3N_4 films deposited by LPCVD were basically amorphous but mixed micro crystallites were observed in the films. For the Ta_2O_5 films of about 1000Å thick, the leakage current density through the films was 10 exp (-7) A/㎠ at 5 MV/㎝. The leakage current density was high and breakdown voltage was low with respect to Si_3N_4, Ta_2O_5 films could make them attractive in multiplayer dielectric thin films for memory devices.

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