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Park, Chulkyun,Kim, Hyojun,Park, In-Sung,Ko, Ki-Young,Kim, Ki-Kang,Lee, Byoung Hun,Ahn, Jinho Elsevier 2015 MICROELECTRONIC ENGINEERING Vol.136 No.-
<P><B>Abstract</B></P> <P>We developed a zirconium oxide (ZrO<SUB>2</SUB>) nanoparticle-assisted photonic structure for improving the light extraction efficiency of Y<SUB>2</SUB>O<SUB>3</SUB>:Eu<SUP>3+</SUP> phosphor films by reverse nano-imprint lithography approach. The structural effect of a two-dimensional (2D) ZrO<SUB>2</SUB> nanoparticle photonic crystal (PC) pattern on the extraction efficiency of photoluminescence (PL) from the underlying Y<SUB>2</SUB>O<SUB>3</SUB>:Eu<SUP>3+</SUP> phosphor film was investigated. The 2D photonic crystal structure was fabricated using a reverse nano-imprint process with a ZrO<SUB>2</SUB> nanoparticle solution as a nano-imprint resin and a patterned trimethylolpropane propoxylate triacrylate (TPT)/polydimethylsiloxane (PDMS) stamp as a mold. We controlled height of ZrO<SUB>2</SUB> nanoparticle patterns in the range 190–370nm by varying the height of master mold. This simple process results in 6.9 times improvement of extraction efficiency for a 2D ZrO<SUB>2</SUB> nanoparticle-assisted photonic crystal pattern (<I>h</I> =∼370nm) compared to the conventional Y<SUB>2</SUB>O<SUB>3</SUB>:Eu<SUP>3+</SUP> thin-film phosphors.</P> <P><B>Highlights</B></P> <P> <UL> <LI> We developed a ZrO<SUB>2</SUB> nanoparticle-assisted PCL for improving the light extraction efficiency of Y<SUB>2</SUB>O<SUB>3</SUB>:Eu<SUP>3+</SUP> TFPs. </LI> <LI> Photonic crystal structure was fabricated using reverse nano-imprint lithography. </LI> <LI> Patterned TPT/PDMS stamp was used as the mold. </LI> <LI> Y<SUB>2</SUB>O<SUB>3</SUB>:Eu<SUP>3+</SUP> TFPs were prepared by Pechini-type sol–gel reactions. </LI> <LI> PL emission spectra of 2D PCL Y<SUB>2</SUB>O<SUB>3</SUB>:Eu<SUP>3+</SUP> TFPs were measured. </LI> </UL> </P> <P><B>Graphical abstract</B></P> <P>The reverse nano-imprint process results in 6.9 times improvement of extraction efficiency for a 2D ZrO<SUB>2</SUB> nanoparticle-assisted photonic crystal pattern (<I>h</I> =∼370nm) compared to the conventional Y<SUB>2</SUB>O<SUB>3</SUB>:Eu<SUP>3+</SUP> thin-film phosphors.</P> <P>[DISPLAY OMISSION]</P>